[Scan]
initial_time=2016-01-28T20:44:10
final_time=2016-01-28T20:44:30
ip_count=19
run=1026
dataset=7
scan=509
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.12368E-2
qbias_imon=-3.77806E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.62935E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.44259E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.90161E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.62484E-8
mult1=-9.6561E-9
mult2=-2.86433E-9
rf_tmon=-4.47037E-3
rf_agc=3.28349E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.81606E-3
ql5_imon=5.60212E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64131E0
bslens_imon=2.42391E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19666E1
lens5a_imon=1.97732E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12441E2
lens4a_imon=2.05162E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=3.18368E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02165E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04629E1
cs_ea1_imon=1.06717E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06729E0
lens1_imon=1.40618E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64368E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03838E1
cs_ea2_imon=1.40596E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84014E1
cs_ef1a_imon=3.03033E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.1823E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11353E1
os_restr1_imon=4.30741E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15265E1
os_ea1_imon=2.4534E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63865E1
os_ef1bup_imon=3.08167E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21852E0
cs_ionrep_imon=9.33973E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93495E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0177E1
cs_anode1_imon=1.96465E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.91657E-8
tplens_vset=1.4E-1
tplens_vmon=1.65111E0
tplens_imon=-3.42416E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26122E1
iondef3_imon=1.50329E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26681E1
iondef2_imon=1.59072E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98353E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=8.81708E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27259E0
ionrepsh_imon=8.53032E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33265E1
lens5b_imon=2.18565E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74451E1
cs_ef2b_imon=3.1357E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45189E0
os_ea2_imon=-4.72194E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06076E2
lens4b_imon=2.00387E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71218E1
cs_ef2a_imon=3.19475E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06518E0
os_ef2alow_imon=-2.54618E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.11032E-1
os_ef2bup_imon=-5.30433E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10765E1
os_restr2_imon=3.37896E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23031E2
cs_ionfoca_imon=6.30509E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01742E1
cs_anode2_imon=2.09921E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73033E1
iondef1_imon=1.09722E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67683E1
iondef4_imon=1.09929E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.97327E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.36247E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14412E0
cs_ionaccel_imon=-1.03289E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.79521E-6
window_vset=0.0E0
window_vmon=2.18005E-1
window_imon=-9.89268E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39087E-4
mask2_vset=0.0E0
mask2_vmon=-1.86495E1
mask2_imon=-6.36949E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92605E3
multa_neg_imon=7.62187E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.69294E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50108E3
multb_neg_imon=7.15741E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.54419E0
defgridb_imon=6.1909E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33247E1
os_fil1_imon=9.42085E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07626E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61681E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31837E1
cs_fil1_imon=7.71843E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.70931E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64608E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.72333E-2
os_fil2_imon=-2.55474E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99744E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.46433E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30375E-1
cs_fil2_imon=-2.6554E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16418E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22115E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.98832E-1
res40_imon=-2.57974E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=252
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.16233E-2	-8.80008E1	-4.29153E-4	-8.80003E1	2.14577E-4	4.64916E-3	9.3627E-2	2.72833E1	-3.26567E1	-3.26555E1	2.67992E1	1.20028E-7	2.51679E-3	2.51679E-3	6.33863E-3	3.0223E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.24736E-2	-8.80008E1	-8.10623E-4	-8.80003E1	2.6226E-4	4.29153E-3	9.34839E-2	2.73318E1	-3.27132E1	-3.25993E1	2.68282E1	1.20278E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02396E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.12368E-2	-8.80009E1	-5.24521E-4	-8.80002E1	3.09944E-4	4.62532E-3	9.36747E-2	2.73341E1	-3.26596E1	-3.25762E1	2.67989E1	1.19883E-7	2.51838E-3	2.51838E-3	6.27901E-3	3.01609E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.13143E-2	-8.80011E1	-4.29153E-4	-8.80002E1	4.76837E-4	4.24385E-3	9.377E-2	2.73428E1	-3.26974E1	-3.25859E1	2.68106E1	1.19991E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.10825E-2	-8.8001E1	-5.48363E-4	-8.8E1	5.00679E-4	4.43459E-3	9.34601E-2	2.73122E1	-3.26472E1	-3.26077E1	2.68388E1	1.19902E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99175E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80013E1	-4.76837E-4	-8.80001E1	2.14577E-4	4.62532E-3	9.35316E-2	2.72763E1	-3.26506E1	-3.2632E1	2.68034E1	1.19861E-7	2.51116E-3	2.51116E-3	6.29645E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80012E1	-2.86102E-4	-8.80003E1	1.66893E-4	4.74453E-3	9.35555E-2	2.73466E1	-3.265E1	-3.26194E1	2.68128E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80013E1	-5.72205E-4	-8.80003E1	2.6226E-4	4.45843E-3	9.38654E-2	2.72781E1	-3.26416E1	-3.26224E1	2.68082E1	1.20004E-7	2.52276E-3	2.52276E-3	6.33436E-3	2.99686E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80011E1	-4.29153E-4	-8.80003E1	3.33786E-4	5.05447E-3	9.37462E-2	2.72939E1	-3.26726E1	-3.26461E1	2.68202E1	1.2033E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80011E1	-5.24521E-4	-8.8E1	2.6226E-4	4.8399E-3	9.34839E-2	2.72406E1	-3.26437E1	-3.26465E1	2.68132E1	1.19757E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.03449E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.22418E-2	-8.80014E1	-7.86781E-4	-8.80003E1	1.66893E-4	4.60148E-3	9.33409E-2	2.72907E1	-3.26849E1	-3.26434E1	2.6825E1	1.20026E-7	2.51941E-3	2.51941E-3	6.32964E-3	3.00726E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80013E1	-4.05312E-4	-8.80004E1	7.15256E-5	4.76837E-3	9.36747E-2	2.72642E1	-3.26681E1	-3.26218E1	2.6789E1	1.19713E-7	2.52139E-3	2.52139E-3	6.29624E-3	2.99613E-1
1.6E1	0.0E0	1.0E0	6.47E2	4.41E2	-7.17779E-2	-8.80009E1	-2.6226E-4	-8.80003E1	2.38419E-4	4.91142E-3	9.35316E-2	2.73063E1	-3.265E1	-3.2623E1	2.68059E1	1.2026E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.09279E-2	-8.80011E1	-2.86102E-4	-8.80008E1	3.09944E-4	4.76837E-3	9.35078E-2	2.73316E1	-3.26703E1	-3.26319E1	2.67992E1	1.20017E-7	2.51935E-3	2.51935E-3	6.32661E-3	3.00693E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.15461E-2	-8.80011E1	-5.00679E-4	-8.80007E1	1.43051E-4	4.93526E-3	9.3317E-2	2.73265E1	-3.26634E1	-3.26278E1	2.67842E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.8001E1	-5.24521E-4	-8.80005E1	0.0E0	4.98295E-3	9.32693E-2	2.7285E1	-3.26667E1	-3.26484E1	2.68346E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02133E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80009E1	-8.58307E-4	-8.80006E1	-2.38419E-5	4.72069E-3	9.33886E-2	2.73087E1	-3.26561E1	-3.26152E1	2.67836E1	1.19753E-7	2.52026E-3	2.52026E-3	6.32099E-3	2.98831E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80007E1	-5.48363E-4	-8.80004E1	-2.38419E-5	4.76837E-3	9.32932E-2	2.72937E1	-3.26669E1	-3.26248E1	2.68094E1	1.19809E-7	2.50898E-3	2.50898E-3	6.3074E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.17007E-2	-8.8001E1	-4.05312E-4	-8.80003E1	-2.38419E-5	4.74453E-3	9.36508E-2	2.72986E1	-3.26555E1	-3.26248E1	2.6803E1					
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.12368E-2	-8.80009E1	-4.76837E-4	-8.80003E1	3.33786E-4	4.81606E-3	9.38177E-2	2.73033E1	-3.26681E1	-3.26122E1	2.67683E1	1.2026E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99175E-1
