[Scan]
initial_time=2016-01-28T21:00:10
final_time=2016-01-28T21:00:29
ip_count=19
run=1026
dataset=7
scan=545
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.24736E-2
qbias_imon=-3.80511E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.2753E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.45383E-9
ql3_vset=
ql3_vmon=-8.80001E1
ql3_imon=-1.46995E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.63595E-8
mult1=-9.5572E-9
mult2=-2.8336E-9
rf_tmon=-6.05354E-3
rf_agc=3.14084E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.95911E-3
ql5_imon=5.39231E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64775E0
bslens_imon=2.83362E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19903E1
lens5a_imon=2.00339E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05093E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53725E1
cs_ef1b_imon=3.17887E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.0226E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05087E1
cs_ea1_imon=1.07663E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05161E0
lens1_imon=1.46399E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64701E1
os_ef1alow_imon=2.97418E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04154E1
cs_ea2_imon=1.39922E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84307E1
cs_ef1a_imon=3.03882E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.13173E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11228E1
os_restr1_imon=4.31493E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14929E1
os_ea1_imon=2.46955E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63612E1
os_ef1bup_imon=3.08678E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24399E0
cs_ionrep_imon=9.45579E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93611E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01908E1
cs_anode1_imon=1.96879E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.8734E-8
tplens_vset=1.4E-1
tplens_vmon=1.62463E0
tplens_imon=-1.69825E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26202E1
iondef3_imon=1.48891E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26411E1
iondef2_imon=1.55252E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98586E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=8.35645E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25268E0
ionrepsh_imon=8.38164E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33507E1
lens5b_imon=2.19423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74872E1
cs_ef2b_imon=3.13925E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4711E0
os_ea2_imon=-6.11303E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00668E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71263E1
cs_ef2a_imon=3.19521E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06035E0
os_ef2alow_imon=-2.4599E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77538E-1
os_ef2bup_imon=-5.18102E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10869E1
os_restr2_imon=3.36932E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2302E2
cs_ionfoca_imon=6.30102E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01688E1
cs_anode2_imon=2.09077E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72796E1
iondef1_imon=1.0881E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68041E1
iondef4_imon=1.08677E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.87872E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.12245E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11972E0
cs_ionaccel_imon=-9.41213E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47351E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56133E1
einzel_imon=7.68089E-6
window_vset=0.0E0
window_vmon=2.17686E-1
window_imon=-9.23837E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39202E-4
mask2_vset=0.0E0
mask2_vmon=-1.86738E1
mask2_imon=-5.41559E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92649E3
multa_neg_imon=7.5404E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.4593E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50103E3
multb_neg_imon=6.86949E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3949E0
defgridb_imon=6.1673E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33193E1
os_fil1_imon=9.39304E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08586E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60002E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31795E1
cs_fil1_imon=7.5886E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.01429E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63118E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07833E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12087E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.46058E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28903E-1
cs_fil2_imon=-2.26374E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25785E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21772E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20174E-7
chamber_cvt_pmon=2.50789E-3
foreline_cvt_pmon=2.50789E-3
chamber_tmon=1.40038E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.46087E-1
res40_imon=-2.35217E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=234
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.25507E-2	-8.80012E1	-1.12057E-3	-8.80004E1	-4.76837E-5	4.36306E-3	9.35793E-2	2.72654E1	-3.26609E1	-3.26128E1	2.68472E1	1.20243E-7	2.51393E-3	2.51393E-3	6.32858E-3	3.00097E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.31692E-2	-8.80014E1	-7.39098E-4	-8.80002E1	5.24521E-4	4.673E-3	9.37223E-2	2.73057E1	-3.26774E1	-3.26113E1	2.6774E1	1.20174E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80015E1	-5.72205E-4	-8.80004E1	4.76837E-5	4.95911E-3	9.36985E-2	2.73322E1	-3.26502E1	-3.26248E1	2.6843E1	1.19819E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00676E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.27053E-2	-8.80014E1	-6.91414E-4	-8.80002E1	1.90735E-4	4.95911E-3	9.408E-2	2.72803E1	-3.26779E1	-3.26242E1	2.677E1	1.20158E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80016E1	-9.29832E-4	-8.80002E1	9.53674E-5	4.72069E-3	9.39131E-2	2.73069E1	-3.26687E1	-3.26326E1	2.67842E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.01085E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80014E1	-7.15256E-4	-8.80004E1	4.76837E-5	4.29153E-3	9.33409E-2	2.72868E1	-3.26278E1	-3.2629E1	2.69019E1	1.19953E-7	2.52276E-3	2.52276E-3	6.31817E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.15461E-2	-8.80014E1	-9.05991E-4	-8.80004E1	4.52995E-4	4.48227E-3	9.36985E-2	2.73117E1	-3.26597E1	-3.26218E1	2.67644E1	1.19882E-7	2.51484E-3	2.51484E-3	6.31283E-3	3.00249E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17779E-2	-8.80014E1	-8.82149E-4	-8.80003E1	3.8147E-4	4.45843E-3	9.377E-2	2.73177E1	-3.26374E1	-3.25918E1	2.6786E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80013E1	-9.53674E-4	-8.80002E1	2.86102E-4	4.86374E-3	9.37939E-2	2.72576E1	-3.26711E1	-3.26248E1	2.68298E1	1.20278E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.18554E-2	-8.80016E1	-4.76837E-4	-8.80002E1	0.0E0	4.76837E-3	9.38416E-2	2.72666E1	-3.26512E1	-3.26194E1	2.68136E1	1.20031E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.00942E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80016E1	-2.6226E-4	-8.79998E1	2.14577E-4	4.88758E-3	9.37223E-2	2.73363E1	-3.26524E1	-3.26585E1	2.68046E1	1.19953E-7	2.51203E-3	2.51203E-3	6.33977E-3	3.00966E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.30146E-2	-8.80017E1	-6.19888E-4	-8.79998E1	2.38419E-4	4.48227E-3	9.35555E-2	2.72632E1	-3.26897E1	-3.26461E1	2.68308E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02659E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80018E1	-1.09673E-3	-8.80001E1	7.15256E-5	4.62532E-3	9.35078E-2	2.73243E1	-3.26344E1	-3.26356E1	2.67884E1	1.20106E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.00197E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80014E1	-1.0252E-3	-8.80006E1	9.53674E-5	4.8399E-3	9.34601E-2	2.73159E1	-3.26494E1	-3.26494E1	2.68677E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9926E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80014E1	-6.91414E-4	-8.80004E1	7.15256E-5	5.126E-3	9.35316E-2	2.73119E1	-3.26373E1	-3.26305E1	2.67413E1	1.20226E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9952E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.22418E-2	-8.80012E1	-3.57628E-4	-8.80003E1	3.8147E-4	4.81606E-3	9.35555E-2	2.73309E1	-3.26266E1	-3.26288E1	2.68201E1	1.19827E-7	2.51718E-3	2.51718E-3	6.32001E-3	3.00407E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.16233E-2	-8.80012E1	-5.48363E-4	-8.80004E1	-2.38419E-5	5.17368E-3	9.36508E-2	2.71371E1	-3.26375E1	-3.26527E1	2.66399E1	1.19991E-7	2.51596E-3	2.51596E-3	6.34698E-3	3.02554E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.18554E-2	-8.80012E1	-6.67572E-4	-8.80003E1	1.90735E-4	5.03063E-3	9.34839E-2	2.73063E1	-3.26655E1	-3.26531E1	2.68267E1	1.20116E-7	2.51065E-3	2.51065E-3	6.3074E-3	3.01193E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.24736E-2	-8.80012E1	-7.62939E-4	-8.80004E1	9.53674E-5	4.72069E-3	9.37462E-2	2.72931E1	-3.26927E1	-3.25954E1	2.67776E1	1.20004E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.24736E-2	-8.80014E1	-4.05312E-4	-8.80001E1	0.0E0	4.95911E-3	9.38177E-2	2.72796E1	-3.26411E1	-3.26202E1	2.68041E1	1.20174E-7	2.50789E-3	2.50789E-3	6.33486E-3	3.00824E-1
