[Scan]
initial_time=2016-01-28T21:01:03
final_time=2016-01-28T21:01:23
ip_count=19
run=1026
dataset=7
scan=547
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.79496E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-5.89621E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.45142E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.57937E-9
ql4_vset=
ql4_vmon=3.8147E-4
ql4_imon=1.63382E-8
mult1=-9.60794E-9
mult2=-2.71661E-9
rf_tmon=-4.61457E-3
rf_agc=3.31593E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.35345E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64601E0
bslens_imon=2.76062E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20037E1
lens5a_imon=1.99261E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12445E2
lens4a_imon=2.05076E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5332E1
cs_ef1b_imon=3.19764E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04598E2
lens23_imon=1.02118E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04525E1
cs_ea1_imon=1.08532E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09507E0
lens1_imon=1.44661E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64875E1
os_ef1alow_imon=2.96375E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03992E1
cs_ea2_imon=1.40826E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=3.05828E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.1378E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11396E1
os_restr1_imon=4.29895E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15363E1
os_ea1_imon=2.46433E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.10033E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22371E0
cs_ionrep_imon=9.54964E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.9351E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01798E1
cs_anode1_imon=1.95176E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20542E0
olens4_imon=3.88738E-8
tplens_vset=1.4E-1
tplens_vmon=1.61652E0
tplens_imon=-1.52444E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2614E1
iondef3_imon=1.51359E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.58172E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98523E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.7086E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26484E0
ionrepsh_imon=8.58326E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33762E1
lens5b_imon=2.17963E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74727E1
cs_ef2b_imon=3.1396E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44039E0
os_ea2_imon=-5.20922E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71026E1
cs_ef2a_imon=3.19451E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07599E0
os_ef2alow_imon=-2.37997E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.81592E-1
os_ef2bup_imon=-5.26095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10932E1
os_restr2_imon=3.36654E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.2892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01641E1
cs_anode2_imon=2.10224E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72606E1
iondef1_imon=1.08636E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67529E1
iondef4_imon=1.09615E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.88076E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.13317E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13535E0
cs_ionaccel_imon=-8.47382E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47445E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56365E1
einzel_imon=7.68436E-6
window_vset=0.0E0
window_vmon=2.22319E-1
window_imon=-8.89085E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82618E2
mask1_imon=2.39157E-4
mask2_vset=0.0E0
mask2_vmon=-1.86883E1
mask2_imon=-4.89431E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.52302E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.55663E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50093E3
multb_neg_imon=7.67945E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3746E0
defgridb_imon=6.1673E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33184E1
os_fil1_imon=9.39738E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07978E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60109E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31742E1
cs_fil1_imon=7.5191E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.96915E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63469E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.14051E-2
os_fil2_imon=-2.42592E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0977E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.33132E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28528E-1
cs_fil2_imon=-2.1479E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38528E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21773E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=2.99175E-1
chamber_ion_pmon=1.2026E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.39513E-1
res40_imon=-2.24443E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.29374E-2	-8.80013E1	-9.53674E-4	-8.80006E1	1.19209E-4	5.00679E-3	9.35555E-2	2.72745E1	-3.26422E1	-3.25882E1	2.6804E1	1.20055E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01995E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80013E1	-6.4373E-4	-8.80003E1	1.19209E-4	5.14984E-3	9.33647E-2	2.73002E1	-3.26848E1	-3.26009E1	2.67553E1	1.20004E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.03027E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80013E1	-7.86781E-4	-8.80003E1	1.19209E-4	5.05447E-3	9.33647E-2	2.72874E1	-3.2685E1	-3.26012E1	2.68094E1	1.2035E-7	2.51581E-3	2.51581E-3	6.34661E-3	3.02277E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80017E1	-4.29153E-4	-8.80006E1	-1.19209E-4	4.93526E-3	9.34601E-2	2.72952E1	-3.26683E1	-3.26017E1	2.68204E1	1.19953E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80015E1	-5.00679E-4	-8.80007E1	-2.38419E-5	4.76837E-3	9.36747E-2	2.73182E1	-3.26553E1	-3.26204E1	2.6782E1	1.19953E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.11597E-2	-8.80016E1	-7.15256E-4	-8.80004E1	3.57628E-4	4.74453E-3	9.34362E-2	2.73269E1	-3.26555E1	-3.26366E1	2.68112E1	1.19819E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00676E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.10825E-2	-8.80018E1	-7.15256E-4	-8.80003E1	-1.43051E-4	4.98295E-3	9.35316E-2	2.72919E1	-3.26747E1	-3.25809E1	2.68184E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.13143E-2	-8.80015E1	-7.39098E-4	-8.80003E1	9.53674E-5	5.22137E-3	9.35793E-2	2.72709E1	-3.26224E1	-3.26194E1	2.68508E1	1.19902E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80014E1	-5.72205E-4	-8.80004E1	-4.76837E-5	5.07832E-3	9.35793E-2	2.72913E1	-3.26687E1	-3.2599E1	2.68117E1	1.19913E-7	2.52428E-3	2.52428E-3	6.28552E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80016E1	-3.57628E-4	-8.80006E1	-1.43051E-4	4.93526E-3	9.38416E-2	2.73123E1	-3.26825E1	-3.26284E1	2.67672E1	1.19913E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.00563E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.21643E-2	-8.80013E1	-5.96046E-4	-8.80004E1	4.76837E-5	5.126E-3	9.31025E-2	2.72644E1	-3.2649E1	-3.26697E1	2.68621E1	1.20122E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80014E1	-1.00136E-3	-8.80004E1	4.76837E-5	5.05447E-3	9.3317E-2	2.72304E1	-3.26578E1	-3.2626E1	2.67674E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80014E1	-9.29832E-4	-8.80002E1	-1.90735E-4	5.17368E-3	9.35078E-2	2.73538E1	-3.26302E1	-3.26482E1	2.68154E1	1.20122E-7	2.51771E-3	2.51771E-3	6.30192E-3	2.98481E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80016E1	-9.05991E-4	-8.80001E1	-2.38419E-5	5.36442E-3	9.34124E-2	2.72933E1	-3.26638E1	-3.26178E1	2.67926E1	1.20122E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.98481E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80017E1	-8.34465E-4	-8.80002E1	4.76837E-5	5.4121E-3	9.34124E-2	2.73327E1	-3.26549E1	-3.26098E1	2.67986E1	1.20158E-7	2.51632E-3	2.51632E-3	6.34518E-3	2.9892E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80017E1	-7.15256E-4	-8.80002E1	1.66893E-4	5.00679E-3	9.34601E-2	2.72492E1	-3.26549E1	-3.2617E1	2.67884E1	1.20226E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.17779E-2	-8.80014E1	-8.34465E-4	-8.80003E1	3.33786E-4	5.14984E-3	9.3627E-2	2.73163E1	-3.26402E1	-3.25959E1	2.68262E1	1.20226E-7	2.5199E-3	2.5199E-3	6.34037E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.26282E-2	-8.80018E1	-1.09673E-3	-8.80003E1	3.09944E-4	4.98295E-3	9.35793E-2	2.73116E1	-3.26549E1	-3.26172E1	2.67868E1	1.19861E-7	2.51443E-3	2.51443E-3	6.29098E-3	3.01347E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.8002E1	-7.15256E-4	-8.80005E1	4.76837E-5	4.88758E-3	9.36985E-2	2.72865E1	-3.26633E1	-3.2623E1	2.68424E1	1.20004E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.9892E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80015E1	-9.05991E-4	-8.80006E1	3.8147E-4	5.03063E-3	9.36985E-2	2.72606E1	-3.26729E1	-3.2614E1	2.67529E1	1.2026E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99175E-1
