[Scan]
initial_time=2016-01-28T20:07:39
final_time=2016-01-28T20:07:59
ip_count=19
run=1026
dataset=6
scan=476
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08767E-4
ql1_vset=
ql1_vmon=-8.16131E-1
ql1_imon=1.37189E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=1.97935E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=3.57842E-10
ql4_vset=
ql4_vmon=-9.14171E0
ql4_imon=-1.01173E-10
mult1=-9.23468E-9
mult2=-2.68069E-9
rf_tmon=-5.45572E-3
rf_agc=3.25285E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.74854E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.55429E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19853E1
lens5a_imon=1.98263E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.04932E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53861E1
cs_ef1b_imon=3.08394E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04604E2
lens23_imon=1.02075E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04835E1
cs_ea1_imon=1.26274E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41518E0
lens1_imon=2.4207E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64016E1
os_ef1alow_imon=2.93873E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03703E1
cs_ea2_imon=1.39977E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84288E1
cs_ef1a_imon=3.02668E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.24974E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11872E1
os_restr1_imon=4.32049E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14803E1
os_ea1_imon=2.40288E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63405E1
os_ef1bup_imon=3.04614E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26037E0
cs_ionrep_imon=9.68065E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93435E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01516E1
cs_anode1_imon=2.04912E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.24001E-8
tplens_vset=1.4E-1
tplens_vmon=1.63444E0
tplens_imon=-1.29065E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26128E1
iondef3_imon=1.48336E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.265E1
iondef2_imon=1.57497E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02885E2
lens6_imon=2.98254E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.95515E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32462E0
ionrepsh_imon=9.25314E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33664E1
lens5b_imon=2.17119E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.75106E1
cs_ef2b_imon=3.14794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46649E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00386E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71152E1
cs_ef2a_imon=3.1558E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-3.99717E0
os_ef2alow_imon=-2.78016E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.53771E-1
os_ef2bup_imon=-5.20535E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11317E1
os_restr2_imon=3.41441E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.31799E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02221E1
cs_anode2_imon=2.11087E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72696E1
iondef1_imon=1.07952E-5
iondef4_vset=2.691E1
iondef4_vmon=2.66809E1
iondef4_imon=1.07343E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.25517E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.63561E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.06402E0
cs_ionaccel_imon=-1.2981E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47653E-4
einzel_vset=-2.1E1
einzel_vmon=-2.57016E1
einzel_imon=7.81509E-6
window_vset=0.0E0
window_vmon=2.21339E-1
window_imon=-1.49645E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.39339E-4
mask2_vset=0.0E0
mask2_vmon=-1.87355E1
mask2_imon=-3.6245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.38663E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.64994E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.54312E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64341E0
defgridb_imon=5.93998E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.40917E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08926E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63241E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30534E1
cs_fil1_imon=9.25173E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28264E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63816E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.15337E-2
os_fil2_imon=-2.7124E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.49176E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.78488E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.05121E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.67265E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21937E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-1.34206E-1
res40_imon=-2.44332E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=170
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09433E0	-8.15868E-1	-7.98535E-1	-9.1315E0	-9.14185E0	5.03063E-3	9.34124E-2	2.72945E1	-3.26738E1	-3.26236E1	2.68857E1	1.20208E-7	2.51271E-3	2.51271E-3	6.34164E-3	3.01609E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16154E-1	-7.98321E-1	-9.13153E0	-9.1418E0	4.95911E-3	9.35793E-2	2.72984E1	-3.26731E1	-3.26181E1	2.69822E1	1.2033E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09472E0	-8.16131E-1	-7.98631E-1	-9.13146E0	-9.14187E0	5.10216E-3	9.36031E-2	2.72951E1	-3.26762E1	-3.26325E1	2.68105E1	1.20084E-7	2.51136E-3	2.51136E-3	6.32978E-3	2.99348E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09472E0	-8.16345E-1	-7.98416E-1	-9.13155E0	-9.14178E0	5.14984E-3	9.38177E-2	2.73039E1	-3.26573E1	-3.26248E1	2.67692E1	1.19891E-7	2.51709E-3	2.51709E-3	6.32328E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16417E-1	-7.9844E-1	-9.13179E0	-9.14178E0	5.03063E-3	9.3627E-2	2.73159E1	-3.26705E1	-3.26506E1	2.68136E1	1.20137E-7	2.51136E-3	2.51136E-3	6.30182E-3	2.99613E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09426E0	-8.1625E-1	-7.98559E-1	-9.13186E0	-9.14183E0	5.10216E-3	9.32693E-2	2.72949E1	-3.26759E1	-3.26236E1	2.68292E1	1.19861E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09518E0	-8.16321E-1	-7.98702E-1	-9.13155E0	-9.14197E0	4.98295E-3	9.35078E-2	2.73163E1	-3.2672E1	-3.26266E1	2.66995E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16083E-1	-7.98798E-1	-9.13174E0	-9.14166E0	4.74453E-3	9.34839E-2	2.72901E1	-3.26729E1	-3.26554E1	2.69097E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16226E-1	-7.98488E-1	-9.13146E0	-9.14164E0	4.76837E-3	9.34601E-2	2.72845E1	-3.26449E1	-3.26024E1	2.68383E1	1.19809E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16202E-1	-7.98368E-1	-9.1316E0	-9.14168E0	4.81606E-3	9.32932E-2	2.72757E1	-3.26621E1	-3.26404E1	2.66286E1	1.19851E-7	2.52384E-3	2.52384E-3	6.3074E-3	3.00197E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09503E0	-8.16417E-1	-7.9844E-1	-9.13174E0	-9.14187E0	4.76837E-3	9.34601E-2	2.73446E1	-3.26927E1	-3.25871E1	2.66706E1	1.19809E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09533E0	-8.1706E-1	-7.98607E-1	-9.13122E0	-9.14192E0	4.88758E-3	9.33409E-2	2.73255E1	-3.26729E1	-3.2641E1	2.68947E1	1.19851E-7	2.52061E-3	2.52061E-3	6.28592E-3	2.9841E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16488E-1	-7.98225E-1	-9.13172E0	-9.14187E0	4.98295E-3	9.32932E-2	2.73129E1	-3.26795E1	-3.26543E1	2.68797E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.97963E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16321E-1	-7.98559E-1	-9.13155E0	-9.14209E0	4.8399E-3	9.36508E-2	2.72925E1	-3.2644E1	-3.25828E1	2.66436E1	1.20069E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9952E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16274E-1	-7.98655E-1	-9.13146E0	-9.14192E0	4.52995E-3	9.36508E-2	2.72986E1	-3.26408E1	-3.26809E1	2.66321E1	1.19965E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16274E-1	-7.98678E-1	-9.13126E0	-9.14207E0	4.673E-3	9.377E-2	2.72973E1	-3.26795E1	-3.26158E1	2.66286E1	1.198E-7	2.52276E-3	2.52276E-3	6.33977E-3	2.9892E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16107E-1	-7.98583E-1	-9.13155E0	-9.14197E0	4.93526E-3	9.33886E-2	2.73171E1	-3.2653E1	-3.26873E1	2.67848E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.97187E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.1625E-1	-7.98512E-1	-9.13138E0	-9.14199E0	4.69685E-3	9.36031E-2	2.73051E1	-3.26862E1	-3.26349E1	2.69163E1	1.20055E-7	2.51847E-3	2.51847E-3	6.33977E-3	2.96634E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16178E-1	-7.98488E-1	-9.1315E0	-9.14192E0	4.57764E-3	9.37939E-2	2.7236E1	-3.26458E1	-3.2748E1	2.67463E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.99E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16131E-1	-7.98512E-1	-9.13153E0	-9.14171E0	4.72069E-3	9.35793E-2	2.72696E1	-3.265E1	-3.26128E1	2.66809E1	1.19809E-7	2.5199E-3	2.5199E-3	6.32936E-3	2.9926E-1
