[Scan]
initial_time=2016-01-28T21:01:56
final_time=2016-01-28T21:02:16
ip_count=19
run=1026
dataset=7
scan=549
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.31692E-2
qbias_imon=-3.79711E-6
ql1_vset=
ql1_vmon=-8.80013E1
ql1_imon=-6.1301E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.45842E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.63192E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.63668E-8
mult1=-9.57029E-9
mult2=-2.75853E-9
rf_tmon=-4.62156E-3
rf_agc=3.29552E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.79221E-3
ql5_imon=5.64969E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66238E0
bslens_imon=2.62754E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19982E1
lens5a_imon=1.98097E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53832E1
cs_ef1b_imon=3.18092E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.02077E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04823E1
cs_ea1_imon=1.08403E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08246E0
lens1_imon=1.49993E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64789E1
os_ef1alow_imon=2.96792E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03788E1
cs_ea2_imon=1.37934E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84442E1
cs_ef1a_imon=3.04253E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.11937E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11298E1
os_restr1_imon=4.29959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14877E1
os_ea1_imon=2.48637E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63551E1
os_ef1bup_imon=3.09623E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25761E0
cs_ionrep_imon=9.54741E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93435E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02025E1
cs_anode1_imon=1.96638E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.87364E-8
tplens_vset=1.4E-1
tplens_vmon=1.61327E0
tplens_imon=-1.71268E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2613E1
iondef3_imon=1.4932E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26555E1
iondef2_imon=1.58502E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02946E2
lens6_imon=2.98357E-4
ql6_vset=1.0E-1
ql6_vmon=9.31978E-2
ql6_imon=8.41761E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.34209E0
ionrepsh_imon=8.95974E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33615E1
lens5b_imon=2.19547E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.14091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42228E0
os_ea2_imon=-5.71622E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0607E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.19461E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.5222E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.78803E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.37085E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.28716E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02001E1
cs_anode2_imon=2.09396E-5
iondef1_vset=2.763E1
iondef1_vmon=2.71423E1
iondef1_imon=1.09174E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67758E1
iondef4_imon=1.09638E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.78713E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82285E-1
olens1_imon=7.06763E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0965E0
cs_ionaccel_imon=-8.93203E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47259E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56021E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=2.29956E-1
window_imon=-9.83303E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39192E-4
mask2_vset=0.0E0
mask2_vmon=-1.86584E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92631E3
multa_neg_imon=7.59707E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.59802E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.05347E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.41274E0
defgridb_imon=6.10217E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33178E1
os_fil1_imon=9.39405E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08398E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59739E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31747E1
cs_fil1_imon=7.08276E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.3893E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61358E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.15929E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.68452E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29263E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21728E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34037E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-5.19668E-1
res40_imon=-2.30956E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80016E1	-4.76837E-4	-8.80006E1	-4.29153E-4	4.64916E-3	9.35078E-2	2.71915E1	-3.26434E1	-3.26344E1	2.67583E1	1.19809E-7	2.51116E-3	2.51116E-3	6.32936E-3	2.9978E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.286E-2	-8.80015E1	-6.67572E-4	-8.80005E1	-2.14577E-4	4.93526E-3	9.36747E-2	2.74123E1	-3.26782E1	-3.26133E1	2.67897E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00302E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80013E1	-6.67572E-4	-8.80004E1	-3.33786E-4	5.126E-3	9.35793E-2	2.72266E1	-3.26579E1	-3.2649E1	2.68268E1	1.19941E-7	2.51709E-3	2.51709E-3	6.33919E-3	3.01104E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80015E1	-4.29153E-4	-8.80004E1	-1.43051E-4	4.93526E-3	9.35078E-2	2.74235E1	-3.26615E1	-3.25888E1	2.6798E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.201E-2	-8.80015E1	-3.09944E-4	-8.80003E1	7.15256E-5	4.64916E-3	9.35078E-2	2.72841E1	-3.26777E1	-3.26032E1	2.67938E1	1.19653E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80016E1	-6.67572E-4	-8.80004E1	-1.90735E-4	4.52995E-3	9.35316E-2	2.71855E1	-3.26651E1	-3.26152E1	2.68154E1	1.19757E-7	2.51662E-3	2.51662E-3	6.29645E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80016E1	-5.00679E-4	-8.80003E1	0.0E0	4.673E-3	9.38892E-2	2.73856E1	-3.26567E1	-3.26368E1	2.68383E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.21643E-2	-8.80012E1	-4.76837E-4	-8.80006E1	0.0E0	4.86374E-3	9.38654E-2	2.72443E1	-3.26378E1	-3.26301E1	2.67698E1	1.19913E-7	2.51771E-3	2.51771E-3	6.29645E-3	2.99E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.16233E-2	-8.80012E1	-7.15256E-4	-8.80003E1	2.38419E-5	4.76837E-3	9.37939E-2	2.74054E1	-3.26639E1	-3.2641E1	2.68004E1	1.20004E-7	2.51954E-3	2.51954E-3	6.35601E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.80013E1	-6.91414E-4	-8.80006E1	9.53674E-5	4.43459E-3	9.36985E-2	2.72258E1	-3.26993E1	-3.26494E1	2.68022E1	1.19965E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.23964E-2	-8.80012E1	-6.67572E-4	-8.80005E1	-9.53674E-5	4.86374E-3	9.36985E-2	2.73629E1	-3.26667E1	-3.26042E1	2.67842E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.8001E1	-5.96046E-4	-8.80005E1	-5.24521E-4	4.64916E-3	9.36747E-2	2.70906E1	-3.26591E1	-3.26518E1	2.67842E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.03027E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.35556E-2	-8.80014E1	-5.24521E-4	-8.80004E1	-1.66893E-4	4.76837E-3	9.36747E-2	2.73914E1	-3.2656E1	-3.26083E1	2.68094E1	1.20137E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.03618E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.21643E-2	-8.80013E1	-5.48363E-4	-8.80005E1	-7.15256E-5	4.86374E-3	9.38892E-2	2.74243E1	-3.26561E1	-3.26201E1	2.67897E1	1.20017E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.03185E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80014E1	-4.76837E-4	-8.80004E1	-7.15256E-5	4.45843E-3	9.34839E-2	2.72288E1	-3.2638E1	-3.26188E1	2.68294E1	1.19697E-7	2.51203E-3	2.51203E-3	6.31817E-3	3.02511E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80013E1	-6.67572E-4	-8.80001E1	-3.8147E-4	4.79221E-3	9.35793E-2	2.73508E1	-3.26536E1	-3.2602E1	2.67439E1	1.20017E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.03185E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.30918E-2	-8.80013E1	-4.52995E-4	-8.80007E1	7.15256E-5	4.62532E-3	9.35793E-2	2.73287E1	-3.26272E1	-3.26366E1	2.68094E1	1.20017E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.38649E-2	-8.80014E1	-6.4373E-4	-8.80003E1	4.52995E-4	4.79221E-3	9.35555E-2	2.7379E1	-3.26543E1	-3.26038E1	2.68112E1	1.19913E-7	2.50789E-3	2.50789E-3	6.34588E-3	3.01871E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37874E-2	-8.80015E1	-5.96046E-4	-8.80004E1	2.38419E-5	4.31538E-3	9.34124E-2	2.71885E1	-3.26398E1	-3.26506E1	2.67391E1	1.20414E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.02511E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.31692E-2	-8.80013E1	-6.67572E-4	-8.80005E1	1.19209E-4	4.79221E-3	9.31978E-2	2.71423E1	-3.26555E1	-3.2613E1	2.67758E1	1.19861E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.01871E-1
