[Scan]
initial_time=2016-01-28T20:36:37
final_time=2016-01-28T20:36:57
ip_count=19
run=1026
dataset=7
scan=492
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.26282E-2
qbias_imon=-3.82772E-6
ql1_vset=
ql1_vmon=-8.80003E1
ql1_imon=-9.05609E-10
ql2_vset=
ql2_vmon=-5.24521E-4
ql2_imon=1.40204E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.68784E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.61064E-8
mult1=-8.7736E-9
mult2=-2.81348E-9
rf_tmon=-4.4329E-3
rf_agc=3.35654E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.41031E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64992E0
bslens_imon=2.67835E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19947E1
lens5a_imon=1.96973E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.17443E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.02197E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04922E1
cs_ea1_imon=1.08832E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0744E0
lens1_imon=1.55E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04249E1
cs_ea2_imon=1.39078E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84532E1
cs_ef1a_imon=3.04361E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.25402E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15324E1
os_ea1_imon=2.41206E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.07712E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21365E0
cs_ionrep_imon=9.61067E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93438E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=1.9671E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.96731E-8
tplens_vset=1.4E-1
tplens_vmon=1.63002E0
tplens_imon=-2.88531E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25707E1
iondef3_imon=1.51154E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26648E1
iondef2_imon=1.57932E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98512E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=8.69405E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=8.5436E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74585E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49904E0
os_ea2_imon=-6.20187E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.20795E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08099E0
os_ef2alow_imon=-2.57265E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.39175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2304E2
cs_ionfoca_imon=6.31154E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.08675E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73108E1
iondef1_imon=1.08724E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67965E1
iondef4_imon=1.08089E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.09666E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.67172E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-9.94115E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=1.99323E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39174E-4
mask2_vset=0.0E0
mask2_vmon=-1.8659E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=7.67121E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93715E3
defgrida_imon=6.56809E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.33594E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36247E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33292E1
os_fil1_imon=9.46967E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07569E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63424E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31786E1
cs_fil1_imon=6.6683E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.00741E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66629E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.54584E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08526E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.67236E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28098E-1
cs_fil2_imon=-2.64795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.65879E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22443E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32784E-3
inlet_lpb_pmon=2.99421E-1
chamber_ion_pmon=1.2021E-7
chamber_cvt_pmon=2.51041E-3
foreline_cvt_pmon=2.51041E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.42473E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.79999E1	-2.14577E-4	-8.80003E1	5.72205E-4	4.76837E-3	9.32217E-2	2.73252E1	-3.26832E1	-3.26272E1	2.68082E1	1.19757E-7	2.51007E-3	2.51007E-3	6.30192E-3	3.01609E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.79999E1	-2.86102E-4	-8.80006E1	4.05312E-4	4.81606E-3	9.35555E-2	2.73345E1	-3.26505E1	-3.26432E1	2.68194E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80001E1	-7.62939E-4	-8.80007E1	4.52995E-4	4.60148E-3	9.32455E-2	2.72697E1	-3.26531E1	-3.26596E1	2.67682E1	1.20031E-7	2.51804E-3	2.51804E-3	6.3074E-3	2.99613E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80003E1	-5.96046E-4	-8.80006E1	3.8147E-4	4.48227E-3	9.32455E-2	2.73358E1	-3.26614E1	-3.26325E1	2.6822E1	1.20042E-7	2.51709E-3	2.51709E-3	6.32858E-3	2.99594E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.79999E1	-3.8147E-4	-8.80005E1	7.15256E-5	4.45843E-3	9.33647E-2	2.73135E1	-3.26843E1	-3.26843E1	2.67781E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.79998E1	-3.57628E-4	-8.80004E1	3.8147E-4	4.48227E-3	9.34839E-2	2.72721E1	-3.26728E1	-3.26123E1	2.6825E1	1.20069E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.79997E1	-2.6226E-4	-8.80009E1	-4.76837E-5	4.69685E-3	9.33886E-2	2.72843E1	-3.26306E1	-3.26422E1	2.67972E1	1.2021E-7	2.52262E-3	2.52262E-3	6.34322E-3	3.00149E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.10051E-2	-8.8E1	-5.00679E-4	-8.80007E1	2.38419E-4	4.76837E-3	9.36985E-2	2.73145E1	-3.26791E1	-3.26472E1	2.68106E1	1.19963E-7	2.51439E-3	2.51439E-3	6.3074E-3	2.98792E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.79999E1	-3.09944E-4	-8.80006E1	1.90735E-4	4.60148E-3	9.36985E-2	2.73267E1	-3.26609E1	-3.25912E1	2.68001E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01738E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80002E1	-2.14577E-4	-8.80007E1	1.90735E-4	4.64916E-3	9.36508E-2	2.72835E1	-3.26248E1	-3.26687E1	2.68217E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.02253E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80002E1	-7.15256E-5	-8.80008E1	1.43051E-4	4.19617E-3	9.36985E-2	2.73806E1	-3.27298E1	-3.2613E1	2.68064E1	1.20017E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.11597E-2	-8.80001E1	-1.66893E-4	-8.80004E1	2.14577E-4	4.3869E-3	9.36031E-2	2.72877E1	-3.26597E1	-3.2605E1	2.6795E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.10825E-2	-8.8E1	-7.15256E-5	-8.80006E1	4.05312E-4	4.64916E-3	9.36985E-2	2.72691E1	-3.26838E1	-3.26219E1	2.67866E1	1.20158E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.8E1	-1.19209E-4	-8.80007E1	1.66893E-4	4.55379E-3	9.35793E-2	2.73405E1	-3.265E1	-3.262E1	2.67974E1	1.20122E-7	2.51662E-3	2.51662E-3	6.27461E-3	3.02133E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.8E1	-1.66893E-4	-8.80007E1	2.86102E-4	4.673E-3	9.35078E-2	2.7291E1	-3.26523E1	-3.26811E1	2.68124E1	1.20278E-7	2.51443E-3	2.51443E-3	6.28006E-3	3.04241E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80001E1	-3.33786E-4	-8.80009E1	2.6226E-4	4.43459E-3	9.34124E-2	2.73153E1	-3.26176E1	-3.26422E1	2.67926E1	1.2054E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.19325E-2	-8.80003E1	-1.66893E-4	-8.80005E1	2.14577E-4	4.43459E-3	9.39369E-2	2.72632E1	-3.26301E1	-3.26502E1	2.6792E1	1.20017E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00041E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.16233E-2	-8.80003E1	-2.14577E-4	-8.80007E1	3.09944E-4	4.33922E-3	9.36508E-2	2.7321E1	-3.26537E1	-3.26437E1	2.67914E1	1.2033E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98222E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.19325E-2	-8.80003E1	-7.15256E-5	-8.80009E1	3.09944E-4	4.50611E-3	9.37939E-2	2.73029E1	-3.26428E1	-3.26288E1	2.68043E1	1.198E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.26282E-2	-8.80003E1	-5.24521E-4	-8.80007E1	2.38419E-4	4.52995E-3	9.32455E-2	2.73108E1	-3.26648E1	-3.25707E1	2.67965E1	1.2021E-7	2.51041E-3	2.51041E-3	6.32784E-3	2.99421E-1
