[Scan]
initial_time=2016-01-28T20:45:30
final_time=2016-01-28T20:45:50
ip_count=19
run=1026
dataset=7
scan=512
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.77056E-6
ql1_vset=
ql1_vmon=-8.80008E1
ql1_imon=-6.05655E-10
ql2_vset=
ql2_vmon=-2.14577E-4
ql2_imon=1.44845E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.9322E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.63154E-8
mult1=-1.06407E-8
mult2=-2.78497E-9
rf_tmon=-4.84605E-3
rf_agc=3.4418E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=5.17857E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60966E0
bslens_imon=2.68916E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20091E1
lens5a_imon=1.98163E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=3.18013E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02247E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=1.09553E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0738E0
lens1_imon=1.43824E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64546E1
os_ef1alow_imon=2.97054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03852E1
cs_ea2_imon=1.3915E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84332E1
cs_ef1a_imon=3.03492E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.16507E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11248E1
os_restr1_imon=4.30926E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15119E1
os_ea1_imon=2.43009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63654E1
os_ef1bup_imon=3.09929E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22686E0
cs_ionrep_imon=9.28983E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91856E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02033E1
cs_anode1_imon=1.96903E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.89946E-8
tplens_vset=1.4E-1
tplens_vmon=1.64203E0
tplens_imon=-3.42605E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26603E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26603E1
iondef2_imon=1.57787E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98486E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.72374E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=8.53279E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33628E1
lens5b_imon=2.16224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74707E1
cs_ef2b_imon=3.14195E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43415E0
os_ea2_imon=-5.98557E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71008E1
cs_ef2a_imon=3.17826E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07452E0
os_ef2alow_imon=-2.59677E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82038E-1
os_ef2bup_imon=-5.23903E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10999E1
os_restr2_imon=3.37325E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23089E2
cs_ionfoca_imon=6.32127E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01921E1
cs_anode2_imon=2.10189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73296E1
iondef1_imon=1.0995E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68225E1
iondef4_imon=1.09327E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.97147E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.29876E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15384E0
cs_ionaccel_imon=-9.79976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47335E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56199E1
einzel_imon=7.70655E-6
window_vset=0.0E0
window_vmon=2.14478E-1
window_imon=-9.76233E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39166E-4
mask2_vset=0.0E0
mask2_vmon=-1.86463E1
mask2_imon=-7.03025E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=7.85506E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.61135E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50168E3
multb_neg_imon=6.92859E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43465E0
defgridb_imon=6.00932E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33214E1
os_fil1_imon=9.41853E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08103E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60824E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31872E1
cs_fil1_imon=7.19296E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.39484E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.64285E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.74438E-2
os_fil2_imon=-2.41923E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07186E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.08636E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30459E-1
cs_fil2_imon=-2.50656E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.59156E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22089E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.20209E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06167E-1
res40_imon=-2.29736E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=167
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80008E1	-8.34465E-4	-8.80003E1	3.09944E-4	4.55379E-3	9.36985E-2	2.73399E1	-3.26458E1	-3.2629E1	2.67943E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9978E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80008E1	-9.05991E-4	-8.80002E1	1.90735E-4	4.76837E-3	9.37939E-2	2.73088E1	-3.2664E1	-3.26211E1	2.67633E1	1.20069E-7	2.52647E-3	2.52647E-3	6.31837E-3	2.9874E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80008E1	-7.62939E-4	-8.80003E1	7.15256E-5	4.79221E-3	9.36985E-2	2.73126E1	-3.26567E1	-3.26318E1	2.68204E1	1.20191E-7	2.51248E-3	2.51248E-3	6.30182E-3	2.99613E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.80008E1	-4.29153E-4	-8.80001E1	4.76837E-5	4.72069E-3	9.36985E-2	2.73558E1	-3.2672E1	-3.26832E1	2.68501E1	1.20042E-7	2.52236E-3	2.52236E-3	6.32858E-3	3.00097E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.20871E-2	-8.80007E1	-4.29153E-4	-8.8E1	2.6226E-4	4.673E-3	9.35793E-2	2.7263E1	-3.26717E1	-3.25972E1	2.68247E1	1.20311E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80009E1	-1.43051E-4	-8.80001E1	4.05312E-4	5.03063E-3	9.39369E-2	2.73473E1	-3.26768E1	-3.26346E1	2.68376E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80009E1	-4.05312E-4	-8.80002E1	9.53674E-5	4.79221E-3	9.36747E-2	2.73033E1	-3.26413E1	-3.26313E1	2.67872E1	1.19872E-7	2.51804E-3	2.51804E-3	6.29067E-3	2.99613E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80008E1	-3.09944E-4	-8.80005E1	9.53674E-5	5.03063E-3	9.377E-2	2.7269E1	-3.26549E1	-3.26206E1	2.67816E1	1.19902E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.01223E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80007E1	-4.52995E-4	-8.80003E1	3.57628E-4	4.86374E-3	9.35555E-2	2.73382E1	-3.26395E1	-3.26468E1	2.68238E1	1.20278E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.80006E1	-5.00679E-4	-8.80003E1	1.19209E-4	4.76837E-3	9.36985E-2	2.72886E1	-3.26791E1	-3.25912E1	2.67529E1	1.19978E-7	2.51693E-3	2.51693E-3	6.3074E-3	2.99879E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80004E1	-6.91414E-4	-8.80007E1	2.38419E-4	4.64916E-3	9.35793E-2	2.73502E1	-3.26831E1	-3.26585E1	2.68366E1	1.198E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.02511E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80007E1	-4.52995E-4	-8.80005E1	1.66893E-4	4.8399E-3	9.377E-2	2.72803E1	-3.26484E1	-3.26408E1	2.67722E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.21643E-2	-8.80008E1	-6.19888E-4	-8.80005E1	2.6226E-4	4.95911E-3	9.38416E-2	2.73424E1	-3.26777E1	-3.26476E1	2.68364E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01738E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80007E1	-5.72205E-4	-8.80004E1	2.14577E-4	4.88758E-3	9.39608E-2	2.73429E1	-3.26663E1	-3.2635E1	2.67842E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.03449E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.25507E-2	-8.80009E1	-7.39098E-4	-8.80003E1	1.90735E-4	5.05447E-3	9.377E-2	2.73057E1	-3.26717E1	-3.26176E1	2.68418E1	1.2033E-7	2.52318E-3	2.52318E-3	6.32386E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80009E1	-5.48363E-4	-8.80002E1	7.15256E-5	4.55379E-3	9.377E-2	2.73004E1	-3.26413E1	-3.259E1	2.67968E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.29374E-2	-8.80007E1	-5.24521E-4	-8.80001E1	2.86102E-4	4.91142E-3	9.38654E-2	2.73387E1	-3.2647E1	-3.2641E1	2.6796E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80008E1	-5.00679E-4	-8.80002E1	2.6226E-4	5.05447E-3	9.36985E-2	2.7236E1	-3.26573E1	-3.26374E1	2.67968E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.23189E-2	-8.80008E1	-1.19209E-4	-8.8E1	1.90735E-4	4.76837E-3	9.35555E-2	2.73818E1	-3.26531E1	-3.2639E1	2.68094E1	1.2033E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.80008E1	-2.14577E-4	-8.80001E1	1.19209E-4	4.93526E-3	9.36985E-2	2.73296E1	-3.26603E1	-3.26603E1	2.68225E1	1.20209E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.0148E-1
