[Scan]
initial_time=2016-01-28T21:02:23
final_time=2016-01-28T21:02:43
ip_count=19
run=1026
dataset=7
scan=550
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.82675E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.91218E-10
ql2_vset=
ql2_vmon=-9.05991E-4
ql2_imon=1.45674E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.67511E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.63842E-8
mult1=-1.03063E-8
mult2=-2.86233E-9
rf_tmon=-4.17596E-3
rf_agc=3.367E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.32401E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67875E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19773E1
lens5a_imon=1.99208E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05226E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53658E1
cs_ef1b_imon=3.17984E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04632E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0509E1
cs_ea1_imon=1.08364E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04136E0
lens1_imon=1.56081E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.97946E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03816E1
cs_ea2_imon=1.38609E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84502E1
cs_ef1a_imon=3.04253E-5
olens2_vset=9.7E-1
olens2_vmon=9.70101E-1
olens2_imon=1.12227E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11334E1
os_restr1_imon=4.31617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1551E1
os_ea1_imon=2.47695E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.08613E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22626E0
cs_ionrep_imon=9.38716E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91855E2
cs_nozzle_imon=1.93398E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01767E1
cs_anode1_imon=1.95845E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.87427E-8
tplens_vset=1.4E-1
tplens_vmon=1.65345E0
tplens_imon=-1.29913E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25803E1
iondef3_imon=1.51515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26524E1
iondef2_imon=1.58941E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98418E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=8.87811E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24429E0
ionrepsh_imon=8.51477E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33646E1
lens5b_imon=2.19072E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.13226E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43835E0
os_ea2_imon=-4.54359E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06108E2
lens4b_imon=2.00403E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71282E1
cs_ef2a_imon=3.20218E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10441E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92619E-1
os_ef2bup_imon=-5.20715E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11141E1
os_restr2_imon=3.36076E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23079E2
cs_ionfoca_imon=6.30938E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.09865E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7394E1
iondef1_imon=1.10022E-5
iondef4_vset=2.691E1
iondef4_vmon=2.69211E1
iondef4_imon=1.09422E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=5.82896E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.06604E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11753E0
cs_ionaccel_imon=-7.45441E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47406E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.78875E-6
window_vset=0.0E0
window_vmon=2.28154E-1
window_imon=-9.11223E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39275E-4
mask2_vset=0.0E0
mask2_vmon=-1.86921E1
mask2_imon=-4.24688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92642E3
multa_neg_imon=7.57027E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.53204E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.24943E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33185E1
os_fil1_imon=9.41285E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08536E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59865E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3176E1
cs_fil1_imon=7.98375E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.65359E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61235E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00233E-2
os_fil2_imon=-2.35362E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.22942E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.69734E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.26933E-1
cs_fil2_imon=-2.04128E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37047E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21661E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.20517E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40091E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.27457E-1
res40_imon=-2.42129E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.37103E-2	-8.80014E1	-1.43051E-4	-8.80006E1	-1.90735E-4	4.3869E-3	9.33409E-2	2.73126E1	-3.26648E1	-3.26376E1	2.67827E1	1.19913E-7	2.52647E-3	2.52647E-3	6.33486E-3	3.01085E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80017E1	-3.33786E-4	-8.80006E1	2.86102E-4	4.64916E-3	9.35078E-2	2.73092E1	-3.26544E1	-3.26115E1	2.67879E1	1.19846E-7	2.51405E-3	2.51405E-3	6.31007E-3	3.00909E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80016E1	-5.48363E-4	-8.80006E1	7.15256E-5	4.45843E-3	9.33886E-2	2.7248E1	-3.26567E1	-3.26128E1	2.68058E1					
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.23964E-2	-8.80015E1	-5.24521E-4	-8.80008E1	2.6226E-4	4.33922E-3	9.33409E-2	2.73423E1	-3.2659E1	-3.25918E1	2.68198E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.98156E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80015E1	-4.05312E-4	-8.80007E1	1.19209E-4	4.74453E-3	9.35555E-2	2.73452E1	-3.26726E1	-3.26313E1	2.6852E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.97394E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80015E1	-5.72205E-4	-8.80001E1	-1.66893E-4	4.673E-3	9.35316E-2	2.72727E1	-3.26518E1	-3.26326E1	2.6795E1	1.20055E-7	2.52061E-3	2.52061E-3	6.31278E-3	2.97901E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.30918E-2	-8.80015E1	-5.24521E-4	-8.8E1	-1.43051E-4	4.76837E-3	9.377E-2	2.73187E1	-3.26502E1	-3.26083E1	2.67854E1	1.19913E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.99E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.80012E1	-5.24521E-4	-8.80002E1	2.38419E-5	4.41074E-3	9.39369E-2	2.72561E1	-3.26713E1	-3.26321E1	2.68166E1	1.19953E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.99941E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.40192E-2	-8.80014E1	-5.24521E-4	-8.80002E1	1.66893E-4	4.48227E-3	9.35555E-2	2.73934E1	-3.26939E1	-3.26392E1	2.67938E1	1.20403E-7	2.5147E-3	2.5147E-3	6.27954E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.80014E1	-6.4373E-4	-8.80004E1	-2.14577E-4	4.86374E-3	9.36508E-2	2.71741E1	-3.26561E1	-3.26284E1	2.67728E1	1.20017E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80013E1	-5.24521E-4	-8.80004E1	2.38419E-4	4.57764E-3	9.35078E-2	2.73676E1	-3.26938E1	-3.26372E1	2.67962E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80013E1	-6.67572E-4	-8.8E1	1.66893E-4	4.673E-3	9.32217E-2	2.73174E1	-3.26741E1	-3.26344E1	2.6839E1	1.20069E-7	2.52209E-3	2.52209E-3	6.3074E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.37103E-2	-8.80015E1	-6.19888E-4	-8.80003E1	1.19209E-4	4.8399E-3	9.32932E-2	2.7277E1	-3.26634E1	-3.26578E1	2.68186E1	1.19947E-7	2.51299E-3	2.51299E-3	6.31007E-3	3.0002E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80013E1	-3.8147E-4	-8.80002E1	2.38419E-4	4.93526E-3	9.34124E-2	2.73756E1	-3.26522E1	-3.2616E1	2.67788E1					
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80016E1	-4.05312E-4	-8.80004E1	0.0E0	4.93526E-3	9.32932E-2	2.71789E1	-3.26602E1	-3.26284E1	2.67692E1	1.20534E-7	2.51498E-3	2.51498E-3	6.29035E-3	3.01065E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.8002E1	-6.4373E-4	-8.80002E1	7.15256E-5	4.72069E-3	9.35793E-2	2.71994E1	-3.26651E1	-3.26518E1	2.68052E1	1.20311E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.36328E-2	-8.80016E1	-8.34465E-4	-8.80002E1	3.09944E-4	4.55379E-3	9.36985E-2	2.72668E1	-3.26779E1	-3.259E1	2.68202E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.201E-2	-8.80013E1	-1.0252E-3	-8.80002E1	2.6226E-4	4.48227E-3	9.377E-2	2.74938E1	-3.26506E1	-3.26356E1	2.6781E1	1.19749E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80017E1	-8.10623E-4	-8.80006E1	2.6226E-4	4.36306E-3	9.35793E-2	2.73257E1	-3.26685E1	-3.2603E1	2.6771E1	1.20122E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02659E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80018E1	-9.05991E-4	-8.80004E1	0.0E0	4.8399E-3	9.38416E-2	2.7394E1	-3.26524E1	-3.25803E1	2.69211E1	1.20517E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.01738E-1
