[Scan]
initial_time=2016-01-28T20:43:44
final_time=2016-01-28T20:44:03
ip_count=19
run=1026
dataset=7
scan=508
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.201E-2
qbias_imon=-3.81469E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-6.6421E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.42978E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.93691E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.61937E-8
mult1=-1.05832E-8
mult2=-2.82041E-9
rf_tmon=-4.02576E-3
rf_agc=3.25465E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.55379E-3
ql5_imon=5.39529E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66133E0
bslens_imon=2.5738E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.97622E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05089E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53712E1
cs_ef1b_imon=3.17731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0456E2
lens23_imon=1.02431E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04778E1
cs_ea1_imon=1.0894E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08402E0
lens1_imon=1.58244E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.97441E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03666E1
cs_ea2_imon=1.40267E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=3.0346E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.1896E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1134E1
os_restr1_imon=4.30608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15155E1
os_ea1_imon=2.44306E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19622E0
cs_ionrep_imon=9.51334E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93352E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01773E1
cs_anode1_imon=1.95917E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.92014E-8
tplens_vset=1.4E-1
tplens_vmon=1.62701E0
tplens_imon=-2.59691E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26104E1
iondef3_imon=1.49676E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27029E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98566E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.78751E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=8.50395E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3358E1
lens5b_imon=2.18315E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74862E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.469E0
os_ea2_imon=-7.6799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71005E1
cs_ef2a_imon=3.1993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.10038E-1
os_ef2bup_imon=-5.27202E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.38058E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2306E2
cs_ionfoca_imon=6.28342E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01767E1
cs_anode2_imon=2.09072E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67988E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.98067E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.39306E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12413E0
cs_ionaccel_imon=-9.11223E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02085E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56015E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=2.34762E-1
window_imon=-9.94115E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82643E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86752E1
mask2_imon=-4.21084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92638E3
multa_neg_imon=7.35757E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.46715E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50135E3
multb_neg_imon=7.1593E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60307E0
defgridb_imon=6.22201E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33243E1
os_fil1_imon=9.41411E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61312E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31841E1
cs_fil1_imon=7.69543E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01341E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64797E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.43772E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.09727E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.80794E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31335E-1
cs_fil2_imon=-2.5158E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50262E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22093E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.55087E-1
res40_imon=-2.41047E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.8001E1	-6.91414E-4	-8.80002E1	4.05312E-4	4.33922E-3	9.41038E-2	2.73482E1	-3.26714E1	-3.26408E1	2.67595E1	1.19965E-7	2.5188E-3	2.5188E-3	6.34588E-3	2.98222E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.201E-2	-8.80012E1	-6.67572E-4	-8.80002E1	2.14577E-4	4.64916E-3	9.37223E-2	2.73112E1	-3.26542E1	-3.2585E1	2.68202E1	1.20043E-7	2.51935E-3	2.51935E-3	6.33486E-3	2.9913E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.25507E-2	-8.80007E1	-4.29153E-4	-8.80003E1	2.14577E-4	4.48227E-3	9.35555E-2	2.73027E1	-3.26567E1	-3.26413E1	2.68274E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80007E1	-3.33786E-4	-8.8E1	1.90735E-4	4.60148E-3	9.35078E-2	2.73103E1	-3.26573E1	-3.26474E1	2.67341E1	1.20517E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80005E1	-6.91414E-4	-8.80003E1	-1.19209E-4	4.52995E-3	9.36985E-2	2.7359E1	-3.26762E1	-3.2607E1	2.68394E1	1.19941E-7	2.51498E-3	2.51498E-3	6.29157E-3	3.00097E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80007E1	-5.72205E-4	-8.80005E1	9.53674E-5	4.95911E-3	9.35078E-2	2.72877E1	-3.26488E1	-3.2644E1	2.68094E1	1.19883E-7	2.51384E-3	2.51384E-3	6.30171E-3	2.9971E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.19325E-2	-8.80008E1	-8.34465E-4	-8.80007E1	1.43051E-4	4.29153E-3	9.41515E-2	2.72871E1	-3.26488E1	-3.26332E1	2.68117E1	1.20122E-7	2.52647E-3	2.52647E-3	6.30192E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.06187E-2	-8.8001E1	-8.34465E-4	-8.80006E1	2.86102E-4	4.88758E-3	9.38416E-2	2.72653E1	-3.26516E1	-3.25856E1	2.68192E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.17007E-2	-8.8001E1	-7.15256E-4	-8.80007E1	2.86102E-4	4.8399E-3	9.38416E-2	2.72654E1	-3.26506E1	-3.26314E1	2.67764E1	1.20078E-7	2.51472E-3	2.51472E-3	6.3126E-3	3.00494E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.16233E-2	-8.80009E1	-6.91414E-4	-8.80006E1	2.86102E-4	4.86374E-3	9.36747E-2	2.72949E1	-3.26759E1	-3.2587E1	2.68196E1	1.20084E-7	2.51581E-3	2.51581E-3	6.29067E-3	3.0041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80012E1	-5.00679E-4	-8.80005E1	2.6226E-4	4.48227E-3	9.34124E-2	2.73207E1	-3.26753E1	-3.26194E1	2.67716E1	1.198E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80009E1	-4.52995E-4	-8.80003E1	-1.90735E-4	4.81606E-3	9.34362E-2	2.73003E1	-3.26657E1	-3.2653E1	2.68214E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	2.9874E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80009E1	-6.91414E-4	-8.80008E1	1.43051E-4	4.98295E-3	9.39846E-2	2.73051E1	-3.26735E1	-3.26146E1	2.67938E1	1.20122E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80007E1	-4.76837E-4	-8.80007E1	1.90735E-4	4.86374E-3	9.36031E-2	2.73086E1	-3.26779E1	-3.26461E1	2.68346E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.02396E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80007E1	-4.05312E-4	-8.80003E1	2.38419E-5	4.74453E-3	9.38177E-2	2.72648E1	-3.26266E1	-3.25984E1	2.67866E1	1.19913E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80008E1	-6.19888E-4	-8.80002E1	7.15256E-5	5.00679E-3	9.38416E-2	2.73193E1	-3.26502E1	-3.26331E1	2.6825E1	1.20055E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.02253E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.18554E-2	-8.80005E1	-4.05312E-4	-8.80002E1	3.09944E-4	4.52995E-3	9.377E-2	2.72945E1	-3.2662E1	-3.2616E1	2.68184E1	1.20209E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.02253E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80008E1	-4.76837E-4	-8.80005E1	4.29153E-4	4.52995E-3	9.36747E-2	2.72791E1	-3.26614E1	-3.26419E1	2.68279E1	1.20226E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80006E1	-3.8147E-4	-8.80002E1	2.38419E-5	4.91142E-3	9.37939E-2	2.73411E1	-3.26561E1	-3.26585E1	2.68094E1	1.20092E-7	2.51393E-3	2.51393E-3	6.33919E-3	3.00348E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.201E-2	-8.80005E1	-4.05312E-4	-8.80003E1	1.19209E-4	4.55379E-3	9.36985E-2	2.73189E1	-3.27029E1	-3.26104E1	2.67988E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.0071E-1
