[Scan]
initial_time=2016-01-28T20:48:10
final_time=2016-01-28T20:48:30
ip_count=19
run=1026
dataset=7
scan=518
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.75316E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-6.56021E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.41836E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.73482E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.63471E-8
mult1=-9.54665E-9
mult2=-2.82517E-9
rf_tmon=-5.16427E-3
rf_agc=3.25717E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.19753E-3
ql5_imon=5.59413E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66483E0
bslens_imon=2.61284E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20111E1
lens5a_imon=1.97583E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.04869E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53687E1
cs_ef1b_imon=3.17686E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02194E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05098E1
cs_ea1_imon=1.1046E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06777E0
lens1_imon=1.45953E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.96976E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03433E1
cs_ea2_imon=1.37677E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84587E1
cs_ef1a_imon=3.03145E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.12529E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11319E1
os_restr1_imon=4.3126E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15275E1
os_ea1_imon=2.4647E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63522E1
os_ef1bup_imon=3.08653E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21414E0
cs_ionrep_imon=9.47395E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93457E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01944E1
cs_anode1_imon=1.96034E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.8741E-8
tplens_vset=1.4E-1
tplens_vmon=1.62613E0
tplens_imon=-2.07998E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25511E1
iondef3_imon=1.50128E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27068E1
iondef2_imon=1.5696E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0289E2
lens6_imon=2.98482E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=8.04257E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30658E0
ionrepsh_imon=8.58142E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33633E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74666E1
cs_ef2b_imon=3.13573E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41799E0
os_ea2_imon=-6.37735E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00843E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71227E1
cs_ef2a_imon=3.19816E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07751E0
os_ef2alow_imon=-2.5239E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83144E-1
os_ef2bup_imon=-5.25951E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10738E1
os_restr2_imon=3.35385E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.30553E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01748E1
cs_anode2_imon=2.08629E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73558E1
iondef1_imon=1.08183E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68286E1
iondef4_imon=1.09082E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.79355E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82594E-1
olens1_imon=7.07309E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11851E0
cs_ionaccel_imon=-1.04042E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.4741E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56362E1
einzel_imon=7.83472E-6
window_vset=0.0E0
window_vmon=1.92375E-1
window_imon=-1.04409E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82645E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86577E1
mask2_imon=-5.66738E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92656E3
multa_neg_imon=7.78806E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93745E3
defgrida_imon=6.75228E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.35098E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31775E0
defgridb_imon=5.97729E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3317E1
os_fil1_imon=9.40529E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07874E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59751E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31829E1
cs_fil1_imon=7.66007E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.00034E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62896E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10672E-2
os_fil2_imon=-2.47455E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99301E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.53349E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31169E-1
cs_fil2_imon=-2.38887E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.43609E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21852E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.59643E-1
res40_imon=-2.41374E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80008E1	-8.34465E-4	-8.80004E1	4.05312E-4	4.86374E-3	9.37223E-2	2.72935E1	-3.26538E1	-3.26052E1	2.67972E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.9978E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30146E-2	-8.80012E1	-8.10623E-4	-8.80005E1	1.66893E-4	4.673E-3	9.40561E-2	2.72708E1	-3.2664E1	-3.25881E1	2.68149E1	1.20106E-7	2.51739E-3	2.51739E-3	6.29128E-3	3.00453E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80012E1	-5.96046E-4	-8.80002E1	4.05312E-4	4.64916E-3	9.377E-2	2.73428E1	-3.26509E1	-3.26075E1	2.67917E1	1.20084E-7	2.52027E-3	2.52027E-3	6.32418E-3	3.0041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80012E1	-1.43051E-4	-8.80002E1	3.33786E-4	4.72069E-3	9.3627E-2	2.7269E1	-3.26512E1	-3.26332E1	2.68244E1	1.19841E-7	2.51919E-3	2.51919E-3	6.32328E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80012E1	-1.19209E-4	-8.80003E1	5.24521E-4	4.62532E-3	9.35316E-2	2.72591E1	-3.2675E1	-3.26006E1	2.6813E1	1.20055E-7	2.51417E-3	2.51417E-3	6.30202E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80007E1	-3.09944E-4	-8.80004E1	3.33786E-4	4.74453E-3	9.34839E-2	2.72543E1	-3.26744E1	-3.25997E1	2.67668E1	1.19953E-7	2.52492E-3	2.52492E-3	6.31278E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80009E1	-3.09944E-4	-8.80003E1	4.76837E-4	4.45843E-3	9.35555E-2	2.73315E1	-3.26657E1	-3.25912E1	2.67956E1	1.20244E-7	2.5147E-3	2.5147E-3	6.31858E-3	2.99083E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.19325E-2	-8.80007E1	-5.48363E-4	-8.80003E1	2.6226E-4	4.673E-3	9.38416E-2	2.73161E1	-3.26359E1	-3.26101E1	2.68322E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80009E1	-5.24521E-4	-8.80002E1	5.24521E-4	4.8399E-3	9.3627E-2	2.7259E1	-3.26267E1	-3.26026E1	2.6768E1	1.1987E-7	2.52568E-3	2.52568E-3	6.29721E-3	3.03813E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.21643E-2	-8.80007E1	-6.19888E-4	-8.8E1	2.14577E-4	4.72069E-3	9.377E-2	2.73382E1	-3.2667E1	-3.26529E1	2.67571E1	1.19851E-7	2.51793E-3	2.51793E-3	6.30149E-3	3.00197E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80009E1	-6.19888E-4	-8.80004E1	3.33786E-4	4.72069E-3	9.36031E-2	2.72336E1	-3.26711E1	-3.26056E1	2.67986E1	1.19965E-7	2.51662E-3	2.51662E-3	6.28006E-3	2.97704E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80007E1	-7.39098E-4	-8.80003E1	4.29153E-4	4.79221E-3	9.377E-2	2.73454E1	-3.26669E1	-3.26248E1	2.67998E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.17007E-2	-8.8001E1	-3.57628E-4	-8.80006E1	4.29153E-4	4.95911E-3	9.32932E-2	2.72656E1	-3.26549E1	-3.25847E1	2.68178E1	1.20226E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9978E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80011E1	-5.00679E-4	-8.80002E1	3.09944E-4	4.91142E-3	9.33409E-2	2.73357E1	-3.26597E1	-3.25918E1	2.67884E1	1.20174E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.17007E-2	-8.80007E1	-5.72205E-4	-8.80002E1	1.19209E-4	4.72069E-3	9.34362E-2	2.72763E1	-3.26744E1	-3.26217E1	2.681E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01347E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80009E1	-6.91414E-4	-8.80002E1	1.43051E-4	4.72069E-3	9.34124E-2	2.73435E1	-3.2647E1	-3.26278E1	2.67824E1	1.19913E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.8001E1	-8.34465E-4	-8.80005E1	-1.19209E-4	5.126E-3	9.34124E-2	2.73093E1	-3.26741E1	-3.26314E1	2.684E1	1.20017E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.37103E-2	-8.80012E1	-5.96046E-4	-8.80002E1	4.52995E-4	4.86374E-3	9.31978E-2	2.73139E1	-3.26644E1	-3.2636E1	2.68058E1	1.2054E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.42513E-2	-8.80013E1	-4.76837E-4	-8.80004E1	1.19209E-4	5.07832E-3	9.36031E-2	2.72773E1	-3.26753E1	-3.26144E1	2.67746E1	1.19851E-7	2.52599E-3	2.52599E-3	6.3074E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.8001E1	-6.91414E-4	-8.8E1	2.14577E-4	5.19753E-3	9.3317E-2	2.73558E1	-3.27068E1	-3.25511E1	2.68286E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.01223E-1
