[Scan]
initial_time=2016-01-28T20:55:16
final_time=2016-01-28T20:55:36
ip_count=19
run=1026
dataset=7
scan=534
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.79103E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.26326E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.44341E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.60441E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.63113E-8
mult1=-1.01618E-8
mult2=-2.81642E-9
rf_tmon=-4.10386E-3
rf_agc=3.35619E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=5.35643E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.70607E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19783E1
lens5a_imon=1.98616E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12458E2
lens4a_imon=2.05086E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53713E1
cs_ef1b_imon=3.17748E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02231E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04876E1
cs_ea1_imon=1.08219E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07725E0
lens1_imon=1.50267E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.98322E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03779E1
cs_ea2_imon=1.41808E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84533E1
cs_ef1a_imon=3.04681E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.12453E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11199E1
os_restr1_imon=4.30416E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15571E1
os_ea1_imon=2.46292E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63774E1
os_ef1bup_imon=3.09373E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21257E0
cs_ionrep_imon=9.40263E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93378E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01693E1
cs_anode1_imon=1.95246E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.86758E-8
tplens_vset=1.4E-1
tplens_vmon=1.63671E0
tplens_imon=-2.42257E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2638E1
iondef3_imon=1.49418E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26663E1
iondef2_imon=1.58408E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0292E2
lens6_imon=2.98569E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=8.44109E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2639E0
ionrepsh_imon=8.47885E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33687E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74872E1
cs_ef2b_imon=3.14342E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45266E0
os_ea2_imon=-7.44853E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71009E1
cs_ef2a_imon=3.19104E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08236E0
os_ef2alow_imon=-2.41125E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06498E-1
os_ef2bup_imon=-5.23663E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10787E1
os_restr2_imon=3.36758E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2305E2
cs_ionfoca_imon=6.32016E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01919E1
cs_anode2_imon=2.09946E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73652E1
iondef1_imon=1.10449E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68466E1
iondef4_imon=1.10554E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.81769E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.07288E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-9.6554E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47393E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56347E1
einzel_imon=7.65656E-6
window_vset=0.0E0
window_vmon=2.46067E-1
window_imon=-9.5859E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39164E-4
mask2_vset=0.0E0
mask2_vmon=-1.86721E1
mask2_imon=-5.20708E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.16573E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.35166E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50164E3
multb_neg_imon=7.0914E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=6.27733E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33218E1
os_fil1_imon=9.40393E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07694E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59914E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31722E1
cs_fil1_imon=7.75657E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.83014E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62766E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.9777E-2
os_fil2_imon=-2.32166E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03978E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50087E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29152E-1
cs_fil2_imon=-2.24636E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.54745E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21667E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.31607E-1
res40_imon=-2.43905E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=150
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80012E1	-3.57628E-4	-8.80002E1	1.90735E-4	5.14984E-3	9.35078E-2	2.72837E1	-3.26566E1	-3.26254E1	2.68076E1	1.20142E-7	2.52131E-3	2.52131E-3	6.32328E-3	2.98842E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80012E1	-2.86102E-4	-8.80006E1	3.8147E-4	4.8399E-3	9.35078E-2	2.72845E1	-3.2652E1	-3.2639E1	2.67103E1	1.20031E-7	2.50914E-3	2.50914E-3	6.34099E-3	2.99879E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.3401E-2	-8.80013E1	-2.6226E-4	-8.80007E1	4.05312E-4	4.45843E-3	9.39131E-2	2.73228E1	-3.26632E1	-3.26638E1	2.6866E1	1.20174E-7	2.51225E-3	2.51225E-3	6.29645E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.30918E-2	-8.80013E1	-4.05312E-4	-8.80008E1	2.38419E-4	4.95911E-3	9.37462E-2	2.73321E1	-3.26687E1	-3.2599E1	2.68346E1	1.19851E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80012E1	-5.48363E-4	-8.80005E1	4.05312E-4	4.93526E-3	9.38416E-2	2.73204E1	-3.26567E1	-3.26549E1	2.67868E1	1.20517E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.98665E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80011E1	-3.8147E-4	-8.80003E1	7.15256E-5	4.88758E-3	9.35793E-2	2.73129E1	-3.26518E1	-3.26032E1	2.68112E1	1.19902E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.97901E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.80016E1	-4.52995E-4	-8.80001E1	3.09944E-4	5.17368E-3	9.3627E-2	2.72757E1	-3.26707E1	-3.26229E1	2.67739E1	1.20084E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.99613E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.18554E-2	-8.80012E1	-6.91414E-4	-8.80003E1	1.90735E-4	5.14984E-3	9.37223E-2	2.72526E1	-3.26537E1	-3.26225E1	2.68849E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9978E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.80014E1	-7.86781E-4	-8.80003E1	-1.19209E-4	4.8399E-3	9.38892E-2	2.723E1	-3.26621E1	-3.26416E1	2.66779E1	1.20311E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80016E1	-2.86102E-4	-8.80006E1	2.86102E-4	4.81606E-3	9.34839E-2	2.73532E1	-3.26585E1	-3.2644E1	2.69397E1	1.19965E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80012E1	-5.00679E-4	-8.80006E1	0.0E0	4.57764E-3	9.35316E-2	2.73225E1	-3.26843E1	-3.26074E1	2.68484E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27053E-2	-8.80014E1	-5.72205E-4	-8.80006E1	9.53674E-5	4.93526E-3	9.39131E-2	2.72732E1	-3.2649E1	-3.2636E1	2.66688E1	1.20174E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80015E1	-6.19888E-4	-8.80004E1	-1.66893E-4	4.74453E-3	9.3627E-2	2.72941E1	-3.26432E1	-3.26578E1	2.6849E1	1.20148E-7	2.51935E-3	2.51935E-3	6.32936E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80014E1	-4.52995E-4	-8.80005E1	9.53674E-5	4.91142E-3	9.36985E-2	2.71982E1	-3.25755E1	-3.27155E1	2.66839E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80015E1	-4.76837E-5	-8.80007E1	7.15256E-5	4.79221E-3	9.35078E-2	2.72997E1	-3.26452E1	-3.26146E1	2.69121E1	1.20208E-7	2.51456E-3	2.51456E-3	6.32957E-3	3.01278E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80015E1	-2.38419E-4	-8.80006E1	4.76837E-5	4.72069E-3	9.35555E-2	2.73129E1	-3.26554E1	-3.26134E1	2.67283E1					
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80013E1	-5.72205E-4	-8.80002E1	-1.43051E-4	4.72069E-3	9.36747E-2	2.71591E1	-3.25617E1	-3.26633E1	2.68869E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80011E1	-5.96046E-4	-8.8E1	2.38419E-5	4.88758E-3	9.34839E-2	2.73219E1	-3.2637E1	-3.26573E1	2.67445E1	1.19953E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.0071E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.80013E1	-5.72205E-4	-8.80003E1	2.86102E-4	4.95911E-3	9.35078E-2	2.73069E1	-3.26741E1	-3.26356E1	2.67373E1	1.19851E-7	2.52061E-3	2.52061E-3	6.30202E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80014E1	-6.19888E-4	-8.80003E1	-4.76837E-5	4.86374E-3	9.36747E-2	2.73652E1	-3.26663E1	-3.2638E1	2.68466E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.00966E-1
