[Scan]
initial_time=2016-01-28T20:46:50
final_time=2016-01-28T20:47:10
ip_count=19
run=1026
dataset=7
scan=515
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.79505E-6
ql1_vset=
ql1_vmon=-8.80007E1
ql1_imon=-6.51205E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.43791E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.7406E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.63083E-8
mult1=-9.16244E-9
mult2=-2.69266E-9
rf_tmon=-3.89958E-3
rf_agc=3.30872E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.71489E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6355E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19562E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.0479E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.18596E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04547E2
lens23_imon=1.02092E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05276E1
cs_ea1_imon=1.12005E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10264E0
lens1_imon=1.41661E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.98739E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03895E1
cs_ea2_imon=1.38393E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8452E1
cs_ef1a_imon=3.02955E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.14003E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.31617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15119E1
os_ea1_imon=2.4546E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63599E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27914E0
cs_ionrep_imon=9.61067E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93373E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=1.95773E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.8779E-8
tplens_vset=1.4E-1
tplens_vmon=1.61259E0
tplens_imon=-2.05617E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2596E1
iondef3_imon=1.52632E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.57391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98468E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=8.39067E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=8.46069E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34168E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.12758E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40831E0
os_ea2_imon=-9.59052E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00565E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.19065E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07438E0
os_ef2alow_imon=-2.45732E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.35679E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23073E2
cs_ionfoca_imon=6.32235E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01713E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73387E1
iondef1_imon=1.10563E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67619E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.94298E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.15572E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11873E0
cs_ionaccel_imon=-1.00493E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02093E2
cs_ionfocb_imon=1.47421E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55925E1
einzel_imon=7.66261E-6
window_vset=0.0E0
window_vmon=2.19745E-1
window_imon=-9.97719E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82646E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.8659E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.76133E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.651E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.28187E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39856E0
defgridb_imon=6.03816E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33225E1
os_fil1_imon=9.41195E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07798E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60362E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3182E1
cs_fil1_imon=7.55128E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.95682E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63542E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.89915E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00117E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.30807E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30299E-1
cs_fil2_imon=-2.71402E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.67681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21915E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51116E-3
foreline_cvt_pmon=2.51116E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.37443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=163
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80005E1	-7.39098E-4	-8.80001E1	2.14577E-4	4.93526E-3	9.377E-2	2.72927E1	-3.26673E1	-3.26461E1	2.68696E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.03545E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.3401E-2	-8.80006E1	-8.82149E-4	-8.80002E1	4.29153E-4	4.74453E-3	9.36747E-2	2.73399E1	-3.26549E1	-3.26224E1	2.681E1	1.20158E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80008E1	-1.09673E-3	-8.80002E1	4.52995E-4	4.45843E-3	9.38416E-2	2.73157E1	-3.26484E1	-3.26282E1	2.67791E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9926E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80006E1	-6.19888E-4	-8.80005E1	1.43051E-4	4.24385E-3	9.37462E-2	2.72657E1	-3.26805E1	-3.26359E1	2.6792E1	1.20177E-7	2.51369E-3	2.51369E-3	6.3074E-3	2.98522E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80008E1	-5.96046E-4	-8.80004E1	1.90735E-4	4.81606E-3	9.36747E-2	2.72985E1	-3.26711E1	-3.26164E1	2.68354E1	1.19841E-7	2.52236E-3	2.52236E-3	6.29157E-3	2.98092E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80013E1	-7.15256E-4	-8.80003E1	2.38419E-5	4.8399E-3	9.36747E-2	2.73375E1	-3.26676E1	-3.25715E1	2.68032E1	1.19757E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80013E1	-4.29153E-4	-8.80004E1	-3.57628E-4	4.98295E-3	9.37939E-2	2.72666E1	-3.26098E1	-3.26164E1	2.6804E1	1.20174E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80013E1	-6.19888E-4	-8.80001E1	1.66893E-4	5.14984E-3	9.39131E-2	2.72925E1	-3.26356E1	-3.26266E1	2.67974E1	1.20137E-7	2.5147E-3	2.5147E-3	6.31299E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.80016E1	-6.91414E-4	-8.80001E1	2.38419E-4	5.03063E-3	9.36985E-2	2.72823E1	-3.2635E1	-3.26044E1	2.67523E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80016E1	-7.15256E-4	-8.80001E1	2.86102E-4	4.81606E-3	9.34839E-2	2.73228E1	-3.26714E1	-3.26207E1	2.68376E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80013E1	-3.8147E-4	-8.80004E1	1.19209E-4	4.45843E-3	9.3627E-2	2.72426E1	-3.26891E1	-3.26633E1	2.67891E1	1.19902E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.3401E-2	-8.80014E1	-2.86102E-4	-8.80003E1	2.38419E-5	4.86374E-3	9.38177E-2	2.73081E1	-3.26873E1	-3.26152E1	2.67889E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80014E1	-6.19888E-4	-8.8E1	-4.76837E-5	4.8399E-3	9.36747E-2	2.73117E1	-3.26843E1	-3.26603E1	2.67769E1	1.19965E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80015E1	-5.72205E-4	-8.80004E1	0.0E0	4.8399E-3	9.37939E-2	2.73099E1	-3.26645E1	-3.2599E1	2.68112E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80016E1	-6.67572E-4	-8.80003E1	-2.38419E-5	4.74453E-3	9.37223E-2	2.72962E1	-3.26608E1	-3.26018E1	2.67986E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.8001E1	-8.10623E-4	-8.80002E1	-2.38419E-5	4.36306E-3	9.36747E-2	2.73315E1	-3.26428E1	-3.26332E1	2.68094E1	1.20004E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.98156E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80011E1	-5.00679E-4	-8.80004E1	1.19209E-4	4.81606E-3	9.39369E-2	2.72862E1	-3.2672E1	-3.26083E1	2.67962E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80013E1	-5.96046E-4	-8.80003E1	1.66893E-4	4.88758E-3	9.36031E-2	2.73157E1	-3.26343E1	-3.26596E1	2.68725E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99175E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80009E1	-7.39098E-4	-8.80003E1	2.86102E-4	4.72069E-3	9.35078E-2	2.72612E1	-3.26543E1	-3.26272E1	2.68256E1	1.20192E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.02115E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80007E1	-6.67572E-4	-8.80004E1	1.66893E-4	4.8399E-3	9.38416E-2	2.73387E1	-3.26627E1	-3.2596E1	2.67619E1	1.20069E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.01609E-1
