[Scan]
initial_time=2016-01-28T21:00:36
final_time=2016-01-28T21:00:56
ip_count=19
run=1026
dataset=7
scan=546
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.73994E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-5.60451E-10
ql2_vset=
ql2_vmon=-7.62939E-4
ql2_imon=1.45811E-9
ql3_vset=
ql3_vmon=-8.8E1
ql3_imon=-1.64738E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.63424E-8
mult1=-1.02113E-8
mult2=-2.75243E-9
rf_tmon=-3.67682E-3
rf_agc=3.43935E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.41878E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6483E0
bslens_imon=2.56877E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19835E1
lens5a_imon=1.96811E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.05221E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53655E1
cs_ef1b_imon=3.18462E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04552E2
lens23_imon=1.02334E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05331E1
cs_ea1_imon=1.08146E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05124E0
lens1_imon=1.45953E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64577E1
os_ef1alow_imon=2.97541E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03868E1
cs_ea2_imon=1.40542E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84388E1
cs_ef1a_imon=3.04577E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.13585E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11242E1
os_restr1_imon=4.3059E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14932E1
os_ea1_imon=2.48417E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63567E1
os_ef1bup_imon=3.09966E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26924E0
cs_ionrep_imon=9.46661E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=1.96379E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.8849E-8
tplens_vset=1.4E-1
tplens_vmon=1.63654E0
tplens_imon=-3.2186E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26205E1
iondef3_imon=1.52111E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26425E1
iondef2_imon=1.56335E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98511E-4
ql6_vset=1.0E-1
ql6_vmon=9.34124E-2
ql6_imon=8.61561E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2925E0
ionrepsh_imon=8.52633E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33437E1
lens5b_imon=2.20172E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74626E1
cs_ef2b_imon=3.13933E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45227E0
os_ea2_imon=-7.62616E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00704E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71177E1
cs_ef2a_imon=3.20408E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08263E0
os_ef2alow_imon=-2.51818E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92642E-1
os_ef2bup_imon=-5.20909E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11049E1
os_restr2_imon=3.36426E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.30075E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01984E1
cs_anode2_imon=2.10264E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72659E1
iondef1_imon=1.11525E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.0884E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.87395E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.11607E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12141E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56112E1
einzel_imon=7.85626E-6
window_vset=0.0E0
window_vmon=2.18844E-1
window_imon=-9.53778E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39234E-4
mask2_vset=0.0E0
mask2_vmon=-1.86762E1
mask2_imon=-5.08411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92648E3
multa_neg_imon=7.22977E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.67882E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.36567E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37904E0
defgridb_imon=6.13522E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33208E1
os_fil1_imon=9.38066E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08327E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60156E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31795E1
cs_fil1_imon=7.32395E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.7691E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63325E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.21185E-2
os_fil2_imon=-2.4629E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18414E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.37196E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.35062E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.67265E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21855E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30202E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.50454E-1
res40_imon=-2.28614E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=204
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.11597E-2	-8.80013E1	-6.4373E-4	-8.80004E1	9.53674E-5	4.48227E-3	9.3627E-2	2.73411E1	-3.26419E1	-3.26478E1	2.6818E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.01609E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.11597E-2	-8.80015E1	-4.29153E-4	-8.79999E1	3.09944E-4	4.86374E-3	9.377E-2	2.73351E1	-3.26915E1	-3.26266E1	2.68052E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80016E1	-5.48363E-4	-8.80004E1	1.19209E-4	4.74453E-3	9.38416E-2	2.72773E1	-3.26782E1	-3.26283E1	2.68024E1	1.19757E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00824E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.21643E-2	-8.80012E1	-3.8147E-4	-8.80007E1	-4.76837E-5	4.55379E-3	9.377E-2	2.73351E1	-3.26567E1	-3.25942E1	2.68076E1	1.20243E-7	2.51498E-3	2.51498E-3	6.3074E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.80012E1	-4.76837E-5	-8.80003E1	2.38419E-4	4.64916E-3	9.38654E-2	2.72883E1	-3.26663E1	-3.25846E1	2.68352E1	1.20122E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9926E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.80012E1	-5.00679E-4	-8.80007E1	1.90735E-4	4.93526E-3	9.35793E-2	2.72769E1	-3.2632E1	-3.26458E1	2.6774E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.17779E-2	-8.80013E1	-8.10623E-4	-8.80003E1	-1.66893E-4	4.88758E-3	9.36031E-2	2.7242E1	-3.26573E1	-3.26071E1	2.67896E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80012E1	-9.05991E-4	-8.80005E1	-1.19209E-4	4.93526E-3	9.38177E-2	2.72276E1	-3.26446E1	-3.25846E1	2.69079E1	1.20122E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.80014E1	-1.00136E-3	-8.80001E1	-4.76837E-5	4.72069E-3	9.36031E-2	2.73369E1	-3.26621E1	-3.26529E1	2.66947E1	1.19902E-7	2.52492E-3	2.52492E-3	6.30202E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80012E1	-1.14441E-3	-8.80005E1	0.0E0	4.74453E-3	9.36031E-2	2.73034E1	-3.26659E1	-3.26311E1	2.67864E1	1.20137E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.01209E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80011E1	-1.07288E-3	-8.80004E1	-3.33786E-4	4.93526E-3	9.34362E-2	2.72793E1	-3.26777E1	-3.26271E1	2.68322E1	1.19979E-7	2.51783E-3	2.51783E-3	6.29185E-3	2.99506E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80013E1	-6.91414E-4	-8.80002E1	0.0E0	4.69685E-3	9.38177E-2	2.73252E1	-3.26552E1	-3.26176E1	2.67926E1	1.20099E-7	2.52324E-3	2.52324E-3	6.31744E-3	3.01969E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.286E-2	-8.80011E1	-2.6226E-4	-8.80001E1	4.76837E-5	4.55379E-3	9.37462E-2	2.7251E1	-3.27017E1	-3.26314E1	2.67962E1	1.19963E-7	2.51675E-3	2.51675E-3	6.33112E-3	3.03027E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.13143E-2	-8.80013E1	-4.29153E-4	-8.8E1	5.00679E-4	4.76837E-3	9.37939E-2	2.73604E1	-3.2653E1	-3.26308E1	2.67902E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01609E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80013E1	-3.8147E-4	-8.8E1	2.38419E-5	4.673E-3	9.35793E-2	2.72855E1	-3.26875E1	-3.26238E1	2.68127E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00824E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80015E1	-5.24521E-4	-8.79999E1	3.57628E-4	4.74453E-3	9.34839E-2	2.73538E1	-3.2651E1	-3.26135E1	2.68126E1	1.20016E-7	2.5165E-3	2.5165E-3	6.31251E-3	2.97972E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.80014E1	-4.76837E-4	-8.79999E1	4.76837E-5	5.14984E-3	9.35555E-2	2.72854E1	-3.2622E1	-3.2637E1	2.67561E1	1.20045E-7	2.51725E-3	2.51725E-3	6.27901E-3	3.00251E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80012E1	-4.29153E-4	-8.8E1	4.76837E-5	4.91142E-3	9.35793E-2	2.72898E1	-3.26689E1	-3.2634E1	2.67876E1	1.19902E-7	2.51203E-3	2.51203E-3	6.31278E-3	2.98665E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80013E1	-6.4373E-4	-8.80004E1	-9.53674E-5	4.86374E-3	9.35793E-2	2.72848E1	-3.26747E1	-3.26486E1	2.68331E1	1.19705E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.98481E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.80011E1	-7.62939E-4	-8.8E1	2.6226E-4	4.74453E-3	9.34124E-2	2.72659E1	-3.26425E1	-3.26205E1	2.68022E1	1.20055E-7	2.51096E-3	2.51096E-3	6.30202E-3	2.9841E-1
