[Scan]
initial_time=2016-01-28T20:33:57
final_time=2016-01-28T20:34:17
ip_count=19
run=1026
dataset=7
scan=486
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.42513E-2
qbias_imon=-3.79283E-6
ql1_vset=
ql1_vmon=-8.79987E1
ql1_imon=-1.4339E-9
ql2_vset=
ql2_vmon=-1.43051E-4
ql2_imon=1.48401E-9
ql3_vset=
ql3_vmon=-8.80011E1
ql3_imon=-4.35271E-9
ql4_vset=
ql4_vmon=3.57628E-4
ql4_imon=1.63434E-8
mult1=-9.91713E-9
mult2=-2.79318E-9
rf_tmon=-4.30385E-3
rf_agc=3.35115E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=6.11973E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=1.99359E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53724E1
cs_ef1b_imon=3.182E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04617E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04935E1
cs_ea1_imon=1.07582E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06428E0
lens1_imon=1.36817E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.97081E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03619E1
cs_ea2_imon=1.41525E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84256E1
cs_ef1a_imon=3.03171E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.23767E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.30752E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15276E1
os_ea1_imon=2.41266E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.08758E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23027E0
cs_ionrep_imon=9.62562E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=1.96134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.96059E-8
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-6.17468E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25936E1
iondef3_imon=1.49135E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26741E1
iondef2_imon=1.58691E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=8.95798E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26685E0
ionrepsh_imon=8.3762E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33557E1
lens5b_imon=2.18012E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74808E1
cs_ef2b_imon=3.13118E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49396E0
os_ea2_imon=-6.17434E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71174E1
cs_ef2a_imon=3.19822E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07198E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.25054E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11117E1
os_restr2_imon=3.40112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.30565E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.08207E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73364E1
iondef1_imon=1.10095E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67879E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.20066E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.61752E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09891E0
cs_ionaccel_imon=-9.83303E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47363E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56147E1
einzel_imon=7.70946E-6
window_vset=0.0E0
window_vmon=1.89712E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39167E-4
mask2_vset=0.0E0
mask2_vmon=-1.86674E1
mask2_imon=-5.40015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.09494E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93698E3
defgrida_imon=6.3375E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.20466E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3465E0
defgridb_imon=6.21362E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33207E1
os_fil1_imon=9.44709E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07786E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62672E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31802E1
cs_fil1_imon=7.33504E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.14903E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66391E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.57249E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.19338E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.98855E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.43772E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22172E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31269E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19991E-7
chamber_cvt_pmon=2.52025E-3
foreline_cvt_pmon=2.52025E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.00447E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.79979E1	-3.09944E-4	-8.80012E1	5.00679E-4	4.50611E-3	9.33647E-2	2.72738E1	-3.26503E1	-3.26069E1	2.68041E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.9943E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.23964E-2	-8.79982E1	-3.57628E-4	-8.80011E1	4.52995E-4	4.45843E-3	9.34839E-2	2.72939E1	-3.26585E1	-3.26516E1	2.68144E1	1.19941E-7	2.51709E-3	2.51709E-3	6.31798E-3	2.99343E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.19325E-2	-8.79982E1	-3.57628E-4	-8.8001E1	1.90735E-4	4.74453E-3	9.32217E-2	2.72993E1	-3.26596E1	-3.26277E1	2.68071E1	1.19775E-7	2.51045E-3	2.51045E-3	6.3074E-3	2.9863E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.15461E-2	-8.79983E1	-2.6226E-4	-8.80009E1	5.00679E-4	4.8399E-3	9.33409E-2	2.73508E1	-3.26891E1	-3.26032E1	2.67751E1	1.20004E-7	2.51793E-3	2.51793E-3	6.30202E-3	3.00582E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.79981E1	-4.05312E-4	-8.8001E1	6.4373E-4	4.88758E-3	9.33886E-2	2.73045E1	-3.26773E1	-3.26113E1	2.6792E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.13915E-2	-8.7998E1	-2.86102E-4	-8.80012E1	4.29153E-4	4.88758E-3	9.37223E-2	2.72967E1	-3.26759E1	-3.26278E1	2.68124E1	1.19953E-7	2.51096E-3	2.51096E-3	6.32356E-3	3.03804E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.7998E1	-7.15256E-5	-8.80011E1	4.52995E-4	4.86374E-3	9.35078E-2	2.73009E1	-3.26464E1	-3.25948E1	2.67998E1	1.2033E-7	2.52099E-3	2.52099E-3	6.31837E-3	2.97704E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.79985E1	-4.76837E-5	-8.80011E1	2.86102E-4	5.07832E-3	9.36508E-2	2.73225E1	-3.26705E1	-3.26428E1	2.6795E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.7998E1	-4.76837E-5	-8.80013E1	1.19209E-4	4.93526E-3	9.34601E-2	2.72889E1	-3.26831E1	-3.26092E1	2.67872E1	1.20383E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.79985E1	-2.14577E-4	-8.80013E1	1.66893E-4	4.8399E-3	9.36747E-2	2.72564E1	-3.26621E1	-3.26074E1	2.68364E1	1.20017E-7	2.52318E-3	2.52318E-3	6.34588E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.27828E-2	-8.79985E1	-7.15256E-5	-8.80013E1	2.86102E-4	5.26905E-3	9.34839E-2	2.73381E1	-3.26667E1	-3.26419E1	2.6807E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.79988E1	-1.90735E-4	-8.80015E1	9.53674E-5	4.76837E-3	9.34839E-2	2.72949E1	-3.26609E1	-3.26272E1	2.68052E1	1.20363E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.03286E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.79988E1	-3.57628E-4	-8.80011E1	3.33786E-4	5.05447E-3	9.33647E-2	2.73604E1	-3.26705E1	-3.26434E1	2.68082E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.02133E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.7999E1	-2.14577E-4	-8.80012E1	1.90735E-4	4.57764E-3	9.33647E-2	2.726E1	-3.26332E1	-3.26206E1	2.6813E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98481E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.79988E1	-5.24521E-4	-8.80013E1	7.15256E-5	4.60148E-3	9.36508E-2	2.73381E1	-3.26987E1	-3.26428E1	2.67704E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.98481E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.79986E1	-4.76837E-4	-8.80008E1	1.19209E-4	4.93526E-3	9.36508E-2	2.73098E1	-3.26549E1	-3.26437E1	2.68337E1	1.19861E-7	2.51443E-3	2.51443E-3	6.28552E-3	2.97963E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.7999E1	-4.76837E-5	-8.80011E1	4.05312E-4	4.88758E-3	9.37462E-2	2.73004E1	-3.26738E1	-3.26514E1	2.68208E1	1.20209E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00197E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.79988E1	-9.53674E-5	-8.80011E1	4.52995E-4	4.64916E-3	9.35078E-2	2.73363E1	-3.26711E1	-3.25966E1	2.678E1	1.2026E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.9943E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.40192E-2	-8.79986E1	-1.19209E-4	-8.80009E1	2.86102E-4	5.24521E-3	9.34124E-2	2.7297E1	-3.26451E1	-3.26138E1	2.67827E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.04241E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.42513E-2	-8.79987E1	-1.43051E-4	-8.80011E1	3.57628E-4	4.79221E-3	9.33886E-2	2.73364E1	-3.26741E1	-3.25936E1	2.67879E1	1.19991E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.01609E-1
