[Scan]
initial_time=2016-01-28T20:45:04
final_time=2016-01-28T20:45:23
ip_count=19
run=1026
dataset=7
scan=511
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.8067E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-6.69503E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.4159E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.83613E-9
ql4_vset=
ql4_vmon=-9.53674E-5
ql4_imon=1.62E-8
mult1=-9.69223E-9
mult2=-2.89227E-9
rf_tmon=-5.79819E-3
rf_agc=3.30993E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=5.03838E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60605E0
bslens_imon=2.53415E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19863E1
lens5a_imon=2.00722E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12536E2
lens4a_imon=2.04837E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53784E1
cs_ef1b_imon=3.16398E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0456E2
lens23_imon=1.02071E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04862E1
cs_ea1_imon=1.10707E-5
lens1_vset=-2.7E0
lens1_vmon=-3.11466E0
lens1_imon=1.68698E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.98558E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.35653E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.04829E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.17543E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.30716E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14891E1
os_ea1_imon=2.44342E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27914E0
cs_ionrep_imon=9.6323E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93507E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01887E1
cs_anode1_imon=1.96494E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.8989E-8
tplens_vset=1.4E-1
tplens_vmon=1.60538E0
tplens_imon=-5.87742E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.51803E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27089E1
iondef2_imon=1.56093E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=8.6956E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27313E0
ionrepsh_imon=8.3958E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33958E1
lens5b_imon=2.20946E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74621E1
cs_ef2b_imon=3.1265E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41733E0
os_ea2_imon=-1.11767E-6
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00817E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71089E1
cs_ef2a_imon=3.20218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.54742E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.30085E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.37553E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23076E2
cs_ionfoca_imon=6.30865E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.09324E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73315E1
iondef1_imon=1.07715E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.0899E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.92105E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.271E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10251E0
cs_ionaccel_imon=-8.82392E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02089E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.54008E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-1.10223E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39358E-4
mask2_vset=0.0E0
mask2_vmon=-1.86398E1
mask2_imon=-6.48134E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.43688E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.58611E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.00429E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35645E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33245E1
os_fil1_imon=9.38582E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08164E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61536E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31876E1
cs_fil1_imon=8.3922E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.80375E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64478E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.91204E-2
os_fil2_imon=-2.52782E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.8015E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.44973E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22087E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.52867E-3
foreline_cvt_pmon=2.52867E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.64698E-1
res40_imon=-2.48976E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=154
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80007E1	-2.38419E-4	-8.80005E1	7.15256E-5	4.88758E-3	9.35793E-2	2.73281E1	-3.2672E1	-3.26189E1	2.68256E1	1.19965E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.13915E-2	-8.80007E1	-5.24521E-4	-8.80006E1	2.6226E-4	5.14984E-3	9.3627E-2	2.72904E1	-3.26884E1	-3.26003E1	2.67866E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.10051E-2	-8.80009E1	-2.86102E-4	-8.80005E1	2.38419E-4	5.10216E-3	9.34839E-2	2.73283E1	-3.26527E1	-3.26243E1	2.67931E1	1.19978E-7	2.51915E-3	2.51915E-3	6.3074E-3	3.00676E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.11597E-2	-8.80007E1	-3.09944E-4	-8.80003E1	1.90735E-4	4.76837E-3	9.35793E-2	2.72861E1	-3.26652E1	-3.2664E1	2.68118E1	1.20106E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.80007E1	-4.05312E-4	-8.80008E1	7.15256E-5	4.62532E-3	9.36031E-2	2.73257E1	-3.2659E1	-3.26372E1	2.67914E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02659E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.80008E1	-5.96046E-4	-8.80006E1	5.00679E-4	5.00679E-3	9.36985E-2	2.72901E1	-3.26663E1	-3.26512E1	2.67932E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.02253E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.29374E-2	-8.8001E1	-4.29153E-4	-8.80008E1	6.4373E-4	5.05447E-3	9.37223E-2	2.73442E1	-3.26272E1	-3.26561E1	2.68076E1	1.2033E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80008E1	-5.72205E-4	-8.80003E1	7.39098E-4	5.34058E-3	9.33886E-2	2.72781E1	-3.26248E1	-3.25948E1	2.6843E1	1.19872E-7	2.5147E-3	2.5147E-3	6.32978E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.19325E-2	-8.80012E1	-4.52995E-4	-8.80005E1	1.90735E-4	4.93526E-3	9.35793E-2	2.73074E1	-3.26522E1	-3.26368E1	2.68026E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0148E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.19325E-2	-8.80009E1	-5.96046E-4	-8.80004E1	4.29153E-4	5.34058E-3	9.34839E-2	2.72866E1	-3.27189E1	-3.26546E1	2.68076E1	1.19831E-7	2.52405E-3	2.52405E-3	6.3074E-3	3.02479E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80006E1	-4.05312E-4	-8.80005E1	3.33786E-4	4.76837E-3	9.35316E-2	2.73003E1	-3.26759E1	-3.26056E1	2.67998E1	1.1995E-7	2.51874E-3	2.51874E-3	6.33648E-3	3.0286E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80009E1	-4.52995E-4	-8.80005E1	4.05312E-4	5.07832E-3	9.34839E-2	2.73455E1	-3.26317E1	-3.26289E1	2.67906E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80009E1	-3.57628E-4	-8.80002E1	4.29153E-4	4.76837E-3	9.37939E-2	2.73064E1	-3.26705E1	-3.26216E1	2.67732E1	1.1988E-7	2.51886E-3	2.51886E-3	6.3126E-3	3.0E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27053E-2	-8.80007E1	-3.09944E-4	-8.80003E1	3.09944E-4	4.88758E-3	9.38177E-2	2.73139E1	-3.2672E1	-3.26349E1	2.67966E1	1.20281E-7	2.51642E-3	2.51642E-3	6.32483E-3	3.02025E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.23964E-2	-8.80007E1	-2.14577E-4	-8.80003E1	5.48363E-4	5.05447E-3	9.408E-2	2.73333E1	-3.26554E1	-3.26164E1	2.6789E1	1.20209E-7	2.50989E-3	2.50989E-3	6.32896E-3	3.0148E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80006E1	-5.24521E-4	-8.80003E1	3.09944E-4	4.8399E-3	9.36747E-2	2.72921E1	-3.2639E1	-3.26472E1	2.68106E1	1.20383E-7	2.5199E-3	2.5199E-3	6.29645E-3	2.9952E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80008E1	-6.67572E-4	-8.80002E1	2.6226E-4	4.88758E-3	9.39369E-2	2.72985E1	-3.26134E1	-3.26494E1	2.67884E1	1.20004E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99175E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30918E-2	-8.80007E1	-4.29153E-4	-8.80003E1	9.53674E-5	5.126E-3	9.37939E-2	2.73234E1	-3.26431E1	-3.26378E1	2.6798E1	1.20174E-7	2.51443E-3	2.51443E-3	6.34037E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.8001E1	-4.76837E-4	-8.80006E1	3.09944E-4	5.17368E-3	9.37462E-2	2.72696E1	-3.26561E1	-3.26038E1	2.67769E1	1.20209E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80007E1	-5.96046E-4	-8.80004E1	-9.53674E-5	5.17368E-3	9.38177E-2	2.73315E1	-3.27089E1	-3.26356E1	2.68034E1	1.19913E-7	2.52867E-3	2.52867E-3	6.32386E-3	3.01871E-1
