[Scan]
initial_time=2016-01-28T20:40:10
final_time=2016-01-28T20:40:30
ip_count=19
run=1026
dataset=7
scan=500
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.8461E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-7.15601E-10
ql2_vset=
ql2_vmon=-8.58307E-4
ql2_imon=1.40017E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.18502E-9
ql4_vset=
ql4_vmon=4.52995E-4
ql4_imon=1.61582E-8
mult1=-8.89755E-9
mult2=-2.14972E-9
rf_tmon=-6.84964E-3
rf_agc=3.03775E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.60148E-3
ql5_imon=5.67544E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63849E0
bslens_imon=2.69191E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19706E1
lens5a_imon=1.99784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.04944E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53482E1
cs_ef1b_imon=3.1754E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02057E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05171E1
cs_ea1_imon=1.09741E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07902E0
lens1_imon=1.58408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64579E1
os_ef1alow_imon=2.98252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03867E1
cs_ea2_imon=1.40499E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84325E1
cs_ef1a_imon=3.04021E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.2167E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11483E1
os_restr1_imon=4.30624E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14893E1
os_ea1_imon=2.43212E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63531E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22673E0
cs_ionrep_imon=9.59376E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91877E2
cs_nozzle_imon=1.93208E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01804E1
cs_anode1_imon=1.97539E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.93671E-8
tplens_vset=1.4E-1
tplens_vmon=1.62433E0
tplens_imon=-3.87372E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26705E1
iondef3_imon=1.49701E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.25984E1
iondef2_imon=1.58585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02883E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=8.76737E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24738E0
ionrepsh_imon=8.62042E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33829E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74548E1
cs_ef2b_imon=3.12952E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49514E0
os_ea2_imon=-5.89119E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06118E2
lens4b_imon=2.00573E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71107E1
cs_ef2a_imon=3.2025E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07657E0
os_ef2alow_imon=-2.44947E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07657E-1
os_ef2bup_imon=-5.29223E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10944E1
os_restr2_imon=3.38739E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.30671E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01914E1
cs_anode2_imon=2.09112E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.10555E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6828E1
iondef4_imon=1.08156E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.06561E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.48636E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10697E0
cs_ionaccel_imon=-9.48164E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02083E2
cs_ionfocb_imon=1.47379E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56226E1
einzel_imon=7.64961E-6
window_vset=0.0E0
window_vmon=2.32166E-1
window_imon=-9.34263E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-6.1454E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.67186E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93749E3
defgrida_imon=6.34458E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5014E3
multb_neg_imon=7.13033E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30516E0
defgridb_imon=6.12514E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.44685E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07526E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61988E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31828E1
cs_fil1_imon=8.35316E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.38415E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65346E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52184E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.20196E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.41377E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29902E-1
cs_fil2_imon=-2.54176E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11305E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22179E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52599E-3
foreline_cvt_pmon=2.52599E-3
chamber_tmon=1.4002E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.30449E-1
res40_imon=-2.41472E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=180
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.36328E-2	-8.80006E1	-5.72205E-4	-8.80008E1	3.57628E-4	4.79221E-3	9.37939E-2	2.73429E1	-3.26458E1	-3.26476E1	2.6801E1	1.20158E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.02253E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.33239E-2	-8.80005E1	-7.15256E-4	-8.80007E1	5.48363E-4	4.88758E-3	9.36985E-2	2.73015E1	-3.26963E1	-3.25497E1	2.68058E1	1.20383E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80007E1	-3.8147E-4	-8.80006E1	4.76837E-4	4.8399E-3	9.34601E-2	2.72645E1	-3.26822E1	-3.26306E1	2.6803E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.43285E-2	-8.80005E1	-5.24521E-4	-8.80006E1	1.90735E-4	4.93526E-3	9.37939E-2	2.73034E1	-3.26529E1	-3.26509E1	2.68203E1	1.19941E-7	2.51919E-3	2.51919E-3	6.30212E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80006E1	-6.19888E-4	-8.80007E1	1.19209E-4	4.60148E-3	9.37223E-2	2.73119E1	-3.26615E1	-3.26313E1	2.67711E1	1.19966E-7	2.51702E-3	2.51702E-3	6.32254E-3	2.99294E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.37103E-2	-8.80007E1	-3.57628E-4	-8.80007E1	6.4373E-4	4.33922E-3	9.39369E-2	2.73098E1	-3.26921E1	-3.25664E1	2.68551E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80004E1	-4.76837E-4	-8.80006E1	5.00679E-4	4.50611E-3	9.37462E-2	2.7276E1	-3.26372E1	-3.26573E1	2.68201E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.42513E-2	-8.80006E1	-3.33786E-4	-8.80004E1	5.24521E-4	4.62532E-3	9.38416E-2	2.72895E1	-3.26897E1	-3.2602E1	2.6777E1	1.19757E-7	2.52187E-3	2.52187E-3	6.32716E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.40967E-2	-8.80007E1	-5.72205E-4	-8.80007E1	1.66893E-4	4.45843E-3	9.38892E-2	2.73141E1	-3.26843E1	-3.26212E1	2.681E1	1.19965E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.33239E-2	-8.80007E1	-3.8147E-4	-8.80005E1	4.52995E-4	4.31538E-3	9.39608E-2	2.73157E1	-3.26467E1	-3.26378E1	2.6828E1	1.19653E-7	2.51334E-3	2.51334E-3	6.34037E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80008E1	-4.29153E-4	-8.80007E1	2.6226E-4	4.57764E-3	9.38177E-2	2.73273E1	-3.26554E1	-3.26518E1	2.67788E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80004E1	-4.29153E-4	-8.80006E1	3.09944E-4	4.48227E-3	9.35555E-2	2.72874E1	-3.26862E1	-3.26331E1	2.68226E1	1.20174E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80005E1	-7.15256E-5	-8.80005E1	7.15256E-5	4.72069E-3	9.37223E-2	2.73045E1	-3.26326E1	-3.26266E1	2.68053E1	1.20209E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.99941E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-7.33239E-2	-8.80006E1	-1.43051E-4	-8.80007E1	1.43051E-4	4.74453E-3	9.38416E-2	2.7275E1	-3.26437E1	-3.26921E1	2.6801E1	1.20487E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.36328E-2	-8.80005E1	-4.76837E-4	-8.80004E1	2.86102E-4	4.31538E-3	9.35078E-2	2.73586E1	-3.26452E1	-3.25791E1	2.6831E1	1.19749E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.27053E-2	-8.80004E1	-5.48363E-4	-8.80006E1	5.96046E-4	4.48227E-3	9.34124E-2	2.73175E1	-3.26697E1	-3.26708E1	2.68052E1	1.19809E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.02396E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.44059E-2	-8.80004E1	-6.19888E-4	-8.80007E1	4.29153E-4	4.57764E-3	9.34601E-2	2.72696E1	-3.26458E1	-3.26026E1	2.67842E1	1.19902E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.01995E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.36328E-2	-8.80005E1	-5.24521E-4	-8.80005E1	5.48363E-4	4.43459E-3	9.3627E-2	2.73429E1	-3.26687E1	-3.25996E1	2.67792E1	1.20174E-7	2.51826E-3	2.51826E-3	6.31563E-3	2.9913E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80007E1	-4.76837E-4	-8.80009E1	4.05312E-4	4.33922E-3	9.34362E-2	2.72962E1	-3.26968E1	-3.26272E1	2.68046E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.80008E1	-8.58307E-4	-8.80007E1	4.52995E-4	4.60148E-3	9.37223E-2	2.73063E1	-3.25984E1	-3.26705E1	2.6828E1	1.20004E-7	2.52599E-3	2.52599E-3	6.31817E-3	2.98665E-1
