[Scan]
initial_time=2016-01-28T20:54:49
final_time=2016-01-28T20:55:09
ip_count=19
run=1026
dataset=7
scan=533
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.83453E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-5.9756E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.44876E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.6282E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.63628E-8
mult1=-1.00151E-8
mult2=-2.7748E-9
rf_tmon=-4.00127E-3
rf_agc=3.27958E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.68485E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65749E0
bslens_imon=2.46225E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19909E1
lens5a_imon=1.99052E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12447E2
lens4a_imon=2.04916E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=3.17731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0465E2
lens23_imon=1.02426E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04602E1
cs_ea1_imon=1.08917E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07695E0
lens1_imon=1.48157E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64458E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03807E1
cs_ea2_imon=1.42341E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.05514E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.12477E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11256E1
os_restr1_imon=4.31725E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15514E1
os_ea1_imon=2.47168E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63888E1
os_ef1bup_imon=3.09514E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24414E0
cs_ionrep_imon=9.67964E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93339E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02013E1
cs_anode1_imon=1.9498E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20527E0
olens4_imon=3.8754E-8
tplens_vset=1.4E-1
tplens_vmon=1.6396E0
tplens_imon=-2.33709E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2596E1
iondef3_imon=1.50605E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26376E1
iondef2_imon=1.58355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98544E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=8.78382E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2723E0
ionrepsh_imon=8.27657E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33395E1
lens5b_imon=2.19474E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.14776E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41861E0
os_ea2_imon=-7.47925E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00509E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71035E1
cs_ef2a_imon=3.1838E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10141E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01028E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10853E1
os_restr2_imon=3.36508E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2301E2
cs_ionfoca_imon=6.3261E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01461E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72843E1
iondef1_imon=1.10203E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68182E1
iondef4_imon=1.10287E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.78905E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.06043E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-9.68887E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02117E2
cs_ionfocb_imon=1.4746E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56201E1
einzel_imon=7.86083E-6
window_vset=0.0E0
window_vmon=1.95118E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.8674E1
mask2_imon=-6.66154E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92627E3
multa_neg_imon=7.81744E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93703E3
defgrida_imon=6.59435E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50104E3
multb_neg_imon=7.40975E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36371E0
defgridb_imon=6.21236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33204E1
os_fil1_imon=9.40624E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08332E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59799E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31801E1
cs_fil1_imon=7.56329E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.36527E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62773E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18557E-2
os_fil2_imon=-2.5098E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14533E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.64644E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28098E-1
cs_fil2_imon=-2.00524E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50262E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21744E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.41873E-1
res40_imon=-2.47174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.39421E-2	-8.80015E1	-1.90735E-4	-8.80001E1	1.66893E-4	5.05447E-3	9.32693E-2	2.72815E1	-3.26585E1	-3.25953E1	2.681E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31288E-3	2.9874E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80014E1	-5.00679E-4	-8.8E1	3.57628E-4	5.10216E-3	9.3627E-2	2.72763E1	-3.26747E1	-3.26368E1	2.68052E1	1.2026E-7	2.51954E-3	2.51954E-3	6.31278E-3	3.01995E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80012E1	-5.96046E-4	-8.80006E1	3.8147E-4	4.91142E-3	9.35316E-2	2.73248E1	-3.26532E1	-3.26318E1	2.6763E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80013E1	-6.67572E-4	-8.80005E1	0.0E0	4.88758E-3	9.38654E-2	2.72504E1	-3.26609E1	-3.26206E1	2.6819E1	1.19851E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.27828E-2	-8.80014E1	-6.91414E-4	-8.80004E1	1.90735E-4	4.673E-3	9.38654E-2	2.73724E1	-3.26777E1	-3.26014E1	2.67517E1	1.19851E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80014E1	-6.67572E-4	-8.80005E1	3.33786E-4	4.81606E-3	9.38416E-2	2.72564E1	-3.26795E1	-3.2626E1	2.68268E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.24736E-2	-8.80017E1	-5.96046E-4	-8.80004E1	3.8147E-4	4.95911E-3	9.34362E-2	2.73291E1	-3.26981E1	-3.26188E1	2.68472E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80016E1	-8.82149E-4	-8.80002E1	1.43051E-4	5.03063E-3	9.36031E-2	2.72877E1	-3.26813E1	-3.2608E1	2.68244E1	1.20278E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02922E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.31692E-2	-8.80014E1	-6.67572E-4	-8.80003E1	3.33786E-4	5.03063E-3	9.34601E-2	2.72945E1	-3.26425E1	-3.26107E1	2.68395E1	1.19965E-7	2.52647E-3	2.52647E-3	6.31288E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80015E1	-4.29153E-4	-8.80006E1	7.15256E-5	4.86374E-3	9.34124E-2	2.73082E1	-3.26346E1	-3.25911E1	2.68731E1	1.19965E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80019E1	-6.19888E-4	-8.80005E1	-2.38419E-4	4.81606E-3	9.36747E-2	2.72166E1	-3.26413E1	-3.26549E1	2.66622E1	1.19861E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80015E1	-5.96046E-4	-8.80003E1	3.33786E-4	4.76837E-3	9.36747E-2	2.73134E1	-3.26773E1	-3.26172E1	2.68388E1	1.19965E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80015E1	-9.05991E-4	-8.80004E1	3.33786E-4	4.64916E-3	9.33647E-2	2.72992E1	-3.2662E1	-3.26561E1	2.67897E1	1.1979E-7	2.51919E-3	2.51919E-3	6.29684E-3	2.99594E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.3401E-2	-8.80015E1	-4.76837E-4	-8.80004E1	1.90735E-4	4.91142E-3	9.36031E-2	2.72288E1	-3.26951E1	-3.27366E1	2.68502E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00302E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80014E1	-8.82149E-4	-8.8E1	9.53674E-5	4.72069E-3	9.3627E-2	2.73129E1	-3.26434E1	-3.26098E1	2.68232E1	1.19991E-7	2.51826E-3	2.51826E-3	6.31288E-3	3.00693E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.36328E-2	-8.80016E1	-9.77516E-4	-8.80002E1	3.09944E-4	5.29289E-3	9.37462E-2	2.73111E1	-3.26314E1	-3.26506E1	2.67848E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80016E1	-6.19888E-4	-8.80003E1	0.0E0	5.29289E-3	9.35555E-2	2.71995E1	-3.26372E1	-3.27015E1	2.68028E1	1.19902E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80014E1	-5.48363E-4	-8.80002E1	1.90735E-4	4.74453E-3	9.34601E-2	2.73297E1	-3.26741E1	-3.26801E1	2.68478E1	1.20226E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.99E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80014E1	-6.4373E-4	-8.80003E1	4.76837E-5	5.07832E-3	9.37462E-2	2.73039E1	-3.26632E1	-3.26054E1	2.68464E1	1.20363E-7	2.52169E-3	2.52169E-3	6.33436E-3	2.99941E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80013E1	-5.96046E-4	-8.80001E1	2.38419E-4	4.74453E-3	9.34601E-2	2.72843E1	-3.26376E1	-3.2596E1	2.68182E1	1.20004E-7	2.52169E-3	2.52169E-3	6.29128E-3	3.01223E-1
