[Scan]
initial_time=2016-01-28T20:48:37
final_time=2016-01-28T20:48:56
ip_count=19
run=1026
dataset=7
scan=519
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.82554E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.55663E-10
ql2_vset=
ql2_vmon=-2.86102E-4
ql2_imon=1.42777E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.72476E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.63783E-8
mult1=-9.75243E-9
mult2=-2.74057E-9
rf_tmon=-5.65399E-3
rf_agc=3.29671E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=5.59485E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69512E0
bslens_imon=2.59281E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20108E1
lens5a_imon=1.98297E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.04987E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=3.17011E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04585E2
lens23_imon=1.02266E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05295E1
cs_ea1_imon=1.08573E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07076E0
lens1_imon=1.53453E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64692E1
os_ef1alow_imon=2.96504E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03608E1
cs_ea2_imon=1.39437E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84196E1
cs_ef1a_imon=3.03928E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.12728E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.31076E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1537E1
os_ea1_imon=2.48026E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63851E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25623E0
cs_ionrep_imon=9.25044E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93332E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01659E1
cs_anode1_imon=1.95629E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20554E0
olens4_imon=3.86581E-8
tplens_vset=1.4E-1
tplens_vmon=1.62728E0
tplens_imon=-3.69709E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26284E1
iondef3_imon=1.48462E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98438E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=8.93676E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.33645E0
ionrepsh_imon=8.59565E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33144E1
lens5b_imon=2.18118E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.40429E0
os_ea2_imon=-5.92658E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71216E1
cs_ef2a_imon=3.19894E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.65194E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.29365E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.36112E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23065E2
cs_ionfoca_imon=6.29822E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.09648E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72997E1
iondef1_imon=1.09281E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67986E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=5.8329E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=7.0687E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-7.31025E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47342E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=1.70491E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.39257E-4
mask2_vset=0.0E0
mask2_vmon=-1.865E1
mask2_imon=-6.73362E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92645E3
multa_neg_imon=7.48781E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.48262E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.24713E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27268E0
defgridb_imon=6.07205E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33207E1
os_fil1_imon=9.40444E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07822E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59756E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31868E1
cs_fil1_imon=7.11279E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.79174E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62859E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.00717E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.57048E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31076E-1
cs_fil2_imon=-2.29356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.58071E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21711E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52815E-3
foreline_cvt_pmon=2.52815E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.53596E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80013E1	-8.10623E-4	-8.80004E1	-4.76837E-5	4.8399E-3	9.34839E-2	2.73598E1	-3.26699E1	-3.26296E1	2.68192E1	1.19851E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.02511E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80012E1	-7.86781E-4	-8.8E1	1.66893E-4	5.26905E-3	9.36508E-2	2.7334E1	-3.26626E1	-3.26372E1	2.68064E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.03027E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80012E1	-5.96046E-4	-8.80002E1	2.38419E-5	4.93526E-3	9.36747E-2	2.73219E1	-3.26777E1	-3.25623E1	2.67722E1	1.20055E-7	2.51632E-3	2.51632E-3	6.29665E-3	2.9892E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80013E1	-5.00679E-4	-8.80002E1	1.19209E-4	4.98295E-3	9.3317E-2	2.73275E1	-3.26838E1	-3.26349E1	2.68238E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.97445E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30918E-2	-8.80012E1	-3.8147E-4	-8.80003E1	2.86102E-4	4.52995E-3	9.36031E-2	2.72594E1	-3.26338E1	-3.26464E1	2.68148E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.9841E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80013E1	-6.19888E-4	-8.80002E1	1.90735E-4	5.05447E-3	9.36031E-2	2.73628E1	-3.26464E1	-3.26074E1	2.67746E1	1.19965E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40192E-2	-8.8001E1	-3.57628E-4	-8.80003E1	7.15256E-5	5.14984E-3	9.32932E-2	2.726E1	-3.26404E1	-3.25972E1	2.67932E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.41738E-2	-8.8001E1	-4.76837E-5	-8.80003E1	4.29153E-4	4.95911E-3	9.37939E-2	2.72751E1	-3.26398E1	-3.26422E1	2.67824E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80009E1	-3.57628E-4	-8.80001E1	4.76837E-4	4.69685E-3	9.37939E-2	2.72396E1	-3.2647E1	-3.26164E1	2.68382E1	1.19913E-7	2.52647E-3	2.52647E-3	6.32936E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.22418E-2	-8.8001E1	-2.14577E-4	-8.79999E1	4.76837E-5	4.79221E-3	9.39369E-2	2.73339E1	-3.26603E1	-3.26392E1	2.67385E1	1.20069E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9978E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.19325E-2	-8.80012E1	-2.6226E-4	-8.79999E1	2.86102E-4	4.79221E-3	9.37223E-2	2.72901E1	-3.26488E1	-3.26422E1	2.67547E1	1.19713E-7	2.51359E-3	2.51359E-3	6.30182E-3	2.99879E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80011E1	-2.86102E-4	-8.8E1	4.29153E-4	4.81606E-3	9.377E-2	2.73369E1	-3.26705E1	-3.25858E1	2.67782E1	1.20174E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.13915E-2	-8.80012E1	-3.33786E-4	-8.8E1	2.38419E-4	4.93526E-3	9.36985E-2	2.72544E1	-3.26626E1	-3.26337E1	2.6807E1	1.20069E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.12368E-2	-8.80011E1	-5.24521E-4	-8.80004E1	1.66893E-4	5.10216E-3	9.37223E-2	2.73112E1	-3.26578E1	-3.26095E1	2.68063E1	1.20209E-7	2.52169E-3	2.52169E-3	6.3074E-3	2.99175E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.23189E-2	-8.8001E1	-8.34465E-4	-8.8E1	2.6226E-4	4.88758E-3	9.35793E-2	2.73424E1	-3.26543E1	-3.2611E1	2.67931E1	1.19925E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.0041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.8001E1	-5.96046E-4	-8.80001E1	5.00679E-4	4.91142E-3	9.35555E-2	2.72461E1	-3.26667E1	-3.26508E1	2.67445E1	1.20106E-7	2.51417E-3	2.51417E-3	6.29665E-3	3.03286E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80007E1	-5.48363E-4	-8.80004E1	2.14577E-4	5.03063E-3	9.36747E-2	2.73213E1	-3.26807E1	-3.25948E1	2.68166E1	1.19953E-7	2.51417E-3	2.51417E-3	6.34518E-3	3.00453E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80009E1	-2.14577E-4	-8.79999E1	5.24521E-4	5.43594E-3	9.32455E-2	2.72535E1	-3.26915E1	-3.26208E1	2.68302E1	1.19913E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80012E1	-2.38419E-4	-8.80002E1	3.09944E-4	4.95911E-3	9.35078E-2	2.73123E1	-3.26386E1	-3.26476E1	2.68202E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80011E1	-2.86102E-4	-8.80001E1	3.09944E-4	4.95911E-3	9.33886E-2	2.72997E1	-3.26536E1	-3.26284E1	2.67986E1	1.20055E-7	2.52815E-3	2.52815E-3	6.29128E-3	3.00453E-1
