[Scan]
initial_time=2016-01-28T20:53:03
final_time=2016-01-28T20:53:22
ip_count=19
run=1026
dataset=7
scan=529
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.75291E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.69348E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.42926E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.63223E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.63768E-8
mult1=-9.86583E-9
mult2=-2.76049E-9
rf_tmon=-5.01679E-3
rf_agc=3.27723E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=4.95815E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.58219E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1996E1
lens5a_imon=1.99678E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12421E2
lens4a_imon=2.04973E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53646E1
cs_ef1b_imon=3.17587E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02248E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05436E1
cs_ea1_imon=1.06874E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06958E0
lens1_imon=1.55576E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64422E1
os_ef1alow_imon=2.98342E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0359E1
cs_ea2_imon=1.42092E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84586E1
cs_ef1a_imon=3.05442E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.12297E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.32265E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15524E1
os_ea1_imon=2.46716E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63846E1
os_ef1bup_imon=3.10415E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22555E0
cs_ionrep_imon=9.62208E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91841E2
cs_nozzle_imon=1.93378E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01929E1
cs_anode1_imon=1.96422E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.86351E-8
tplens_vset=1.4E-1
tplens_vmon=1.62374E0
tplens_imon=-3.83833E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26443E1
iondef3_imon=1.51436E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26779E1
iondef2_imon=1.57417E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98247E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.23236E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26744E0
ionrepsh_imon=8.81863E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33669E1
lens5b_imon=2.17375E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74639E1
cs_ef2b_imon=3.13407E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4096E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06092E2
lens4b_imon=2.00555E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70969E1
cs_ef2a_imon=3.20038E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08039E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.17846E-1
os_ef2bup_imon=-5.34771E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10997E1
os_restr2_imon=3.36905E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.32052E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01683E1
cs_anode2_imon=2.09685E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72673E1
iondef1_imon=1.07264E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67451E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.81887E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81712E-1
olens1_imon=7.06536E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-8.67976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.87885E-6
window_vset=0.0E0
window_vmon=2.21547E-1
window_imon=-1.04097E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82603E2
mask1_imon=2.39372E-4
mask2_vset=0.0E0
mask2_vmon=-1.86801E1
mask2_imon=-5.86866E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9266E3
multa_neg_imon=7.50551E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93737E3
defgrida_imon=6.78347E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50114E3
multb_neg_imon=7.31084E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43508E0
defgridb_imon=6.30919E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.39591E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08194E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59903E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31796E1
cs_fil1_imon=6.94461E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.41333E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62529E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.4197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.72867E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28875E-1
cs_fil2_imon=-2.08333E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.77292E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21594E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.30771E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=174
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.22418E-2	-8.80011E1	-7.15256E-4	-8.80002E1	3.09944E-4	4.86374E-3	9.35078E-2	2.73297E1	-3.26573E1	-3.262E1	2.67728E1	1.19757E-7	2.51771E-3	2.51771E-3	6.28552E-3	3.00302E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80009E1	-5.72205E-4	-8.80002E1	1.19209E-4	4.55379E-3	9.34362E-2	2.72855E1	-3.26725E1	-3.26315E1	2.6813E1	1.19902E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80013E1	-6.91414E-4	-8.80004E1	-2.14577E-4	4.74453E-3	9.33647E-2	2.72981E1	-3.2681E1	-3.267E1	2.67763E1	1.19713E-7	2.52027E-3	2.52027E-3	6.32978E-3	2.99348E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80013E1	-7.15256E-4	-8.80004E1	2.86102E-4	4.52995E-3	9.35555E-2	2.73045E1	-3.26496E1	-3.2613E1	2.67541E1	1.19953E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.8001E1	-4.29153E-4	-8.80004E1	-2.38419E-5	4.55379E-3	9.34124E-2	2.73291E1	-3.26735E1	-3.25948E1	2.68611E1	1.20004E-7	2.52276E-3	2.52276E-3	6.32356E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30146E-2	-8.8001E1	-5.72205E-4	-8.80003E1	1.66893E-4	4.69685E-3	9.3627E-2	2.72845E1	-3.26478E1	-3.26673E1	2.68538E1	1.20004E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.99941E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.18554E-2	-8.80013E1	-4.52995E-4	-8.80005E1	2.38419E-5	4.57764E-3	9.34601E-2	2.73327E1	-3.26891E1	-3.26074E1	2.67578E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80017E1	-8.34465E-4	-8.80004E1	2.38419E-5	4.74453E-3	9.3627E-2	2.72979E1	-3.26428E1	-3.25924E1	2.68316E1	1.19861E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.10051E-2	-8.80012E1	-6.67572E-4	-8.80007E1	2.38419E-4	4.79221E-3	9.34124E-2	2.73153E1	-3.2644E1	-3.26705E1	2.67794E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.80012E1	-5.24521E-4	-8.80009E1	7.15256E-5	4.88758E-3	9.33647E-2	2.73033E1	-3.26773E1	-3.25936E1	2.68052E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.18554E-2	-8.80013E1	-5.96046E-4	-8.80007E1	1.90735E-4	4.45843E-3	9.35316E-2	2.7221E1	-3.26693E1	-3.26236E1	2.67601E1	1.20004E-7	2.52276E-3	2.52276E-3	6.33436E-3	3.0148E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.17779E-2	-8.80013E1	-7.86781E-4	-8.80003E1	1.43051E-4	4.29153E-3	9.33886E-2	2.73116E1	-3.26508E1	-3.26325E1	2.68352E1	1.19953E-7	2.5131E-3	2.5131E-3	6.30202E-3	2.99686E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.80017E1	-5.72205E-4	-8.80004E1	0.0E0	4.57764E-3	9.31978E-2	2.73015E1	-3.26374E1	-3.2584E1	2.68719E1	1.20487E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80015E1	-6.4373E-4	-8.80005E1	0.0E0	4.29153E-3	9.32693E-2	2.72561E1	-3.26297E1	-3.26015E1	2.67371E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80013E1	-6.19888E-4	-8.80001E1	2.14577E-4	4.57764E-3	9.35078E-2	2.72886E1	-3.26561E1	-3.26166E1	2.67682E1	1.20017E-7	2.51116E-3	2.51116E-3	6.31288E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.15461E-2	-8.80013E1	-6.91414E-4	-8.80003E1	4.52995E-4	4.98295E-3	9.36031E-2	2.73435E1	-3.26909E1	-3.26146E1	2.68617E1	1.19646E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.98665E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.80013E1	-7.39098E-4	-8.80005E1	2.38419E-4	4.8399E-3	9.35555E-2	2.73081E1	-3.26915E1	-3.26284E1	2.68376E1	1.19809E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80013E1	-4.52995E-4	-8.80007E1	2.14577E-4	4.91142E-3	9.36508E-2	2.72841E1	-3.26867E1	-3.26122E1	2.67836E1	1.19965E-7	2.52099E-3	2.52099E-3	6.28552E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80012E1	-5.72205E-4	-8.80003E1	2.6226E-4	5.03063E-3	9.36508E-2	2.73157E1	-3.26903E1	-3.26231E1	2.6849E1	1.19978E-7	2.51693E-3	2.51693E-3	6.34661E-3	3.02813E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80014E1	-5.72205E-4	-8.80004E1	0.0E0	4.95911E-3	9.34124E-2	2.72673E1	-3.26779E1	-3.26443E1	2.67451E1	1.20004E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00966E-1
