[Scan]
initial_time=2016-01-28T20:08:33
final_time=2016-01-28T20:08:52
ip_count=19
run=1026
dataset=6
scan=478
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09627E0
qbias_imon=-1.08804E-4
ql1_vset=
ql1_vmon=-8.15988E-1
ql1_imon=1.3715E-8
ql2_vset=
ql2_vmon=-7.98321E-1
ql2_imon=1.98984E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=3.38125E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-8.33988E-11
mult1=-9.61085E-9
mult2=-2.65074E-9
rf_tmon=-4.70821E-3
rf_agc=3.32296E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=1.68924E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62949E0
bslens_imon=2.43321E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19803E1
lens5a_imon=1.98271E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.0519E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53538E1
cs_ef1b_imon=3.11749E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02175E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.2473E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40981E0
lens1_imon=2.58822E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64975E1
os_ef1alow_imon=2.99784E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04027E1
cs_ea2_imon=1.40952E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84376E1
cs_ef1a_imon=2.98558E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.24473E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11003E1
os_restr1_imon=4.27004E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15065E1
os_ea1_imon=2.4135E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63984E1
os_ef1bup_imon=3.10992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=9.66475E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91851E2
cs_nozzle_imon=1.93388E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02049E1
cs_anode1_imon=2.03954E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.22824E-8
tplens_vset=1.4E-1
tplens_vmon=1.63482E0
tplens_imon=-2.30852E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2645E1
iondef3_imon=1.49893E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26624E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98429E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=3.99172E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.3272E0
ionrepsh_imon=9.27902E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33471E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74369E1
cs_ef2b_imon=3.09911E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50024E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06114E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71096E1
cs_ef2a_imon=3.20795E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10021E0
os_ef2alow_imon=-2.60869E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.63186E-1
os_ef2bup_imon=-5.36573E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10589E1
os_restr2_imon=3.37625E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.29856E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01347E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73319E1
iondef1_imon=1.08688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6806E1
iondef4_imon=1.109E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.31233E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.64924E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.17099E0
cs_ionaccel_imon=-8.10312E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47017E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55853E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=1.67488E-1
window_imon=-8.96807E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39041E-4
mask2_vset=0.0E0
mask2_vmon=-1.86362E1
mask2_imon=-8.75184E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92619E3
multa_neg_imon=8.07136E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.38424E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.06557E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=6.03456E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.41165E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07515E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63369E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3054E1
cs_fil1_imon=9.25277E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33106E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63776E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.00922E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.13331E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.74712E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34701E-1
cs_fil2_imon=-2.93627E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=6.73707E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21917E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.3949E-1
res40_imon=-2.56905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.16488E-1	-7.98631E-1	-9.13167E0	-9.14192E0	4.57764E-3	9.32932E-2	2.72709E1	-3.2688E1	-3.26626E1	2.69007E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09634E0	-8.16298E-1	-7.98655E-1	-9.13124E0	-9.14199E0	4.55379E-3	9.34362E-2	2.73201E1	-3.26699E1	-3.26452E1	2.66947E1	1.19749E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09665E0	-8.15988E-1	-7.98464E-1	-9.13117E0	-9.14218E0	5.07832E-3	9.33647E-2	2.73169E1	-3.26331E1	-3.26048E1	2.68945E1	1.20069E-7	2.5199E-3	2.5199E-3	6.35692E-3	2.98481E-1
4.0E0	1.2E1	0.0E0	6.55E2	3.98E2	-2.09627E0	-8.16298E-1	-7.98678E-1	-9.13177E0	-9.14178E0	4.8399E-3	9.33886E-2	2.73327E1	-3.26753E1	-3.26416E1	2.67421E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09642E0	-8.16345E-1	-7.98631E-1	-9.13146E0	-9.14209E0	4.95911E-3	9.3627E-2	2.72979E1	-3.26609E1	-3.26008E1	2.68689E1	1.19913E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.02133E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09565E0	-8.16536E-1	-7.98464E-1	-9.13165E0	-9.14185E0	4.72069E-3	9.34839E-2	2.72805E1	-3.26554E1	-3.26296E1	2.67391E1	1.19965E-7	2.51007E-3	2.51007E-3	6.35692E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09557E0	-8.16488E-1	-7.98273E-1	-9.13162E0	-9.14168E0	4.48227E-3	9.34839E-2	2.73033E1	-3.26585E1	-3.26132E1	2.67878E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.99E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16512E-1	-7.98631E-1	-9.13186E0	-9.14185E0	4.57764E-3	9.38416E-2	2.73147E1	-3.26344E1	-3.26567E1	2.67668E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.16464E-1	-7.98798E-1	-9.13148E0	-9.14166E0	4.69685E-3	9.35316E-2	2.72927E1	-3.2613E1	-3.26077E1	2.68719E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.16655E-1	-7.98702E-1	-9.13153E0	-9.14176E0	4.60148E-3	9.33886E-2	2.73204E1	-3.26652E1	-3.2645E1	2.67193E1	1.20017E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.00563E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0965E0	-8.16298E-1	-7.9844E-1	-9.13148E0	-9.14166E0	4.62532E-3	9.35793E-2	2.72597E1	-3.26354E1	-3.26278E1	2.67968E1	1.20278E-7	2.51552E-3	2.51552E-3	6.29645E-3	2.98481E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16226E-1	-7.98774E-1	-9.13155E0	-9.14187E0	4.673E-3	9.35316E-2	2.73187E1	-3.26744E1	-3.25942E1	2.67073E1	1.19861E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09526E0	-8.16059E-1	-7.98535E-1	-9.1316E0	-9.14187E0	4.76837E-3	9.36985E-2	2.73315E1	-3.26615E1	-3.26272E1	2.69229E1	1.20243E-7	2.51919E-3	2.51919E-3	6.2863E-3	3.00348E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09456E0	-8.16059E-1	-7.98631E-1	-9.13138E0	-9.14199E0	4.86374E-3	9.38177E-2	2.72774E1	-3.26649E1	-3.26236E1	2.68951E1	1.20137E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00942E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16059E-1	-7.9844E-1	-9.13136E0	-9.1419E0	4.55379E-3	9.37223E-2	2.72799E1	-3.26591E1	-3.26428E1	2.68202E1	1.20106E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.16178E-1	-7.98464E-1	-9.13131E0	-9.14176E0	4.8399E-3	9.34839E-2	2.72925E1	-3.26609E1	-3.25924E1	2.66785E1	1.20017E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.01085E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16202E-1	-7.98416E-1	-9.13162E0	-9.14197E0	4.62532E-3	9.377E-2	2.73351E1	-3.26807E1	-3.26338E1	2.68989E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16131E-1	-7.98273E-1	-9.13169E0	-9.14166E0	4.74453E-3	9.3317E-2	2.72544E1	-3.26402E1	-3.26201E1	2.6843E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09642E0	-8.16011E-1	-7.98368E-1	-9.13203E0	-9.14156E0	4.79221E-3	9.33886E-2	2.71435E1	-3.25311E1	-3.26873E1	2.662E1	1.20226E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09627E0	-8.15988E-1	-7.98321E-1	-9.13153E0	-9.14173E0	4.95911E-3	9.34124E-2	2.73319E1	-3.26624E1	-3.2645E1	2.6806E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.9841E-1
