[Scan]
initial_time=2016-01-28T20:37:57
final_time=2016-01-28T20:38:17
ip_count=19
run=1026
dataset=7
scan=495
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.75408E-6
ql1_vset=
ql1_vmon=-8.80002E1
ql1_imon=-8.21722E-10
ql2_vset=
ql2_vmon=-1.66893E-4
ql2_imon=1.45803E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.45966E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.60847E-8
mult1=-1.03162E-8
mult2=-2.82617E-9
rf_tmon=-4.47744E-3
rf_agc=3.30883E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.15294E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65893E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20085E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.04931E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53857E1
cs_ef1b_imon=3.18813E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0524E1
cs_ea1_imon=1.07967E-5
lens1_vset=-2.7E0
lens1_vmon=-3.072E0
lens1_imon=1.59686E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.36266E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84364E1
cs_ef1a_imon=3.04144E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.24674E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.114E1
os_restr1_imon=4.30391E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=2.4272E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.639E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2545E0
cs_ionrep_imon=9.52776E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01683E1
cs_anode1_imon=1.97179E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.95945E-8
tplens_vset=1.4E-1
tplens_vmon=1.63302E0
tplens_imon=-3.8226E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26419E1
iondef3_imon=1.50109E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26839E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98422E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=8.62968E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24729E0
ionrepsh_imon=8.45348E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.19396E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.12181E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48642E0
os_ea2_imon=-6.67051E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06098E2
lens4b_imon=2.00835E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71426E1
cs_ef2a_imon=3.19425E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08639E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22652E-1
os_ef2bup_imon=-5.28644E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11021E1
os_restr2_imon=3.39355E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23036E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01725E1
cs_anode2_imon=2.08207E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72606E1
iondef1_imon=1.09733E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68413E1
iondef4_imon=1.10143E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.1703E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.64049E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10011E0
cs_ionaccel_imon=-1.08421E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.4714E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.14339E-1
window_imon=-9.86907E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39228E-4
mask2_vset=0.0E0
mask2_vmon=-1.87029E1
mask2_imon=-6.98589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.31071E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.50681E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.20617E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33287E1
os_fil1_imon=9.44655E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07912E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6312E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31837E1
cs_fil1_imon=6.12771E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.04765E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66524E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38325E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05523E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.66591E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.53382E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31641E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22345E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00247E-1
chamber_ion_pmon=1.19979E-7
chamber_cvt_pmon=2.51679E-3
foreline_cvt_pmon=2.51679E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.08256E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80001E1	-5.48363E-4	-8.80004E1	3.33786E-4	4.86374E-3	9.37223E-2	2.73039E1	-3.26644E1	-3.25824E1	2.68012E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99686E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.19325E-2	-8.80002E1	-3.57628E-4	-8.80008E1	4.05312E-4	4.673E-3	9.36508E-2	2.72901E1	-3.26831E1	-3.26615E1	2.67882E1	1.20209E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80004E1	-4.05312E-4	-8.80008E1	1.90735E-4	4.74453E-3	9.3627E-2	2.72915E1	-3.26673E1	-3.26107E1	2.68024E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.00942E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.25507E-2	-8.80002E1	-6.4373E-4	-8.80008E1	9.53674E-5	4.76837E-3	9.35078E-2	2.73446E1	-3.26726E1	-3.26172E1	2.68256E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37874E-2	-8.80004E1	-2.86102E-4	-8.80006E1	3.57628E-4	4.98295E-3	9.377E-2	2.72991E1	-3.26573E1	-3.26561E1	2.68034E1	1.19953E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80005E1	-6.4373E-4	-8.80006E1	3.33786E-4	4.69685E-3	9.38654E-2	2.72745E1	-3.26687E1	-3.26008E1	2.67858E1	1.19933E-7	2.51755E-3	2.51755E-3	6.31555E-3	3.00249E-1
7.0E0	2.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80006E1	-6.19888E-4	-8.80007E1	1.19209E-4	4.3869E-3	9.35316E-2	2.73261E1	-3.26561E1	-3.26482E1	2.68235E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80006E1	-6.67572E-4	-8.80009E1	2.86102E-4	4.48227E-3	9.35316E-2	2.73117E1	-3.26585E1	-3.25876E1	2.68265E1	1.19872E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.00144E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80004E1	-5.00679E-4	-8.80003E1	1.90735E-4	4.673E-3	9.3627E-2	2.72845E1	-3.26773E1	-3.26408E1	2.67817E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01738E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37103E-2	-8.80001E1	-3.09944E-4	-8.80009E1	1.43051E-4	4.62532E-3	9.36985E-2	2.73237E1	-3.26939E1	-3.26332E1	2.68334E1	1.20414E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.0071E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.33239E-2	-8.79999E1	-5.00679E-4	-8.80008E1	1.43051E-4	4.41074E-3	9.36747E-2	2.72715E1	-3.27119E1	-3.26038E1	2.67908E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.25507E-2	-8.80002E1	2.38419E-5	-8.80011E1	4.29153E-4	4.76837E-3	9.36747E-2	2.73228E1	-3.26461E1	-3.26119E1	2.6831E1	1.20226E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80003E1	-2.6226E-4	-8.80007E1	2.86102E-4	4.8399E-3	9.36031E-2	2.73243E1	-3.26218E1	-3.26933E1	2.67878E1	1.19965E-7	2.51552E-3	2.51552E-3	6.34037E-3	2.98222E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80002E1	-4.29153E-4	-8.80007E1	2.38419E-4	4.81606E-3	9.35316E-2	2.72961E1	-3.26693E1	-3.26591E1	2.68352E1	1.20055E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.9892E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80002E1	-3.8147E-4	-8.80003E1	1.90735E-4	4.72069E-3	9.377E-2	2.73616E1	-3.26254E1	-3.2632E1	2.68142E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.44059E-2	-8.80006E1	-1.90735E-4	-8.80006E1	5.00679E-4	4.76837E-3	9.40084E-2	2.7308E1	-3.26555E1	-3.26437E1	2.68024E1	1.20191E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.03081E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.8E1	-7.15256E-5	-8.80005E1	6.19888E-4	4.76837E-3	9.36747E-2	2.72895E1	-3.27245E1	-3.26482E1	2.6777E1	1.19697E-7	2.52276E-3	2.52276E-3	6.33977E-3	3.00966E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80001E1	-2.38419E-4	-8.80006E1	5.00679E-4	4.72069E-3	9.36031E-2	2.73009E1	-3.2641E1	-3.26242E1	2.6831E1	1.19913E-7	2.52538E-3	2.52538E-3	6.31288E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.36328E-2	-8.80002E1	-3.09944E-4	-8.80008E1	4.05312E-4	4.98295E-3	9.33647E-2	2.73495E1	-3.26755E1	-3.26533E1	2.67949E1	1.19653E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9874E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80002E1	-1.66893E-4	-8.80006E1	4.76837E-4	4.76837E-3	9.36508E-2	2.72606E1	-3.26839E1	-3.26419E1	2.68413E1	1.19979E-7	2.51679E-3	2.51679E-3	6.3074E-3	3.00247E-1
