[Scan]
initial_time=2016-01-28T20:43:17
final_time=2016-01-28T20:43:36
ip_count=19
run=1026
dataset=7
scan=507
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.75938E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.6905E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.39015E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.02138E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.62063E-8
mult1=-1.04838E-8
mult2=-2.78983E-9
rf_tmon=-3.14661E-3
rf_agc=3.44211E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.36306E-3
ql5_imon=5.63502E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65383E0
bslens_imon=2.6282E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20255E1
lens5a_imon=1.98403E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.05228E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53689E1
cs_ef1b_imon=3.18094E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02245E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=1.08538E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07548E0
lens1_imon=1.37525E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64582E1
os_ef1alow_imon=2.97854E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04026E1
cs_ea2_imon=1.40251E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84462E1
cs_ef1a_imon=3.03692E-5
olens2_vset=9.7E-1
olens2_vmon=9.69696E-1
olens2_imon=1.19388E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1097E1
os_restr1_imon=4.30722E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15093E1
os_ea1_imon=2.4431E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.08965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26331E0
cs_ionrep_imon=9.40263E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93463E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01644E1
cs_anode1_imon=1.97115E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.92432E-8
tplens_vset=1.4E-1
tplens_vmon=1.63081E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26611E1
iondef3_imon=1.49737E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26485E1
iondef2_imon=1.56992E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02919E2
lens6_imon=2.98378E-4
ql6_vset=1.0E-1
ql6_vmon=9.40084E-2
ql6_imon=8.68797E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27392E0
ionrepsh_imon=8.60981E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33799E1
lens5b_imon=2.19428E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74649E1
cs_ef2b_imon=3.1176E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45148E0
os_ea2_imon=-6.56367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00492E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71116E1
cs_ef2a_imon=3.20146E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08139E0
os_ef2alow_imon=-2.59133E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92313E-1
os_ef2bup_imon=-5.16731E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10941E1
os_restr2_imon=3.38971E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23082E2
cs_ionfoca_imon=6.30707E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01573E1
cs_anode2_imon=2.09747E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73517E1
iondef1_imon=1.09494E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67496E1
iondef4_imon=1.08972E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.95821E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.36519E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12778E0
cs_ionaccel_imon=-8.25645E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47325E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56152E1
einzel_imon=7.61707E-6
window_vset=0.0E0
window_vmon=2.06017E-1
window_imon=-9.38876E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82617E2
mask1_imon=2.3918E-4
mask2_vset=0.0E0
mask2_vmon=-1.86751E1
mask2_imon=-6.16878E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.49135E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.61004E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.21528E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56501E0
defgridb_imon=6.31981E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.4196E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07943E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61436E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31786E1
cs_fil1_imon=7.35797E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.18027E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6442E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.88906E-2
os_fil2_imon=-2.61453E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05621E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.63524E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30224E-1
cs_fil2_imon=-2.47299E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.83801E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2204E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.76646E-1
res40_imon=-2.40379E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80005E1	-5.96046E-4	-8.8E1	4.76837E-4	4.62532E-3	9.36985E-2	2.73517E1	-3.2675E1	-3.26626E1	2.68206E1	1.20466E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.02511E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80005E1	-4.76837E-4	-8.80002E1	3.57628E-4	5.22137E-3	9.39131E-2	2.72861E1	-3.26591E1	-3.26095E1	2.67926E1	1.2033E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.16233E-2	-8.80003E1	-3.33786E-4	-8.8E1	4.76837E-5	5.00679E-3	9.377E-2	2.72874E1	-3.2662E1	-3.26219E1	2.6801E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.14689E-2	-8.80006E1	-4.29153E-4	-8.8E1	6.4373E-4	4.81606E-3	9.33409E-2	2.72943E1	-3.26633E1	-3.26314E1	2.68052E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0148E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.12368E-2	-8.80008E1	-7.15256E-4	-8.80001E1	2.86102E-4	4.55379E-3	9.35078E-2	2.73021E1	-3.26434E1	-3.26158E1	2.67686E1	1.20069E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17007E-2	-8.80007E1	-5.96046E-4	-8.8E1	2.14577E-4	4.76837E-3	9.32932E-2	2.72986E1	-3.26549E1	-3.26384E1	2.6831E1	1.2033E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80008E1	-5.96046E-4	-8.80003E1	5.00679E-4	4.79221E-3	9.32217E-2	2.73234E1	-3.26567E1	-3.26319E1	2.68041E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.15461E-2	-8.80007E1	-3.33786E-4	-8.80002E1	5.72205E-4	4.74453E-3	9.35793E-2	2.72504E1	-3.26747E1	-3.2623E1	2.68076E1	1.1974E-7	2.52025E-3	2.52025E-3	6.31269E-3	3.00348E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80005E1	-4.52995E-4	-8.80003E1	3.09944E-4	4.76837E-3	9.34839E-2	2.72793E1	-3.26873E1	-3.26098E1	2.6795E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80009E1	-4.76837E-4	-8.8E1	1.90735E-4	4.50611E-3	9.35078E-2	2.72666E1	-3.26554E1	-3.26134E1	2.67926E1	1.20226E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.12368E-2	-8.80009E1	-5.48363E-4	-8.79998E1	3.09944E-4	4.50611E-3	9.36508E-2	2.7301E1	-3.26797E1	-3.26006E1	2.68214E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00824E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.15461E-2	-8.80005E1	-3.33786E-4	-8.80003E1	4.29153E-4	4.69685E-3	9.35555E-2	2.73291E1	-3.26657E1	-3.2644E1	2.68206E1	1.19809E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80006E1	-5.96046E-4	-8.80003E1	6.4373E-4	4.72069E-3	9.38892E-2	2.72781E1	-3.26813E1	-3.26302E1	2.67992E1	1.20017E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.16233E-2	-8.80007E1	-5.00679E-4	-8.80006E1	1.43051E-4	4.64916E-3	9.35078E-2	2.72781E1	-3.26494E1	-3.2644E1	2.68288E1	1.19749E-7	2.52061E-3	2.52061E-3	6.33977E-3	3.00453E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80007E1	-1.90735E-4	-8.80003E1	1.90735E-4	4.673E-3	9.36031E-2	2.73279E1	-3.26362E1	-3.26278E1	2.6797E1	1.20174E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.01347E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80008E1	-7.15256E-5	-8.80001E1	2.38419E-4	4.52995E-3	9.39369E-2	2.73039E1	-3.26837E1	-3.26128E1	2.67984E1	1.20297E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.00942E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.15461E-2	-8.80009E1	-2.86102E-4	-8.80002E1	2.14577E-4	4.60148E-3	9.38416E-2	2.72799E1	-3.26687E1	-3.26212E1	2.6807E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80008E1	-1.90735E-4	-8.80001E1	2.38419E-5	4.12464E-3	9.36508E-2	2.72874E1	-3.26685E1	-3.26054E1	2.67589E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80006E1	0.0E0	-8.80004E1	-1.43051E-4	4.14848E-3	9.36985E-2	2.73169E1	-3.26579E1	-3.26779E1	2.68186E1	1.20106E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.01866E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80009E1	-3.57628E-4	-8.80005E1	1.19209E-4	4.36306E-3	9.40084E-2	2.73517E1	-3.26485E1	-3.26611E1	2.67496E1					
