[Scan]
initial_time=2016-01-28T20:39:17
final_time=2016-01-28T20:39:36
ip_count=19
run=1026
dataset=7
scan=498
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.8002E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-7.43449E-10
ql2_vset=
ql2_vmon=-1.90735E-4
ql2_imon=1.43702E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.27379E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.61163E-8
mult1=-8.94571E-9
mult2=-3.02601E-9
rf_tmon=-4.33218E-3
rf_agc=3.34057E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.41163E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6305E0
bslens_imon=2.59126E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20162E1
lens5a_imon=2.01489E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.04943E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53708E1
cs_ef1b_imon=3.168E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02179E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=1.07331E-5
lens1_vset=-2.7E0
lens1_vmon=-3.12705E0
lens1_imon=1.50863E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64816E1
os_ef1alow_imon=2.98124E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03593E1
cs_ea2_imon=1.38854E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84397E1
cs_ef1a_imon=3.04475E-5
olens2_vset=9.7E-1
olens2_vmon=9.69768E-1
olens2_imon=1.24884E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11254E1
os_restr1_imon=4.31452E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15425E1
os_ea1_imon=2.41686E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63598E1
os_ef1bup_imon=3.0864E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22648E0
cs_ionrep_imon=9.43194E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.9326E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01838E1
cs_anode1_imon=1.96037E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.95964E-8
tplens_vset=1.4E-1
tplens_vmon=1.62834E0
tplens_imon=-2.70696E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.262E1
iondef3_imon=1.49987E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27041E1
iondef2_imon=1.60506E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98424E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.65734E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28568E0
ionrepsh_imon=8.49959E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33697E1
lens5b_imon=2.19009E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74626E1
cs_ef2b_imon=3.12259E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.50312E0
os_ea2_imon=-7.1809E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06103E2
lens4b_imon=2.00442E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71354E1
cs_ef2a_imon=3.19771E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07135E0
os_ef2alow_imon=-2.54477E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10512E-1
os_ef2bup_imon=-5.23181E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10998E1
os_restr2_imon=3.4029E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23023E2
cs_ionfoca_imon=6.32934E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01753E1
cs_anode2_imon=2.08704E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73435E1
iondef1_imon=1.08595E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67746E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.14818E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.66351E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09998E0
cs_ionaccel_imon=-8.17141E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.4725E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56377E1
einzel_imon=7.64345E-6
window_vset=0.0E0
window_vmon=1.85128E-1
window_imon=-1.05955E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39306E-4
mask2_vset=0.0E0
mask2_vmon=-1.86725E1
mask2_imon=-5.09855E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.70726E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.34458E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.41696E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.33334E0
defgridb_imon=6.24213E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33306E1
os_fil1_imon=9.47667E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07984E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.63351E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31817E1
cs_fil1_imon=7.49247E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.08012E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.664E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35677E-2
os_fil2_imon=-2.59104E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.15481E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.52283E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28977E-1
cs_fil2_imon=-2.26669E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.4274E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22327E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.26598E-1
res40_imon=-2.39795E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=276
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80001E1	-2.86102E-4	-8.80006E1	3.33786E-4	4.41074E-3	9.34362E-2	2.72727E1	-3.26771E1	-3.2647E1	2.6798E1	1.20177E-7	2.51472E-3	2.51472E-3	6.3074E-3	3.00247E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80003E1	-2.14577E-4	-8.80005E1	2.86102E-4	4.64916E-3	9.34601E-2	2.72976E1	-3.26778E1	-3.25998E1	2.67957E1	1.19872E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.00942E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.80003E1	-1.90735E-4	-8.80007E1	6.4373E-4	4.48227E-3	9.30548E-2	2.73151E1	-3.26461E1	-3.26071E1	2.68047E1	1.19978E-7	2.5225E-3	2.5225E-3	6.30182E-3	3.00144E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.40192E-2	-8.80005E1	-8.58307E-4	-8.80002E1	4.05312E-4	4.76837E-3	9.32693E-2	2.72841E1	-3.2647E1	-3.2629E1	2.68394E1	1.20106E-7	2.51096E-3	2.51096E-3	6.33436E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80006E1	-5.24521E-4	-8.80006E1	1.19209E-4	4.673E-3	9.30786E-2	2.73496E1	-3.26681E1	-3.26326E1	2.68144E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80007E1	-6.19888E-4	-8.80006E1	1.90735E-4	4.50611E-3	9.31978E-2	2.72787E1	-3.26825E1	-3.2617E1	2.68118E1	1.20017E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80005E1	-5.00679E-4	-8.80006E1	1.43051E-4	4.52995E-3	9.32693E-2	2.72751E1	-3.26669E1	-3.2638E1	2.67752E1	1.20017E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.3401E-2	-8.80005E1	-4.05312E-4	-8.80004E1	2.14577E-4	4.62532E-3	9.37939E-2	2.73393E1	-3.26567E1	-3.26206E1	2.68036E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80004E1	-5.96046E-4	-8.80005E1	3.09944E-4	4.41074E-3	9.36031E-2	2.72811E1	-3.26561E1	-3.26056E1	2.681E1	1.19757E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80007E1	-6.19888E-4	-8.80002E1	3.57628E-4	4.48227E-3	9.34839E-2	2.72871E1	-3.2644E1	-3.26164E1	2.68026E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80008E1	-3.8147E-4	-8.80006E1	5.48363E-4	4.74453E-3	9.35555E-2	2.72973E1	-3.26705E1	-3.26452E1	2.67943E1	1.19757E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80005E1	-5.24521E-4	-8.80006E1	3.09944E-4	4.74453E-3	9.33409E-2	2.72979E1	-3.26561E1	-3.26296E1	2.67577E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80007E1	-4.76837E-4	-8.80005E1	5.72205E-4	4.76837E-3	9.35793E-2	2.73222E1	-3.26638E1	-3.26248E1	2.68124E1	1.20017E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80003E1	-6.4373E-4	-8.80005E1	3.57628E-4	4.50611E-3	9.40084E-2	2.73458E1	-3.26697E1	-3.26413E1	2.68418E1	1.19902E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.43285E-2	-8.80005E1	-5.72205E-4	-8.80005E1	3.57628E-4	4.41074E-3	9.38177E-2	2.72949E1	-3.26771E1	-3.26254E1	2.67547E1	1.20106E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80008E1	-7.15256E-4	-8.80005E1	5.96046E-4	4.45843E-3	9.38177E-2	2.72632E1	-3.26531E1	-3.26172E1	2.68105E1	1.20017E-7	2.52428E-3	2.52428E-3	6.28552E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80006E1	-1.90735E-4	-8.80005E1	2.86102E-4	4.72069E-3	9.39131E-2	2.73228E1	-3.2659E1	-3.26455E1	2.66989E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.9943E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80006E1	-2.86102E-4	-8.80006E1	4.05312E-4	4.41074E-3	9.40084E-2	2.73293E1	-3.26909E1	-3.26502E1	2.68088E1	1.20004E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.03027E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80006E1	-2.6226E-4	-8.80006E1	3.09944E-4	4.3869E-3	9.34362E-2	2.73261E1	-3.26795E1	-3.25809E1	2.67872E1	1.20088E-7	2.51538E-3	2.51538E-3	6.31283E-3	2.99991E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80006E1	-1.90735E-4	-8.80005E1	4.76837E-4	4.64916E-3	9.36985E-2	2.73435E1	-3.27041E1	-3.262E1	2.67746E1					
