[Scan]
initial_time=2016-01-28T20:33:04
final_time=2016-01-28T20:33:24
ip_count=19
run=1026
dataset=7
scan=484
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.808E-6
ql1_vset=
ql1_vmon=-8.79976E1
ql1_imon=-3.32915E-9
ql2_vset=
ql2_vmon=-3.09944E-4
ql2_imon=1.56697E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-8.93804E-9
ql4_vset=
ql4_vmon=5.72205E-4
ql4_imon=1.67294E-8
mult1=-9.70836E-9
mult2=-2.74023E-9
rf_tmon=-5.09704E-3
rf_agc=3.30039E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=7.15196E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66621E0
bslens_imon=2.63528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19583E1
lens5a_imon=2.00563E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5369E1
cs_ef1b_imon=3.17018E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02394E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04988E1
cs_ea1_imon=1.0829E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05661E0
lens1_imon=1.43542E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64568E1
os_ef1alow_imon=2.98808E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03968E1
cs_ea2_imon=1.40428E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84406E1
cs_ef1a_imon=3.04195E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.27533E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11222E1
os_restr1_imon=4.30312E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=2.43E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63618E1
os_ef1bup_imon=3.0906E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23086E0
cs_ionrep_imon=9.64685E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91882E2
cs_nozzle_imon=1.93477E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01844E1
cs_anode1_imon=1.97331E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20535E0
olens4_imon=4.00532E-8
tplens_vset=1.4E-1
tplens_vmon=1.65913E0
tplens_imon=-2.70572E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25783E1
iondef3_imon=1.47684E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.57346E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02902E2
lens6_imon=2.98502E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=9.78482E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25387E0
ionrepsh_imon=8.61334E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33846E1
lens5b_imon=2.16596E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74912E1
cs_ef2b_imon=3.1264E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47449E0
os_ea2_imon=-7.12998E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00605E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71124E1
cs_ef2a_imon=3.20285E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07889E0
os_ef2alow_imon=-2.55373E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96072E-1
os_ef2bup_imon=-5.18797E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10921E1
os_restr2_imon=3.40268E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.3145E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02E1
cs_anode2_imon=2.10432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72598E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.10171E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.26417E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.74272E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12087E0
cs_ionaccel_imon=-1.01767E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56451E1
einzel_imon=7.87203E-6
window_vset=0.0E0
window_vmon=2.34483E-1
window_imon=-9.75966E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8266E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86576E1
mask2_imon=-6.38866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.50551E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.76223E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.16219E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30221E0
defgridb_imon=6.19947E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33279E1
os_fil1_imon=9.46214E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07636E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63017E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31782E1
cs_fil1_imon=7.61756E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.02935E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65327E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.17994E-2
os_fil2_imon=-2.42013E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16142E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.76708E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31025E-1
cs_fil2_imon=-2.2927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.4374E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22184E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3514E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.47246E-1
res40_imon=-2.49118E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.79976E1	-4.05312E-4	-8.80014E1	4.29153E-4	4.8399E-3	9.377E-2	2.72892E1	-3.26537E1	-3.2629E1	2.68274E1	1.19891E-7	2.52448E-3	2.52448E-3	6.32858E-3	3.03637E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.79973E1	-4.76837E-5	-8.80013E1	5.96046E-4	4.98295E-3	9.33647E-2	2.72961E1	-3.26621E1	-3.2632E1	2.67884E1	1.20106E-7	2.51096E-3	2.51096E-3	6.31817E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.79975E1	-2.38419E-4	-8.80013E1	3.09944E-4	4.95911E-3	9.34124E-2	2.73175E1	-3.26732E1	-3.26219E1	2.67879E1	1.19965E-7	2.51935E-3	2.51935E-3	6.33211E-3	3.01478E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.79974E1	2.38419E-5	-8.80012E1	4.52995E-4	4.76837E-3	9.38177E-2	2.72775E1	-3.26693E1	-3.26332E1	2.68244E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.79974E1	-1.43051E-4	-8.80011E1	5.72205E-4	4.76837E-3	9.38177E-2	2.73255E1	-3.26765E1	-3.26122E1	2.6825E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.79974E1	4.76837E-5	-8.80012E1	7.15256E-4	4.86374E-3	9.377E-2	2.73099E1	-3.26434E1	-3.26218E1	2.67854E1	1.20174E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.79974E1	-3.33786E-4	-8.80011E1	5.48363E-4	4.76837E-3	9.34839E-2	2.72787E1	-3.2647E1	-3.2653E1	2.6813E1	1.20158E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.79976E1	-4.05312E-4	-8.80013E1	6.67572E-4	4.91142E-3	9.36747E-2	2.72856E1	-3.26721E1	-3.26054E1	2.6792E1	1.19913E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.79974E1	-4.05312E-4	-8.80012E1	3.09944E-4	4.81606E-3	9.36747E-2	2.72811E1	-3.26272E1	-3.26488E1	2.68238E1	1.19927E-7	2.51297E-3	2.51297E-3	6.3175E-3	3.00806E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.79972E1	-3.09944E-4	-8.80013E1	4.52995E-4	5.05447E-3	9.37462E-2	2.73381E1	-3.26849E1	-3.26152E1	2.67746E1	1.20174E-7	2.5199E-3	2.5199E-3	6.30192E-3	2.97704E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.79976E1	-4.29153E-4	-8.80013E1	3.57628E-4	5.126E-3	9.36747E-2	2.7311E1	-3.26927E1	-3.25723E1	2.68094E1	1.20122E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.79975E1	-7.15256E-5	-8.80014E1	4.52995E-4	5.07832E-3	9.32693E-2	2.73105E1	-3.26855E1	-3.26212E1	2.67926E1	1.20158E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.12368E-2	-8.79972E1	2.38419E-5	-8.80014E1	4.52995E-4	5.03063E-3	9.36031E-2	2.72756E1	-3.26868E1	-3.26419E1	2.67908E1	1.20226E-7	2.51662E-3	2.51662E-3	6.28552E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.19325E-2	-8.79974E1	-1.90735E-4	-8.80016E1	5.00679E-4	5.07832E-3	9.35793E-2	2.73097E1	-3.26886E1	-3.26089E1	2.68053E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.79974E1	-4.05312E-4	-8.80013E1	5.00679E-4	5.17368E-3	9.37939E-2	2.72759E1	-3.26669E1	-3.2589E1	2.68165E1	1.20028E-7	2.51575E-3	2.51575E-3	6.31779E-3	2.99014E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.24736E-2	-8.79975E1	4.76837E-5	-8.80013E1	5.00679E-4	4.98295E-3	9.34839E-2	2.73171E1	-3.26899E1	-3.26004E1	2.67966E1	1.20171E-7	2.51758E-3	2.51758E-3	6.29581E-3	2.98985E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.23189E-2	-8.79976E1	-4.76837E-5	-8.80013E1	2.6226E-4	5.10216E-3	9.377E-2	2.73287E1	-3.26585E1	-3.25851E1	2.67978E1	1.19999E-7	2.51948E-3	2.51948E-3	6.30429E-3	3.00939E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.79976E1	-7.15256E-5	-8.80012E1	4.29153E-4	5.126E-3	9.35316E-2	2.71969E1	-3.25503E1	-3.25503E1	2.6925E1	1.20125E-7	2.51849E-3	2.51849E-3	6.3074E-3	3.0279E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.79975E1	-1.43051E-4	-8.80011E1	7.39098E-4	4.81606E-3	9.36031E-2	2.73145E1	-3.26236E1	-3.2652E1	2.67734E1	1.19601E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.03976E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.79976E1	-3.09944E-4	-8.80013E1	5.72205E-4	4.88758E-3	9.3627E-2	2.72598E1	-3.26603E1	-3.25783E1	2.6807E1	1.20174E-7	2.51771E-3	2.51771E-3	6.3514E-3	3.01609E-1
