[Scan]
initial_time=2016-01-28T20:38:50
final_time=2016-01-28T20:39:10
ip_count=19
run=1026
dataset=7
scan=497
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.74399E-6
ql1_vset=
ql1_vmon=-8.80004E1
ql1_imon=-7.88498E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.41511E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.26361E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.61266E-8
mult1=-9.05013E-9
mult2=-2.72718E-9
rf_tmon=-4.9401E-3
rf_agc=3.31026E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.4208E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63849E0
bslens_imon=2.50786E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19801E1
lens5a_imon=1.98227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.0532E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53878E1
cs_ef1b_imon=3.18766E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04669E2
lens23_imon=1.0234E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=1.08219E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07843E0
lens1_imon=1.31862E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64582E1
os_ef1alow_imon=2.97535E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03667E1
cs_ea2_imon=1.41879E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=3.04046E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.25631E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11253E1
os_restr1_imon=4.2959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=2.40912E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63662E1
os_ef1bup_imon=3.09106E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2521E0
cs_ionrep_imon=9.63269E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93413E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01927E1
cs_anode1_imon=1.95876E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.96946E-8
tplens_vset=1.4E-1
tplens_vmon=1.65028E0
tplens_imon=-3.34281E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26254E1
iondef3_imon=1.51259E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26649E1
iondef2_imon=1.57877E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02893E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.7316E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24089E0
ionrepsh_imon=8.38682E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33416E1
lens5b_imon=2.19038E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.13211E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49278E0
os_ea2_imon=-6.63446E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71211E1
cs_ef2a_imon=3.18766E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09319E0
os_ef2alow_imon=-2.70102E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11774E-1
os_ef2bup_imon=-5.24869E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10988E1
os_restr2_imon=3.40244E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.30671E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01721E1
cs_anode2_imon=2.08685E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73128E1
iondef1_imon=1.08078E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.08441E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.10178E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.63037E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11068E0
cs_ionaccel_imon=-9.7426E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47382E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56258E1
einzel_imon=7.75153E-6
window_vset=0.0E0
window_vmon=2.01299E-1
window_imon=-9.84875E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39176E-4
mask2_vset=0.0E0
mask2_vmon=-1.86692E1
mask2_imon=-6.27493E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=8.0435E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.28441E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.26129E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48528E0
defgridb_imon=6.11098E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33298E1
os_fil1_imon=9.41695E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07795E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62899E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31838E1
cs_fil1_imon=6.75644E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.38668E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.66621E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.2939E-2
os_fil2_imon=-2.59094E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90878E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.66964E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29715E-1
cs_fil2_imon=-2.29607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.70826E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22275E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.19927E-7
chamber_cvt_pmon=2.51364E-3
foreline_cvt_pmon=2.51364E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.6603E-1
res40_imon=-2.29056E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80003E1	-5.24521E-4	-8.80004E1	5.00679E-4	4.76837E-3	9.37939E-2	2.73231E1	-3.2653E1	-3.26717E1	2.6801E1	1.198E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99686E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80002E1	-7.15256E-4	-8.80005E1	4.76837E-5	4.95911E-3	9.377E-2	2.7318E1	-3.26719E1	-3.26168E1	2.67652E1	1.20174E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80003E1	-4.76837E-4	-8.80007E1	4.29153E-4	4.60148E-3	9.35078E-2	2.72912E1	-3.26637E1	-3.26486E1	2.68244E1	1.20137E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.01742E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80002E1	-5.72205E-4	-8.80006E1	5.48363E-4	4.93526E-3	9.377E-2	2.73057E1	-3.26518E1	-3.26272E1	2.68238E1	1.20004E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80003E1	-4.05312E-4	-8.80003E1	5.72205E-4	4.81606E-3	9.35078E-2	2.72871E1	-3.26434E1	-3.26146E1	2.6777E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9943E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.80002E1	-4.29153E-4	-8.80006E1	4.52995E-4	4.79221E-3	9.35316E-2	2.73225E1	-3.26939E1	-3.25918E1	2.68454E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80002E1	-6.91414E-4	-8.80006E1	2.38419E-4	4.79221E-3	9.34362E-2	2.73039E1	-3.26449E1	-3.26508E1	2.68377E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80002E1	-4.52995E-4	-8.80006E1	2.6226E-4	4.76837E-3	9.34124E-2	2.72835E1	-3.26338E1	-3.2632E1	2.67944E1	1.20122E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01609E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80002E1	-4.05312E-4	-8.80006E1	2.14577E-4	4.64916E-3	9.35793E-2	2.73081E1	-3.26543E1	-3.26086E1	2.68166E1	1.20174E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80005E1	-2.6226E-4	-8.80004E1	2.14577E-4	4.673E-3	9.36031E-2	2.73075E1	-3.26803E1	-3.25841E1	2.6837E1	1.20414E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80003E1	-2.86102E-4	-8.80008E1	4.29153E-4	4.74453E-3	9.34839E-2	2.72715E1	-3.26639E1	-3.26218E1	2.6834E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.99E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80005E1	-4.52995E-4	-8.80005E1	5.72205E-4	4.79221E-3	9.34839E-2	2.72373E1	-3.26231E1	-3.26425E1	2.67648E1	1.19646E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.98665E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80001E1	-5.48363E-4	-8.80006E1	3.09944E-4	5.03063E-3	9.38177E-2	2.72757E1	-3.27038E1	-3.27337E1	2.68136E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80003E1	-8.10623E-4	-8.80005E1	1.66893E-4	4.72069E-3	9.36985E-2	2.73234E1	-3.26573E1	-3.26384E1	2.6828E1	1.20244E-7	2.51359E-3	2.51359E-3	6.32418E-3	3.00676E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80006E1	-9.29832E-4	-8.80001E1	3.8147E-4	4.74453E-3	9.38654E-2	2.72943E1	-3.26837E1	-3.25761E1	2.67878E1	1.20122E-7	2.52647E-3	2.52647E-3	6.32936E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80004E1	-6.67572E-4	-8.80002E1	6.19888E-4	4.76837E-3	9.3627E-2	2.72552E1	-3.26482E1	-3.26464E1	2.67968E1	1.19749E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.9892E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80006E1	-7.39098E-4	-8.80006E1	2.86102E-4	4.673E-3	9.36747E-2	2.72968E1	-3.2636E1	-3.26278E1	2.68094E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.35556E-2	-8.80008E1	-5.24521E-4	-8.80003E1	5.96046E-4	4.8399E-3	9.34601E-2	2.73189E1	-3.27017E1	-3.26164E1	2.68151E1	1.20069E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80005E1	-7.62939E-4	-8.80002E1	3.09944E-4	4.91142E-3	9.35078E-2	2.7311E1	-3.26602E1	-3.26531E1	2.67914E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80004E1	-5.00679E-4	-8.80004E1	4.76837E-5	4.52995E-3	9.36031E-2	2.73128E1	-3.26649E1	-3.26254E1	2.68034E1	1.19927E-7	2.51364E-3	2.51364E-3	6.31817E-3	2.99941E-1
