[Scan]
initial_time=2016-01-28T20:51:16
final_time=2016-01-28T20:51:36
ip_count=19
run=1026
dataset=7
scan=525
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.14689E-2
qbias_imon=-3.80807E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.07312E-10
ql2_vset=
ql2_vmon=-8.82149E-4
ql2_imon=1.44808E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.63668E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.63319E-8
mult1=-9.80059E-9
mult2=-2.7246E-9
rf_tmon=-4.91498E-3
rf_agc=3.2919E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=5.67472E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65472E0
bslens_imon=2.70719E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20043E1
lens5a_imon=1.98019E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12451E2
lens4a_imon=2.0514E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53436E1
cs_ef1b_imon=3.18272E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04625E2
lens23_imon=1.02341E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05222E1
cs_ea1_imon=1.09517E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08582E0
lens1_imon=1.48871E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64777E1
os_ef1alow_imon=2.99387E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03624E1
cs_ea2_imon=1.39655E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=3.03244E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.12139E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.31797E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1569E1
os_ea1_imon=2.47875E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63815E1
os_ef1bup_imon=3.09334E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21845E0
cs_ionrep_imon=9.56381E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91887E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01605E1
cs_anode1_imon=1.95557E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.86238E-8
tplens_vset=1.4E-1
tplens_vmon=1.6186E0
tplens_imon=-2.74111E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26326E1
iondef3_imon=1.49784E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26651E1
iondef2_imon=1.58977E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.9858E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=8.63099E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27613E0
ionrepsh_imon=8.57965E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.18279E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41492E0
os_ea2_imon=-6.56236E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00536E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71156E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06717E0
os_ef2alow_imon=-2.45372E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.07635E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10877E1
os_restr2_imon=3.36652E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.31082E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.09144E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73375E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68034E1
iondef4_imon=1.09747E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.8791E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.04842E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-8.49956E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47255E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56159E1
einzel_imon=7.78154E-6
window_vset=0.0E0
window_vmon=1.89112E-1
window_imon=-9.58075E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82613E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.86819E1
mask2_imon=-4.75143E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.63155E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.73392E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.1593E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48578E0
defgridb_imon=5.9192E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33158E1
os_fil1_imon=9.40732E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07996E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59782E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31776E1
cs_fil1_imon=7.21491E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.45537E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62642E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18289E-2
os_fil2_imon=-2.34762E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07325E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.73085E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27839E-1
cs_fil2_imon=-2.17943E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46658E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21659E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.95119E-1
chamber_ion_pmon=1.19544E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.68302E-1
res40_imon=-2.27713E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=214
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.8001E1	-6.91414E-4	-8.80005E1	9.53674E-5	5.07832E-3	9.34124E-2	2.7367E1	-3.26663E1	-3.26735E1	2.68472E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00824E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.23964E-2	-8.80009E1	-6.67572E-4	-8.80002E1	-2.38419E-5	5.4121E-3	9.38177E-2	2.72342E1	-3.26615E1	-3.25821E1	2.68225E1	1.19705E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.97963E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80009E1	-8.10623E-4	-8.80001E1	-4.76837E-5	5.14984E-3	9.35555E-2	2.74278E1	-3.26638E1	-3.26148E1	2.67966E1	1.20174E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.95385E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80006E1	-3.8147E-4	-8.80003E1	3.33786E-4	4.81606E-3	9.3317E-2	2.72985E1	-3.26819E1	-3.26597E1	2.68106E1	1.19902E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.96128E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.8001E1	-3.57628E-4	-8.80003E1	-2.38419E-5	4.95911E-3	9.34601E-2	2.73222E1	-3.26467E1	-3.2613E1	2.67288E1	1.19809E-7	2.52428E-3	2.52428E-3	6.31837E-3	2.96671E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80008E1	-1.66893E-4	-8.80005E1	9.53674E-5	4.88758E-3	9.36747E-2	2.72985E1	-3.26603E1	-3.26134E1	2.68683E1	1.20055E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.9714E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80009E1	-5.24521E-4	-8.80006E1	1.90735E-4	4.86374E-3	9.36508E-2	2.73564E1	-3.26838E1	-3.26189E1	2.67986E1	1.19965E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80008E1	-1.90735E-4	-8.80004E1	2.14577E-4	5.07832E-3	9.33647E-2	2.72889E1	-3.26326E1	-3.26543E1	2.6801E1	1.19953E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.99175E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80007E1	-2.6226E-4	-8.80005E1	1.90735E-4	5.126E-3	9.3317E-2	2.72805E1	-3.26657E1	-3.26044E1	2.67313E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02396E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80009E1	-2.14577E-4	-8.80005E1	3.8147E-4	5.07832E-3	9.34601E-2	2.7337E1	-3.26626E1	-3.26467E1	2.68511E1	1.19757E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80009E1	-1.66893E-4	-8.80003E1	1.66893E-4	4.8399E-3	9.32217E-2	2.72656E1	-3.26738E1	-3.26219E1	2.68689E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80008E1	-1.19209E-4	-8.80006E1	1.43051E-4	4.50611E-3	9.31978E-2	2.72919E1	-3.26627E1	-3.26104E1	2.68244E1	1.20055E-7	2.52384E-3	2.52384E-3	6.33436E-3	3.01738E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.19325E-2	-8.80011E1	-2.86102E-4	-8.80003E1	2.6226E-4	5.07832E-3	9.30548E-2	2.72984E1	-3.26487E1	-3.26731E1	2.67451E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.99E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.29374E-2	-8.80008E1	-3.57628E-4	-8.80004E1	3.09944E-4	5.07832E-3	9.32217E-2	2.73556E1	-3.26506E1	-3.26464E1	2.68064E1	1.20137E-7	2.51581E-3	2.51581E-3	6.33538E-3	3.0041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80011E1	-1.66893E-4	-8.80005E1	7.15256E-5	4.57764E-3	9.33886E-2	2.72739E1	-3.26885E1	-3.26026E1	2.67939E1	1.19861E-7	2.52099E-3	2.52099E-3	6.34037E-3	2.9978E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.27828E-2	-8.80008E1	-5.48363E-4	-8.80004E1	2.86102E-4	4.76837E-3	9.35793E-2	2.72696E1	-3.26657E1	-3.26224E1	2.68508E1	1.19705E-7	2.50789E-3	2.50789E-3	6.3074E-3	3.00824E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80008E1	-6.19888E-4	-8.80005E1	1.43051E-4	4.76837E-3	9.35078E-2	2.73435E1	-3.26633E1	-3.26278E1	2.67914E1	1.20174E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80011E1	-9.29832E-4	-8.80005E1	3.33786E-4	4.98295E-3	9.32932E-2	2.72379E1	-3.26644E1	-3.26254E1	2.6825E1	1.19861E-7	2.51116E-3	2.51116E-3	6.3074E-3	2.96671E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80011E1	-8.58307E-4	-8.80006E1	-2.38419E-5	4.91142E-3	9.35078E-2	2.72974E1	-3.26502E1	-3.26195E1	2.67549E1	1.20106E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.95119E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.14689E-2	-8.80013E1	-8.82149E-4	-8.80005E1	2.86102E-4	5.10216E-3	9.37939E-2	2.73375E1	-3.26651E1	-3.26326E1	2.68034E1	1.19544E-7	2.51739E-3	2.51739E-3	6.30202E-3	2.95119E-1
