[Scan]
initial_time=2016-01-28T20:08:59
final_time=2016-01-28T20:09:19
ip_count=19
run=1026
dataset=6
scan=479
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08848E-4
ql1_vset=
ql1_vmon=-8.16107E-1
ql1_imon=1.36478E-8
ql2_vset=
ql2_vmon=-7.98535E-1
ql2_imon=2.02093E-9
ql3_vset=
ql3_vmon=-9.13112E0
ql3_imon=3.21507E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-7.41124E-11
mult1=-9.69609E-9
mult2=-2.7565E-9
rf_tmon=-4.98073E-3
rf_agc=3.29549E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.72378E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66907E0
bslens_imon=2.55811E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1972E1
lens5a_imon=2.004E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5347E1
cs_ef1b_imon=3.07691E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04586E2
lens23_imon=1.02232E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05185E1
cs_ea1_imon=1.228E-5
lens1_vset=-5.0E0
lens1_vmon=-5.36365E0
lens1_imon=2.78331E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64193E1
os_ef1alow_imon=2.96676E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03811E1
cs_ea2_imon=1.41695E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84511E1
cs_ef1a_imon=3.03604E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.24903E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1185E1
os_restr1_imon=4.28079E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.41967E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63447E1
os_ef1bup_imon=3.06562E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26927E0
cs_ionrep_imon=9.75699E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93279E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01698E1
cs_anode1_imon=2.0762E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.23352E-8
tplens_vset=1.4E-1
tplens_vmon=1.61917E0
tplens_imon=-2.58843E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26836E1
iondef3_imon=1.48909E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26805E1
iondef2_imon=1.59024E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98365E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=4.03029E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28009E0
ionrepsh_imon=9.42491E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33709E1
lens5b_imon=2.16508E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7502E1
cs_ef2b_imon=3.13451E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.51547E0
os_ea2_imon=-7.43603E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06109E2
lens4b_imon=2.00558E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70868E1
cs_ef2a_imon=3.15242E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02472E0
os_ef2alow_imon=-2.66174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.14074E-1
os_ef2bup_imon=-5.03214E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.1137E1
os_restr2_imon=3.42254E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.32867E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02016E1
cs_anode2_imon=2.11357E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73008E1
iondef1_imon=1.07609E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68088E1
iondef4_imon=1.05292E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.26729E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.66414E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.075E0
cs_ionaccel_imon=-1.07758E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02139E2
cs_ionfocb_imon=1.47538E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56749E1
einzel_imon=7.51269E-6
window_vset=0.0E0
window_vmon=2.52902E-1
window_imon=-1.2683E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.3931E-4
mask2_vset=0.0E0
mask2_vmon=-1.87252E1
mask2_imon=-5.13201E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9259E3
multa_neg_imon=7.07363E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93761E3
defgrida_imon=6.12701E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.25685E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.63067E0
defgridb_imon=6.18045E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33275E1
os_fil1_imon=9.39741E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06862E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63343E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3052E1
cs_fil1_imon=9.24379E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30624E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63584E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.08509E-2
os_fil2_imon=-2.49009E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.71357E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.70435E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33008E-1
cs_fil2_imon=-2.5355E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.73952E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21827E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.97647E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40095E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-1.81737E-1
res40_imon=-2.10904E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09627E0	-8.16345E-1	-7.98035E-1	-9.13169E0	-9.14197E0	4.673E-3	9.34601E-2	2.72927E1	-3.26614E1	-3.26667E1	2.69264E1	1.19895E-7	2.51874E-3	2.51874E-3	6.31902E-3	3.0147E-1
2.0E0	2.9E1	0.0E0	3.16E2	1.6E2	-2.09588E0	-8.16369E-1	-7.98011E-1	-9.13153E0	-9.14209E0	4.95911E-3	9.34124E-2	2.72849E1	-3.26327E1	-3.2604E1	2.68941E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16274E-1	-7.9844E-1	-9.13165E0	-9.14183E0	4.74453E-3	9.34839E-2	2.72611E1	-3.26712E1	-3.26463E1	2.68574E1	1.19965E-7	2.52428E-3	2.52428E-3	6.30192E-3	3.00302E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16226E-1	-7.98464E-1	-9.13146E0	-9.14166E0	4.8399E-3	9.35078E-2	2.73063E1	-3.26614E1	-3.26136E1	2.68556E1	1.19841E-7	2.51603E-3	2.51603E-3	6.33388E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.0958E0	-8.16274E-1	-7.98464E-1	-9.13126E0	-9.1418E0	4.673E-3	9.33409E-2	2.72685E1	-3.26838E1	-3.26472E1	2.69902E1	1.19882E-7	2.52026E-3	2.52026E-3	6.32916E-3	3.0012E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09557E0	-8.16154E-1	-7.98416E-1	-9.13143E0	-9.14171E0	4.673E-3	9.34362E-2	2.73198E1	-3.26682E1	-3.26315E1	2.68611E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16011E-1	-7.98416E-1	-9.13167E0	-9.14197E0	4.93526E-3	9.36031E-2	2.73231E1	-3.26469E1	-3.26295E1	2.67323E1	1.19861E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16178E-1	-7.98488E-1	-9.13146E0	-9.14185E0	5.29289E-3	9.31978E-2	2.7301E1	-3.26467E1	-3.26331E1	2.6637E1	1.19902E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.16226E-1	-7.98464E-1	-9.1316E0	-9.14199E0	5.22137E-3	9.35555E-2	2.72408E1	-3.26386E1	-3.26615E1	2.69013E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.0071E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-2.09533E0	-8.16131E-1	-7.98464E-1	-9.1315E0	-9.14197E0	5.17368E-3	9.35555E-2	2.72886E1	-3.26597E1	-3.26076E1	2.70527E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9978E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09533E0	-8.16226E-1	-7.98368E-1	-9.13129E0	-9.14202E0	5.14984E-3	9.34839E-2	2.73134E1	-3.26667E1	-3.26484E1	2.67974E1	1.20017E-7	2.52647E-3	2.52647E-3	6.31288E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16298E-1	-7.98392E-1	-9.13162E0	-9.14171E0	5.26905E-3	9.32932E-2	2.72835E1	-3.26675E1	-3.2626E1	2.6752E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.02659E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.16059E-1	-7.98464E-1	-9.13115E0	-9.14152E0	4.8399E-3	9.35078E-2	2.72974E1	-3.26726E1	-3.26472E1	2.6783E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.98665E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16393E-1	-7.98678E-1	-9.1311E0	-9.14176E0	5.00679E-3	9.377E-2	2.73181E1	-3.26585E1	-3.26408E1	2.68028E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	2.9952E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09603E0	-8.16131E-1	-7.98583E-1	-9.13143E0	-9.1418E0	4.93526E-3	9.37223E-2	2.73706E1	-3.26609E1	-3.26464E1	2.68941E1	1.20055E-7	2.51203E-3	2.51203E-3	6.32896E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.1625E-1	-7.98655E-1	-9.13134E0	-9.14173E0	4.88758E-3	9.35793E-2	2.72444E1	-3.26801E1	-3.26428E1	2.66941E1	1.19653E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.16059E-1	-7.9844E-1	-9.13146E0	-9.14166E0	5.126E-3	9.34839E-2	2.73448E1	-3.26404E1	-3.26392E1	2.66316E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.01995E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16441E-1	-7.98488E-1	-9.13146E0	-9.14159E0	5.26905E-3	9.35316E-2	2.73045E1	-3.26803E1	-3.26319E1	2.68244E1	1.19757E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09464E0	-8.16369E-1	-7.98559E-1	-9.13126E0	-9.14159E0	4.95911E-3	9.34124E-2	2.72408E1	-3.26508E1	-3.27499E1	2.6795E1	1.20226E-7	2.51225E-3	2.51225E-3	6.28006E-3	2.96671E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16107E-1	-7.98535E-1	-9.13112E0	-9.14187E0	5.03063E-3	9.35793E-2	2.73008E1	-3.26805E1	-3.26836E1	2.68088E1	1.19749E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.97647E-1
