[Scan]
initial_time=2016-01-28T20:08:06
final_time=2016-01-28T20:08:25
ip_count=19
run=1026
dataset=6
scan=477
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0968E0
qbias_imon=-1.08851E-4
ql1_vset=
ql1_vmon=-8.16226E-1
ql1_imon=1.37202E-8
ql2_vset=
ql2_vmon=-7.98011E-1
ql2_imon=2.00263E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=3.35765E-10
ql4_vset=
ql4_vmon=-9.1413E0
ql4_imon=-8.33511E-11
mult1=-9.07816E-9
mult2=-2.73857E-9
rf_tmon=-3.74337E-3
rf_agc=3.26366E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.6863E-9
bslens_vset=-6.2E0
bslens_vmon=-6.69438E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19893E1
lens5a_imon=1.97334E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.0506E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.54079E1
cs_ef1b_imon=3.11569E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0482E1
cs_ea1_imon=1.24586E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39539E0
lens1_imon=2.38634E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64182E1
os_ef1alow_imon=2.91531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.40808E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=3.01982E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.25374E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.31401E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15498E1
os_ea1_imon=2.40773E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.03856E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23527E0
cs_ionrep_imon=9.73684E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91905E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01455E1
cs_anode1_imon=2.07054E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.23952E-8
tplens_vset=1.4E-1
tplens_vmon=1.60238E0
tplens_imon=-2.48877E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26218E1
iondef3_imon=1.491E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.58076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02948E2
lens6_imon=2.98386E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=4.0064E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27793E0
ionrepsh_imon=9.416E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33874E1
lens5b_imon=2.18459E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7515E1
cs_ef2b_imon=3.14776E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.52367E0
os_ea2_imon=-6.52631E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0612E2
lens4b_imon=2.00518E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.16506E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-3.9993E0
os_ef2alow_imon=-2.85016E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.32262E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11532E1
os_restr2_imon=3.40869E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23033E2
cs_ionfoca_imon=6.29279E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02404E1
cs_anode2_imon=2.09757E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72973E1
iondef1_imon=1.12041E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67751E1
iondef4_imon=1.05926E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.20303E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81855E-1
olens1_imon=7.68015E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08029E0
cs_ionaccel_imon=-1.36893E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0204E2
cs_ionfocb_imon=1.47688E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56868E1
einzel_imon=7.48962E-6
window_vset=0.0E0
window_vmon=2.13739E-1
window_imon=-1.1671E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82588E2
mask1_imon=2.39297E-4
mask2_vset=0.0E0
mask2_vmon=-1.87257E1
mask2_imon=-4.13876E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92667E3
multa_neg_imon=7.5198E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.62577E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.46212E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33841E0
defgridb_imon=6.30493E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.38642E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06825E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63361E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30539E1
cs_fil1_imon=9.25349E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28121E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63267E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1253E-2
os_fil2_imon=-2.84617E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.53866E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.69427E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.56986E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21737E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.53576E-1
res40_imon=-2.22307E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09634E0	-8.16441E-1	-7.98059E-1	-9.1316E0	-9.14152E0	4.57764E-3	9.34839E-2	2.73021E1	-3.26419E1	-3.26614E1	2.67073E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01609E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09673E0	-8.16345E-1	-7.98225E-1	-9.13172E0	-9.14135E0	4.3869E-3	9.35316E-2	2.72978E1	-3.26585E1	-3.26125E1	2.66897E1	1.20278E-7	2.52757E-3	2.52757E-3	6.29645E-3	3.01609E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.16178E-1	-7.98655E-1	-9.13165E0	-9.14147E0	4.43459E-3	9.36508E-2	2.72954E1	-3.26101E1	-3.26596E1	2.70034E1	1.19554E-7	2.5147E-3	2.5147E-3	6.3074E-3	2.99613E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.16059E-1	-7.98321E-1	-9.13172E0	-9.14154E0	4.55379E-3	9.36031E-2	2.73021E1	-3.26699E1	-3.2599E1	2.68286E1	1.19822E-7	2.51956E-3	2.51956E-3	6.29211E-3	2.99906E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09603E0	-8.16011E-1	-7.98345E-1	-9.13177E0	-9.14142E0	4.79221E-3	9.34124E-2	2.73135E1	-3.26819E1	-3.26452E1	2.67944E1	1.2035E-7	2.51359E-3	2.51359E-3	6.29624E-3	2.99879E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.16202E-1	-7.98225E-1	-9.13186E0	-9.14156E0	4.88758E-3	9.33647E-2	2.72877E1	-3.26368E1	-3.2644E1	2.6813E1	1.20158E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.01995E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09588E0	-8.16226E-1	-7.98345E-1	-9.13186E0	-9.14168E0	4.76837E-3	9.35555E-2	2.7288E1	-3.26738E1	-3.26472E1	2.68202E1	1.20226E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16393E-1	-7.98583E-1	-9.13169E0	-9.1419E0	4.81606E-3	9.3627E-2	2.73087E1	-3.26476E1	-3.26104E1	2.67986E1	1.19809E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.16226E-1	-7.98535E-1	-9.13174E0	-9.14178E0	4.95911E-3	9.36747E-2	2.73165E1	-3.26639E1	-3.26554E1	2.68046E1	1.19705E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09634E0	-8.16059E-1	-7.98345E-1	-9.13153E0	-9.14164E0	4.86374E-3	9.34601E-2	2.73435E1	-3.26807E1	-3.26068E1	2.6764E1	1.2033E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9926E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.16107E-1	-7.98416E-1	-9.13138E0	-9.14197E0	4.8399E-3	9.36985E-2	2.7311E1	-3.27009E1	-3.2606E1	2.68324E1	1.19851E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09657E0	-8.16226E-1	-7.98273E-1	-9.13146E0	-9.14204E0	4.88758E-3	9.34362E-2	2.73308E1	-3.26597E1	-3.26309E1	2.68275E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.15916E-1	-7.9844E-1	-9.13141E0	-9.14218E0	4.98295E-3	9.32693E-2	2.72895E1	-3.26771E1	-3.26296E1	2.67561E1	1.19965E-7	2.52428E-3	2.52428E-3	6.33486E-3	3.02922E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.16154E-1	-7.98297E-1	-9.13131E0	-9.14216E0	4.95911E-3	9.35555E-2	2.73346E1	-3.26874E1	-3.26101E1	2.6798E1	1.19861E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09727E0	-8.16035E-1	-7.98512E-1	-9.13141E0	-9.14187E0	4.64916E-3	9.33409E-2	2.73405E1	-3.26307E1	-3.26478E1	2.6831E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09734E0	-8.16202E-1	-7.98464E-1	-9.1315E0	-9.14183E0	4.64916E-3	9.34839E-2	2.73454E1	-3.26374E1	-3.2653E1	2.67236E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99686E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09665E0	-8.1656E-1	-7.98488E-1	-9.13162E0	-9.14173E0	4.79221E-3	9.35316E-2	2.72951E1	-3.26455E1	-3.26236E1	2.68791E1	1.20158E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.0071E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0975E0	-8.16441E-1	-7.98631E-1	-9.1316E0	-9.14168E0	4.43459E-3	9.33409E-2	2.73051E1	-3.265E1	-3.2599E1	2.67133E1	1.20122E-7	2.51007E-3	2.51007E-3	6.31837E-3	3.01609E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09711E0	-8.16536E-1	-7.98416E-1	-9.13134E0	-9.1418E0	4.673E-3	9.35078E-2	2.7311E1	-3.2639E1	-3.25234E1	2.68638E1	1.20036E-7	2.52189E-3	2.52189E-3	6.32371E-3	3.00766E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0968E0	-8.16226E-1	-7.98011E-1	-9.13126E0	-9.1413E0	4.673E-3	9.34601E-2	2.72973E1	-3.26603E1	-3.26218E1	2.67751E1					
