[Scan]
initial_time=2016-01-28T20:50:50
final_time=2016-01-28T20:51:09
ip_count=19
run=1026
dataset=7
scan=524
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.7874E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.07133E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.4172E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.7085E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.63025E-8
mult1=-1.03665E-8
mult2=-2.75454E-9
rf_tmon=-4.72872E-3
rf_agc=3.35799E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.05877E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66373E0
bslens_imon=2.52333E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19797E1
lens5a_imon=2.00686E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.04859E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.534E1
cs_ef1b_imon=3.18488E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02244E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05102E1
cs_ea1_imon=1.09661E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07861E0
lens1_imon=1.35893E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6441E1
os_ef1alow_imon=2.96432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03792E1
cs_ea2_imon=1.40592E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84622E1
cs_ef1a_imon=3.04757E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.12059E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.30355E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.46325E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.10451E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27853E0
cs_ionrep_imon=9.53857E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=1.96314E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.85852E-8
tplens_vset=1.4E-1
tplens_vmon=1.62281E0
tplens_imon=-2.41667E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26693E1
iondef3_imon=1.50938E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26657E1
iondef2_imon=1.57319E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02897E2
lens6_imon=2.98598E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.0961E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26291E0
ionrepsh_imon=8.41743E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33928E1
lens5b_imon=2.18603E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.14344E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41733E0
os_ea2_imon=-6.09372E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06123E2
lens4b_imon=2.00648E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71047E1
cs_ef2a_imon=3.18849E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07738E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.16751E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10913E1
os_restr2_imon=3.37337E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23045E2
cs_ionfoca_imon=6.30577E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01755E1
cs_anode2_imon=2.10369E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72546E1
iondef1_imon=1.08436E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68442E1
iondef4_imon=1.08017E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.74108E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.07343E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12894E0
cs_ionaccel_imon=-7.41837E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=2.22148E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86819E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.67842E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.83486E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.5198E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.30231E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.41291E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0784E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.5985E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31835E1
cs_fil1_imon=7.78553E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.95993E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62722E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18289E-2
os_fil2_imon=-2.53983E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16935E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.54137E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30688E-1
cs_fil2_imon=-2.11336E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.6648E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21742E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3016E-3
inlet_lpb_pmon=3.00363E-1
chamber_ion_pmon=1.1995E-7
chamber_cvt_pmon=2.5257E-3
foreline_cvt_pmon=2.5257E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.34064E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=179
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80011E1	-7.86781E-4	-8.80001E1	3.33786E-4	4.98295E-3	9.34839E-2	2.72833E1	-3.2626E1	-3.26089E1	2.68175E1	1.20174E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.01085E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.286E-2	-8.80013E1	-5.48363E-4	-8.80003E1	2.6226E-4	4.72069E-3	9.35316E-2	2.72789E1	-3.2679E1	-3.26085E1	2.68213E1	1.20158E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.201E-2	-8.80012E1	-4.05312E-4	-8.80005E1	9.53674E-5	4.86374E-3	9.36985E-2	2.7325E1	-3.26715E1	-3.26101E1	2.67474E1	1.20045E-7	2.51611E-3	2.51611E-3	6.29603E-3	2.99981E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.15461E-2	-8.80013E1	-6.67572E-4	-8.80004E1	-7.15256E-5	4.8399E-3	9.377E-2	2.73021E1	-3.26603E1	-3.26494E1	2.68322E1	1.19979E-7	2.51472E-3	2.51472E-3	6.3282E-3	2.99753E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.29374E-2	-8.80011E1	4.76837E-5	-8.80004E1	-1.66893E-4	4.86374E-3	9.35316E-2	2.73508E1	-3.26855E1	-3.25876E1	2.67716E1	1.20226E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80009E1	-2.86102E-4	-8.80004E1	0.0E0	5.07832E-3	9.34124E-2	2.73151E1	-3.26638E1	-3.26331E1	2.6771E1	1.2033E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80007E1	-2.86102E-4	-8.80004E1	2.38419E-4	4.79221E-3	9.34124E-2	2.73522E1	-3.26425E1	-3.26199E1	2.68514E1	1.20363E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.26282E-2	-8.80007E1	-3.33786E-4	-8.80005E1	-1.19209E-4	5.07832E-3	9.35078E-2	2.73009E1	-3.26428E1	-3.26567E1	2.67752E1	1.1966E-7	2.5147E-3	2.5147E-3	6.3074E-3	3.02277E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.80011E1	-7.39098E-4	-8.80003E1	1.19209E-4	5.22137E-3	9.35316E-2	2.73051E1	-3.2652E1	-3.26201E1	2.68227E1	1.19965E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.00824E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80011E1	-4.76837E-4	-8.80003E1	2.38419E-5	4.76837E-3	9.3627E-2	2.73004E1	-3.26543E1	-3.26189E1	2.67908E1	1.20004E-7	2.52276E-3	2.52276E-3	6.3074E-3	2.99175E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.10825E-2	-8.80013E1	-7.86781E-4	-8.8E1	7.15256E-5	4.64916E-3	9.35793E-2	2.72618E1	-3.26729E1	-3.26278E1	2.67541E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80011E1	-3.57628E-4	-8.80005E1	0.0E0	4.91142E-3	9.36747E-2	2.72943E1	-3.26368E1	-3.26314E1	2.68322E1	1.19913E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00302E-1
1.6E1	2.0E0	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80011E1	-6.67572E-4	-8.80007E1	0.0E0	4.74453E-3	9.38416E-2	2.73838E1	-3.26855E1	-3.26116E1	2.67782E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.22418E-2	-8.80012E1	-6.67572E-4	-8.80006E1	1.90735E-4	4.69685E-3	9.35793E-2	2.73511E1	-3.26809E1	-3.26307E1	2.68372E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02659E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-7.16233E-2	-8.80011E1	-7.39098E-4	-8.80005E1	9.53674E-5	4.673E-3	9.37223E-2	2.72967E1	-3.27077E1	-3.26068E1	2.67758E1	1.19749E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.31692E-2	-8.80009E1	-4.05312E-4	-8.80004E1	-2.38419E-5	4.52995E-3	9.38177E-2	2.72231E1	-3.26585E1	-3.26156E1	2.68188E1	1.20226E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.01871E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.39421E-2	-8.8001E1	-6.19888E-4	-8.80007E1	1.43051E-4	4.64916E-3	9.377E-2	2.73299E1	-3.26714E1	-3.25912E1	2.68041E1	1.20031E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.01209E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.80009E1	-1.04904E-3	-8.80003E1	4.52995E-4	4.95911E-3	9.377E-2	2.73129E1	-3.26668E1	-3.25986E1	2.67674E1	1.198E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80011E1	-7.62939E-4	-8.80001E1	1.90735E-4	4.91142E-3	9.36031E-2	2.72733E1	-3.26489E1	-3.26254E1	2.67946E1	1.19725E-7	2.52568E-3	2.52568E-3	6.32273E-3	3.00635E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80013E1	-7.62939E-4	-8.80003E1	1.19209E-4	4.72069E-3	9.36031E-2	2.72546E1	-3.26657E1	-3.26693E1	2.68442E1	1.1995E-7	2.5257E-3	2.5257E-3	6.3016E-3	3.00363E-1
