[Scan]
initial_time=2016-01-28T20:41:57
final_time=2016-01-28T20:42:16
ip_count=19
run=1026
dataset=7
scan=504
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.74802E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-6.91462E-10
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.4459E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-2.01076E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.61382E-8
mult1=-1.00752E-8
mult2=-2.80828E-9
rf_tmon=-4.33772E-3
rf_agc=3.38346E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.30946E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6438E0
bslens_imon=2.38398E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2006E1
lens5a_imon=1.99111E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1247E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=3.1784E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04675E1
cs_ea1_imon=1.08963E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08964E0
lens1_imon=1.49913E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.98126E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03808E1
cs_ea2_imon=1.40039E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=3.04901E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.20207E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15364E1
os_ea1_imon=2.43177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08037E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26626E0
cs_ionrep_imon=9.19381E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91917E2
cs_nozzle_imon=1.9324E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=1.96458E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.92091E-8
tplens_vset=1.4E-1
tplens_vmon=1.6202E0
tplens_imon=-1.92705E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26934E1
iondef3_imon=1.50692E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.57169E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98491E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.70609E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27333E0
ionrepsh_imon=8.5107E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3351E1
lens5b_imon=2.18047E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74381E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46269E0
os_ea2_imon=-5.36028E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00718E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.20254E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07558E0
os_ef2alow_imon=-2.56905E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10937E1
os_restr2_imon=3.37842E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.30211E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.09144E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73057E1
iondef1_imon=1.08963E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67978E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.01341E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.41405E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-9.36451E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.6554E-6
window_vset=0.0E0
window_vmon=2.17943E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.86608E1
mask2_imon=-5.94074E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.57984E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.67021E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.06308E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4971E0
defgridb_imon=6.22778E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3329E1
os_fil1_imon=9.39651E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07936E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61354E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31796E1
cs_fil1_imon=7.45517E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.0032E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64717E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48385E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04321E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.77572E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.27554E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.55668E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22055E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30388E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20058E-7
chamber_cvt_pmon=2.51779E-3
foreline_cvt_pmon=2.51779E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.86922E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.18554E-2	-8.80011E1	-6.4373E-4	-8.80006E1	1.90735E-4	4.93526E-3	9.34601E-2	2.73279E1	-3.26248E1	-3.25954E1	2.67972E1	1.20017E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.02396E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.14689E-2	-8.80007E1	-8.10623E-4	-8.80007E1	9.53674E-5	5.03063E-3	9.3627E-2	2.73039E1	-3.26585E1	-3.26182E1	2.68138E1	1.20209E-7	2.52599E-3	2.52599E-3	6.31817E-3	3.02511E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80008E1	-4.76837E-4	-8.80006E1	1.19209E-4	4.8399E-3	9.38654E-2	2.73098E1	-3.26838E1	-3.2613E1	2.67908E1	1.20297E-7	2.52027E-3	2.52027E-3	6.29624E-3	3.00942E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.18554E-2	-8.80007E1	-4.05312E-4	-8.80006E1	1.19209E-4	4.62532E-3	9.38177E-2	2.72901E1	-3.26645E1	-3.2626E1	2.67686E1	1.20158E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.00453E-1
5.0E0	2.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.80005E1	-3.09944E-4	-8.80002E1	2.6226E-4	4.43459E-3	9.37223E-2	2.72871E1	-3.26422E1	-3.26032E1	2.68034E1	1.198E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.02769E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80004E1	-5.48363E-4	-8.80005E1	7.15256E-5	4.48227E-3	9.37462E-2	2.72644E1	-3.26661E1	-3.2636E1	2.68382E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80007E1	-5.72205E-4	-8.80001E1	0.0E0	4.45843E-3	9.38416E-2	2.73302E1	-3.26572E1	-3.26187E1	2.67746E1	1.19913E-7	2.52428E-3	2.52428E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.24736E-2	-8.80006E1	-4.76837E-4	-8.80003E1	2.14577E-4	4.88758E-3	9.39846E-2	2.72207E1	-3.26832E1	-3.26561E1	2.68448E1	1.20122E-7	2.51552E-3	2.51552E-3	6.34588E-3	2.9926E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80007E1	-2.6226E-4	-8.80001E1	0.0E0	4.60148E-3	9.35078E-2	2.73478E1	-3.26843E1	-3.25713E1	2.67764E1	1.20226E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80007E1	-5.00679E-4	-8.80002E1	3.33786E-4	4.64916E-3	9.377E-2	2.72485E1	-3.25729E1	-3.26791E1	2.68082E1	1.19861E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80008E1	-5.24521E-4	-8.80004E1	1.66893E-4	4.72069E-3	9.34362E-2	2.73192E1	-3.26664E1	-3.2648E1	2.68107E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80008E1	-4.76837E-4	-8.80005E1	2.6226E-4	4.52995E-3	9.34601E-2	2.73267E1	-3.26627E1	-3.2593E1	2.68134E1	1.19819E-7	2.51248E-3	2.51248E-3	6.31299E-3	3.0041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80006E1	-3.8147E-4	-8.80007E1	4.05312E-4	4.8399E-3	9.3627E-2	2.72567E1	-3.26543E1	-3.26136E1	2.67992E1	1.19902E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.01995E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80009E1	-2.86102E-4	-8.80004E1	2.38419E-4	4.72069E-3	9.37223E-2	2.72831E1	-3.26536E1	-3.26866E1	2.68052E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80008E1	-2.6226E-4	-8.80006E1	1.19209E-4	4.62532E-3	9.36747E-2	2.72955E1	-3.26404E1	-3.26242E1	2.68106E1	1.19925E-7	2.51693E-3	2.51693E-3	6.31858E-3	3.01209E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.26282E-2	-8.80005E1	-3.33786E-4	-8.80004E1	9.53674E-5	4.91142E-3	9.36508E-2	2.73225E1	-3.26633E1	-3.26573E1	2.6804E1	1.198E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99686E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80005E1	-1.90735E-4	-8.80004E1	3.33786E-4	4.8399E-3	9.39131E-2	2.72496E1	-3.26885E1	-3.26272E1	2.68094E1	1.20174E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80008E1	-7.39098E-4	-8.80006E1	7.15256E-5	4.79221E-3	9.36747E-2	2.73584E1	-3.26542E1	-3.26027E1	2.68118E1	1.20069E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80008E1	-4.29153E-4	-8.8001E1	0.0E0	4.45843E-3	9.38416E-2	2.72989E1	-3.26739E1	-3.26341E1	2.67889E1	1.2033E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80008E1	-4.29153E-4	-8.80006E1	4.76837E-5	4.74453E-3	9.36031E-2	2.73057E1	-3.26609E1	-3.26934E1	2.67978E1	1.20058E-7	2.51779E-3	2.51779E-3	6.30388E-3	3.01609E-1
