[Scan]
initial_time=2016-01-28T20:58:50
final_time=2016-01-28T20:59:09
ip_count=19
run=1026
dataset=7
scan=542
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.79389E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.00004E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.43548E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-1.5923E-9
ql4_vset=
ql4_vmon=1.66893E-4
ql4_imon=1.63002E-8
mult1=-9.21564E-9
mult2=-2.76245E-9
rf_tmon=-4.59206E-3
rf_agc=3.33268E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.28204E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.51494E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19913E1
lens5a_imon=1.98227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53718E1
cs_ef1b_imon=3.18777E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02156E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05006E1
cs_ea1_imon=1.09317E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04481E0
lens1_imon=1.44958E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64392E1
os_ef1alow_imon=2.96973E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0385E1
cs_ea2_imon=1.3972E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8437E1
cs_ef1a_imon=3.04577E-5
olens2_vset=9.7E-1
olens2_vmon=9.69839E-1
olens2_imon=1.13651E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11304E1
os_restr1_imon=4.29743E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15034E1
os_ea1_imon=2.45301E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.10487E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22319E0
cs_ionrep_imon=9.55483E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93491E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01821E1
cs_anode1_imon=1.96314E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.8756E-8
tplens_vset=1.4E-1
tplens_vmon=1.6373E0
tplens_imon=-2.06863E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25871E1
iondef3_imon=1.50303E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26738E1
iondef2_imon=1.58196E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.9848E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=7.94363E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28926E0
ionrepsh_imon=8.40806E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34183E1
lens5b_imon=2.18861E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42966E0
os_ea2_imon=-7.20077E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00552E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.47174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.06434E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.36544E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.31273E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.08603E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72744E1
iondef1_imon=1.11051E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68551E1
iondef4_imon=1.1072E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.85725E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.11056E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08449E0
cs_ionaccel_imon=-9.40055E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47468E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.98121E-1
window_imon=-8.78788E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8261E2
mask1_imon=2.3916E-4
mask2_vset=0.0E0
mask2_vmon=-1.8671E1
mask2_imon=-6.40926E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92587E3
multa_neg_imon=7.43118E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.54279E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.40995E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48528E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33213E1
os_fil1_imon=9.39729E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0799E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60258E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31765E1
cs_fil1_imon=7.50322E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.03744E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63015E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.93972E-2
os_fil2_imon=-2.40168E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.34901E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-1.89712E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21789E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.97394E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.14262E-1
res40_imon=-2.21946E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80014E1	-2.86102E-4	-8.80005E1	9.53674E-5	4.86374E-3	9.39846E-2	2.72967E1	-3.26699E1	-3.26224E1	2.66692E1	1.19757E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80012E1	-7.39098E-4	-8.80005E1	-1.66893E-4	4.8399E-3	9.36031E-2	2.73267E1	-3.26627E1	-3.26404E1	2.68818E1	1.19749E-7	2.52384E-3	2.52384E-3	6.29128E-3	3.00197E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80011E1	-4.76837E-4	-8.80006E1	1.43051E-4	4.64916E-3	9.35555E-2	2.73375E1	-3.26655E1	-3.26242E1	2.68233E1	1.20011E-7	2.51647E-3	2.51647E-3	6.32644E-3	3.00249E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.8001E1	-8.34465E-4	-8.80004E1	1.19209E-4	4.50611E-3	9.36747E-2	2.7285E1	-3.26649E1	-3.26337E1	2.67523E1					
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.8001E1	-5.96046E-4	-8.80007E1	1.90735E-4	4.673E-3	9.37939E-2	2.73201E1	-3.26711E1	-3.26188E1	2.66454E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80011E1	-5.96046E-4	-8.80005E1	1.43051E-4	4.55379E-3	9.35078E-2	2.72744E1	-3.26307E1	-3.2629E1	2.68511E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.34782E-2	-8.80013E1	-5.96046E-4	-8.80003E1	2.86102E-4	4.41074E-3	9.35793E-2	2.73147E1	-3.26416E1	-3.25846E1	2.67451E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31278E-3	3.00966E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80016E1	-7.39098E-4	-8.80005E1	-9.53674E-5	4.91142E-3	9.37223E-2	2.73075E1	-3.26487E1	-3.26376E1	2.68328E1	1.20174E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80012E1	-1.12057E-3	-8.80004E1	-1.43051E-4	4.36306E-3	9.35555E-2	2.73086E1	-3.2675E1	-3.26502E1	2.67235E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.01609E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80012E1	-9.53674E-4	-8.80002E1	1.19209E-4	4.29153E-3	9.34839E-2	2.72679E1	-3.26673E1	-3.26296E1	2.68761E1	1.20017E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80012E1	-6.19888E-4	-8.80004E1	2.6226E-4	4.52995E-3	9.39369E-2	2.72528E1	-3.2641E1	-3.2638E1	2.67998E1	1.20004E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99686E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.8001E1	-7.15256E-4	-8.80006E1	7.15256E-5	4.41074E-3	9.37462E-2	2.72745E1	-3.26272E1	-3.26428E1	2.6786E1	1.20174E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.99E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80012E1	-6.91414E-4	-8.80003E1	2.6226E-4	4.76837E-3	9.39369E-2	2.72803E1	-3.26903E1	-3.26531E1	2.68655E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01085E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80011E1	-6.4373E-4	-8.80005E1	1.66893E-4	4.33922E-3	9.37462E-2	2.72907E1	-3.26266E1	-3.26374E1	2.66682E1	1.20158E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.99941E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.37103E-2	-8.80012E1	-6.67572E-4	-8.80009E1	2.38419E-5	4.72069E-3	9.38177E-2	2.73021E1	-3.26621E1	-3.25948E1	2.68767E1	1.19861E-7	2.5199E-3	2.5199E-3	6.34037E-3	3.02396E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80012E1	-5.00679E-4	-8.80004E1	2.86102E-4	4.64916E-3	9.38416E-2	2.73189E1	-3.26452E1	-3.2626E1	2.70587E1	1.19809E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.02922E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.34782E-2	-8.80011E1	-5.72205E-4	-8.80004E1	2.14577E-4	4.8399E-3	9.37939E-2	2.73057E1	-3.26621E1	-3.2614E1	2.69494E1	1.19913E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80014E1	-5.72205E-4	-8.80006E1	2.14577E-4	5.14984E-3	9.34839E-2	2.72937E1	-3.26549E1	-3.2608E1	2.66905E1	1.19902E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.97901E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80012E1	-6.19888E-4	-8.80005E1	3.33786E-4	4.86374E-3	9.33409E-2	2.73139E1	-3.26673E1	-3.26071E1	2.67968E1	1.19809E-7	2.51443E-3	2.51443E-3	6.32936E-3	2.95385E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80014E1	-5.72205E-4	-8.80007E1	1.66893E-4	4.74453E-3	9.34839E-2	2.72744E1	-3.26738E1	-3.25871E1	2.68551E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.97394E-1
