[Scan]
initial_time=2016-01-28T20:40:37
final_time=2016-01-28T20:40:57
ip_count=19
run=1026
dataset=7
scan=501
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.79546E-6
ql1_vset=
ql1_vmon=-8.80002E1
ql1_imon=-7.25901E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.42986E-9
ql3_vset=
ql3_vmon=-8.80002E1
ql3_imon=-2.04638E-9
ql4_vset=
ql4_vmon=5.00679E-4
ql4_imon=1.60918E-8
mult1=-1.09204E-8
mult2=-3.03E-9
rf_tmon=-3.10649E-3
rf_agc=3.47756E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=5.23949E-10
bslens_vset=-6.2E0
bslens_vmon=-6.68627E0
bslens_imon=2.68483E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19636E1
lens5a_imon=1.96811E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05167E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53442E1
cs_ef1b_imon=3.17767E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.01958E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04758E1
cs_ea1_imon=1.09883E-5
lens1_vset=-2.7E0
lens1_vmon=-3.092E0
lens1_imon=1.56638E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.98522E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.39189E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84238E1
cs_ef1a_imon=3.03784E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.21839E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.30427E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1537E1
os_ea1_imon=2.43885E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.06992E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22319E0
cs_ionrep_imon=9.34954E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93452E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02163E1
cs_anode1_imon=1.97611E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.92449E-8
tplens_vset=1.4E-1
tplens_vmon=1.64556E0
tplens_imon=-2.03323E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26464E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.58585E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02945E2
lens6_imon=2.98374E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=8.41165E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24738E0
ionrepsh_imon=8.64874E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33894E1
lens5b_imon=2.18083E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74561E1
cs_ef2b_imon=3.11605E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47744E0
os_ea2_imon=-7.34234E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06069E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70987E1
cs_ef2a_imon=3.21552E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08639E0
os_ef2alow_imon=-2.66635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.2085E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.39644E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.28512E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01467E1
cs_anode2_imon=2.08567E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72757E1
iondef1_imon=1.09494E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6795E1
iondef4_imon=1.10179E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.0674E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.50626E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-8.89599E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02102E2
cs_ionfocb_imon=1.4736E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56129E1
einzel_imon=7.54729E-6
window_vset=0.0E0
window_vmon=1.85508E-1
window_imon=-8.24728E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.3912E-4
mask2_vset=0.0E0
mask2_vmon=-1.86716E1
mask2_imon=-4.85955E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=7.20466E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.60296E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50146E3
multb_neg_imon=7.13741E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31402E0
defgridb_imon=6.26672E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33263E1
os_fil1_imon=9.44823E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07557E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62048E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31828E1
cs_fil1_imon=7.96573E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.25115E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.65623E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.58515E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18737E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.32898E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.40768E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.63806E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22159E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=2.98481E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.52318E-3
foreline_cvt_pmon=2.52318E-3
chamber_tmon=1.40054E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.96533E-1
res40_imon=-2.29154E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80008E1	-5.00679E-4	-8.80004E1	1.66893E-4	4.88758E-3	9.39846E-2	2.73352E1	-3.26797E1	-3.2629E1	2.68267E1	1.2026E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.02769E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80001E1	-5.48363E-4	-8.80005E1	-2.38419E-5	4.76837E-3	9.35078E-2	2.73155E1	-3.26805E1	-3.26438E1	2.67895E1	1.198E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80002E1	-4.05312E-4	-8.80005E1	2.14577E-4	4.62532E-3	9.35793E-2	2.7301E1	-3.26703E1	-3.26024E1	2.68169E1	1.19872E-7	2.5225E-3	2.5225E-3	6.3074E-3	2.99613E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80006E1	-6.4373E-4	-8.80002E1	3.57628E-4	4.95911E-3	9.377E-2	2.72847E1	-3.26404E1	-3.26218E1	2.67758E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.37103E-2	-8.80003E1	-6.19888E-4	-8.80006E1	3.33786E-4	4.91142E-3	9.36031E-2	2.72763E1	-3.26687E1	-3.26597E1	2.68112E1	1.19757E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.35556E-2	-8.80005E1	-5.72205E-4	-8.80005E1	3.57628E-4	4.673E-3	9.37462E-2	2.73104E1	-3.26644E1	-3.2649E1	2.67876E1	1.19749E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.02253E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80002E1	-3.33786E-4	-8.80005E1	1.43051E-4	5.07832E-3	9.36508E-2	2.72937E1	-3.26837E1	-3.2635E1	2.67837E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37103E-2	-8.80001E1	-5.24521E-4	-8.80004E1	1.90735E-4	4.76837E-3	9.37223E-2	2.73261E1	-3.2638E1	-3.26056E1	2.68046E1	1.20174E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.80002E1	-5.00679E-4	-8.80006E1	4.76837E-4	4.98295E-3	9.38892E-2	2.73222E1	-3.26829E1	-3.25936E1	2.68132E1	1.19913E-7	2.52428E-3	2.52428E-3	6.34037E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80004E1	-7.15256E-4	-8.80004E1	9.53674E-5	4.93526E-3	9.36031E-2	2.72828E1	-3.26209E1	-3.25923E1	2.68017E1	1.20028E-7	2.52717E-3	2.52717E-3	6.3282E-3	2.99014E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80001E1	-5.96046E-4	-8.80007E1	0.0E0	4.88758E-3	9.35793E-2	2.73093E1	-3.26627E1	-3.2644E1	2.67926E1	1.1995E-7	2.5118E-3	2.5118E-3	6.32483E-3	3.00639E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80003E1	-7.86781E-4	-8.80005E1	2.38419E-5	5.03063E-3	9.3627E-2	2.72955E1	-3.26675E1	-3.26639E1	2.67872E1	1.20122E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.44831E-2	-8.80006E1	-8.82149E-4	-8.80005E1	7.15256E-5	4.72069E-3	9.36985E-2	2.72738E1	-3.26851E1	-3.25849E1	2.68026E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.37874E-2	-8.80006E1	-7.62939E-4	-8.80005E1	2.86102E-4	4.64916E-3	9.35793E-2	2.73039E1	-3.26579E1	-3.2638E1	2.681E1	1.20394E-7	2.51919E-3	2.51919E-3	6.2863E-3	2.99343E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80005E1	-1.0252E-3	-8.80005E1	3.33786E-4	4.86374E-3	9.3627E-2	2.7275E1	-3.26762E1	-3.25947E1	2.68004E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80005E1	-9.05991E-4	-8.80004E1	6.19888E-4	5.14984E-3	9.39369E-2	2.73189E1	-3.26651E1	-3.26338E1	2.67644E1	1.19851E-7	2.51525E-3	2.51525E-3	6.29665E-3	3.00197E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80003E1	-7.15256E-4	-8.80007E1	3.8147E-4	4.86374E-3	9.39131E-2	2.72951E1	-3.26602E1	-3.26331E1	2.68046E1	1.20226E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80001E1	-8.58307E-4	-8.80006E1	7.15256E-5	4.69685E-3	9.38416E-2	2.72786E1	-3.26567E1	-3.26077E1	2.68065E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.02769E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80003E1	-9.29832E-4	-8.80003E1	2.6226E-4	5.03063E-3	9.32932E-2	2.73153E1	-3.26164E1	-3.26591E1	2.67662E1	1.19749E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.02511E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80002E1	-9.05991E-4	-8.80002E1	5.00679E-4	4.95911E-3	9.36747E-2	2.72757E1	-3.26723E1	-3.26464E1	2.6795E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31288E-3	2.98481E-1
