[Scan]
initial_time=2016-01-28T20:50:23
final_time=2016-01-28T20:50:43
ip_count=19
run=1026
dataset=7
scan=523
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.77766E-6
ql1_vset=
ql1_vmon=-8.80009E1
ql1_imon=-6.2964E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.41168E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.75762E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.64256E-8
mult1=-9.67331E-9
mult2=-2.65514E-9
rf_tmon=-4.17805E-3
rf_agc=3.38549E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.52995E-3
ql5_imon=5.39792E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65652E0
bslens_imon=2.73963E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19779E1
lens5a_imon=1.97226E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05197E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=3.18813E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02258E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04868E1
cs_ea1_imon=1.09986E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09243E0
lens1_imon=1.46708E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.98018E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04165E1
cs_ea2_imon=1.41097E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84658E1
cs_ef1a_imon=3.04E-5
olens2_vset=9.7E-1
olens2_vmon=9.69911E-1
olens2_imon=1.12196E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.3259E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.44198E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.08433E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=9.44845E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=1.9689E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.87392E-8
tplens_vset=1.4E-1
tplens_vmon=1.66186E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2673E1
iondef3_imon=1.47766E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26604E1
iondef2_imon=1.58148E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02951E2
lens6_imon=2.98234E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.51393E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29536E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33363E1
lens5b_imon=2.19E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.142E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43475E0
os_ea2_imon=-5.84137E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00561E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.1993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0888E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.87213E-1
os_ef2bup_imon=-5.22157E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11105E1
os_restr2_imon=3.37553E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.3E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01881E1
cs_anode2_imon=2.09036E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72932E1
iondef1_imon=1.09914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67575E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.75697E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.07053E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12233E0
cs_ionaccel_imon=-9.25639E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.4737E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.87885E-6
window_vset=0.0E0
window_vmon=2.19145E-1
window_imon=-1.04457E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86578E1
mask2_imon=-4.71539E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92644E3
multa_neg_imon=8.07136E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.87091E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.22419E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38953E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33202E1
os_fil1_imon=9.41111E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08002E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59946E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31833E1
cs_fil1_imon=7.34104E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.53946E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62944E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.09261E-2
os_fil2_imon=-2.37164E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.63418E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.68282E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2177E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.04942E-1
res40_imon=-2.29154E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=803
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80009E1	-4.05312E-4	-8.8E1	-2.6226E-4	5.10216E-3	9.40084E-2	2.72705E1	-3.26487E1	-3.26065E1	2.68623E1	1.20069E-7	2.52538E-3	2.52538E-3	6.29645E-3	3.01347E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.35556E-2	-8.80009E1	-2.14577E-4	-8.80003E1	1.90735E-4	4.72069E-3	9.37223E-2	2.72714E1	-3.26505E1	-3.2626E1	2.67662E1	1.19742E-7	2.52117E-3	2.52117E-3	6.29786E-3	3.00925E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.8001E1	-3.57628E-4	-8.80001E1	3.33786E-4	4.74453E-3	9.35555E-2	2.72811E1	-3.26497E1	-3.26504E1	2.68136E1	1.19713E-7	2.51025E-3	2.51025E-3	6.31299E-3	2.99879E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80008E1	-3.57628E-4	-8.79998E1	9.53674E-5	4.79221E-3	9.37462E-2	2.72955E1	-3.26518E1	-3.25914E1	2.6803E1	1.19983E-7	2.52314E-3	2.52314E-3	6.31437E-3	3.00363E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80008E1	-1.43051E-4	-8.79998E1	1.19209E-4	4.673E-3	9.377E-2	2.72727E1	-3.26537E1	-3.26278E1	2.68273E1	1.20055E-7	2.519E-3	2.519E-3	6.32087E-3	3.00005E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.8001E1	-2.86102E-4	-8.80002E1	-7.15256E-5	4.93526E-3	9.3627E-2	2.73352E1	-3.26555E1	-3.26242E1	2.67776E1	1.19965E-7	2.52428E-3	2.52428E-3	6.30192E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23964E-2	-8.80005E1	-9.53674E-5	-8.79999E1	0.0E0	4.93526E-3	9.36747E-2	2.73265E1	-3.26572E1	-3.26034E1	2.68148E1	1.20142E-7	2.52342E-3	2.52342E-3	6.3074E-3	3.00348E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80008E1	-4.05312E-4	-8.80003E1	0.0E0	5.22137E-3	9.37939E-2	2.73027E1	-3.26201E1	-3.26526E1	2.67788E1	1.19395E-7	2.51359E-3	2.51359E-3	6.31299E-3	3.0041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.36328E-2	-8.8001E1	-6.19888E-4	-8.80002E1	4.05312E-4	5.07832E-3	9.36985E-2	2.72931E1	-3.26627E1	-3.26248E1	2.68238E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.97963E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.8001E1	-1.90735E-4	-8.8E1	2.14577E-4	4.8399E-3	9.36031E-2	2.72552E1	-3.26518E1	-3.262E1	2.6786E1	1.20055E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.01223E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80009E1	-4.76837E-4	-8.8E1	2.14577E-4	5.07832E-3	9.34601E-2	2.73434E1	-3.26732E1	-3.26178E1	2.68226E1	1.20017E-7	2.52428E-3	2.52428E-3	6.3074E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.36328E-2	-8.80013E1	-3.8147E-4	-8.80001E1	1.43051E-4	5.17368E-3	9.3317E-2	2.73173E1	-3.26658E1	-3.26272E1	2.67866E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.38649E-2	-8.8001E1	-2.14577E-4	-8.8E1	5.24521E-4	4.98295E-3	9.35555E-2	2.739E1	-3.26449E1	-3.26484E1	2.68157E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29098E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80007E1	-5.24521E-4	-8.79999E1	2.6226E-4	4.93526E-3	9.3317E-2	2.72603E1	-3.26294E1	-3.25941E1	2.68256E1	1.19851E-7	2.52276E-3	2.52276E-3	6.34518E-3	2.98665E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80012E1	-8.10623E-4	-8.79999E1	2.38419E-4	4.81606E-3	9.33886E-2	2.73027E1	-3.26554E1	-3.26358E1	2.67445E1	1.19831E-7	2.52821E-3	2.52821E-3	6.29703E-3	3.00247E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80009E1	-6.19888E-4	-8.80003E1	2.38419E-4	4.88758E-3	9.34839E-2	2.72721E1	-3.26526E1	-3.26183E1	2.68112E1	1.19913E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.32464E-2	-8.80008E1	-6.19888E-4	-8.80005E1	4.05312E-4	5.14984E-3	9.3627E-2	2.74001E1	-3.2695E1	-3.25779E1	2.67897E1	1.20017E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80008E1	-5.00679E-4	-8.80003E1	2.38419E-5	4.72069E-3	9.3174E-2	2.71649E1	-3.26724E1	-3.26729E1	2.67798E1	1.20276E-7	2.51783E-3	2.51783E-3	6.3074E-3	3.00247E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80008E1	-4.29153E-4	-8.80004E1	2.38419E-5	4.57764E-3	9.30786E-2	2.74192E1	-3.26602E1	-3.26162E1	2.68238E1	1.19972E-7	2.51352E-3	2.51352E-3	6.32075E-3	2.9926E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80009E1	-5.00679E-4	-8.80005E1	9.53674E-5	4.52995E-3	9.34839E-2	2.72932E1	-3.26604E1	-3.2673E1	2.67575E1					
