[Scan]
initial_time=2016-01-28T21:03:43
final_time=2016-01-28T21:04:03
ip_count=19
run=1026
dataset=7
scan=553
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.85974E-6
ql1_vset=
ql1_vmon=-8.80012E1
ql1_imon=-5.7956E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.4241E-9
ql3_vset=
ql3_vmon=-8.80003E1
ql3_imon=-1.60211E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.62916E-8
mult1=-9.87283E-9
mult2=-2.79247E-9
rf_tmon=-4.98107E-3
rf_agc=3.28409E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.69685E-3
ql5_imon=5.09429E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67565E0
bslens_imon=2.52556E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20102E1
lens5a_imon=1.98828E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12459E2
lens4a_imon=2.04962E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53766E1
cs_ef1b_imon=3.19281E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.02294E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05065E1
cs_ea1_imon=1.07476E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07253E0
lens1_imon=1.58054E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64843E1
os_ef1alow_imon=2.96756E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03472E1
cs_ea2_imon=1.38694E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84022E1
cs_ef1a_imon=3.04937E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.12509E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=4.29418E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15306E1
os_ea1_imon=2.47743E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.12001E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.19429E0
cs_ionrep_imon=9.44864E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=1.96134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20549E0
olens4_imon=3.87103E-8
tplens_vset=1.4E-1
tplens_vmon=1.68037E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26212E1
iondef3_imon=1.51152E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26957E1
iondef2_imon=1.56674E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98456E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=8.45432E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24738E0
ionrepsh_imon=8.47531E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33404E1
lens5b_imon=2.18826E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74772E1
cs_ef2b_imon=3.15641E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44205E0
os_ea2_imon=-7.48392E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00754E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70891E1
cs_ef2a_imon=3.16578E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09841E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.22652E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10883E1
os_restr2_imon=3.36292E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.29468E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.09072E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72558E1
iondef1_imon=1.10768E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68082E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.82051E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.08701E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-8.24728E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02118E2
cs_ionfocb_imon=1.47226E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55865E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=2.3356E-1
window_imon=-1.03015E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39416E-4
mask2_vset=0.0E0
mask2_vmon=-1.86801E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.37101E-5
defgrida_vset=2.902E3
defgrida_vmon=2.937E3
defgrida_imon=6.37998E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.14803E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.46461E0
defgridb_imon=6.13222E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33171E1
os_fil1_imon=9.39555E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07431E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59874E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31709E1
cs_fil1_imon=6.69233E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=1.04284E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6121E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.52181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16935E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62616E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3004E-1
cs_fil2_imon=-2.16141E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56269E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21237E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.61695E-1
res40_imon=-2.26271E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=218
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.27053E-2	-8.80013E1	-7.15256E-4	-8.8E1	2.86102E-4	4.93526E-3	9.35078E-2	2.72534E1	-3.26705E1	-3.26434E1	2.68194E1	1.19953E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.99941E-1
2.0E0	1.0E0	0.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80013E1	-6.67572E-4	-8.80002E1	2.38419E-5	4.81606E-3	9.34124E-2	2.74588E1	-3.26444E1	-3.26015E1	2.6837E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.80013E1	-7.15256E-4	-8.80003E1	9.53674E-5	4.86374E-3	9.35793E-2	2.72298E1	-3.26556E1	-3.26243E1	2.67167E1	1.19978E-7	2.51581E-3	2.51581E-3	6.32418E-3	2.99879E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80013E1	-7.15256E-4	-8.80001E1	-4.76837E-5	4.74453E-3	9.38416E-2	2.7318E1	-3.26768E1	-3.26456E1	2.68375E1	1.19941E-7	2.52025E-3	2.52025E-3	6.30212E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80014E1	-7.15256E-4	-8.80003E1	3.33786E-4	4.98295E-3	9.34839E-2	2.73051E1	-3.26807E1	-3.25996E1	2.67836E1	1.19819E-7	2.52362E-3	2.52362E-3	6.30182E-3	3.01742E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.24736E-2	-8.80015E1	-6.91414E-4	-8.80005E1	3.09944E-4	4.93526E-3	9.36031E-2	2.72845E1	-3.2662E1	-3.26018E1	2.67984E1	1.20069E-7	2.5188E-3	2.5188E-3	6.29098E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80013E1	-6.67572E-4	-8.80004E1	2.86102E-4	5.17368E-3	9.37223E-2	2.72678E1	-3.265E1	-3.2599E1	2.68532E1	1.20209E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.9943E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23189E-2	-8.80011E1	-7.62939E-4	-8.80003E1	2.86102E-4	4.93526E-3	9.34601E-2	2.72902E1	-3.26627E1	-3.26074E1	2.67395E1	1.19757E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.98481E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.26282E-2	-8.80011E1	-8.82149E-4	-8.80006E1	4.29153E-4	4.64916E-3	9.35793E-2	2.72465E1	-3.26755E1	-3.26141E1	2.68122E1	1.20164E-7	2.52345E-3	2.52345E-3	6.33171E-3	2.99413E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80013E1	-6.67572E-4	-8.80007E1	3.09944E-4	4.8399E-3	9.377E-2	2.73674E1	-3.26585E1	-3.26204E1	2.68095E1	1.19871E-7	2.51534E-3	2.51534E-3	6.31101E-3	3.01609E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.24736E-2	-8.80014E1	-6.4373E-4	-8.80007E1	9.53674E-5	4.52995E-3	9.36747E-2	2.72817E1	-3.2735E1	-3.26052E1	2.69001E1	1.19935E-7	2.51852E-3	2.51852E-3	6.31036E-3	3.01043E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.18554E-2	-8.80016E1	-7.86781E-4	-8.80005E1	2.14577E-4	4.79221E-3	9.35555E-2	2.734E1	-3.2648E1	-3.26542E1	2.68016E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.23964E-2	-8.80016E1	-6.4373E-4	-8.80005E1	2.6226E-4	4.69685E-3	9.36031E-2	2.73021E1	-3.26669E1	-3.2596E1	2.68142E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.9926E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.201E-2	-8.80014E1	-6.67572E-4	-8.80006E1	3.57628E-4	4.95911E-3	9.33886E-2	2.73315E1	-3.27113E1	-3.26284E1	2.6846E1	1.19945E-7	2.51898E-3	2.51898E-3	6.31294E-3	3.01014E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.24736E-2	-8.80014E1	-6.67572E-4	-8.80005E1	4.29153E-4	5.03063E-3	9.37223E-2	2.73423E1	-3.26703E1	-3.26278E1	2.67781E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80016E1	-5.00679E-4	-8.80009E1	1.19209E-4	4.72069E-3	9.377E-2	2.73586E1	-3.26615E1	-3.26194E1	2.67477E1	1.19953E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.00453E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80014E1	-6.91414E-4	-8.80007E1	1.90735E-4	5.17368E-3	9.34124E-2	2.7221E1	-3.26248E1	-3.26693E1	2.68466E1	1.19965E-7	2.51225E-3	2.51225E-3	6.28552E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80014E1	-8.82149E-4	-8.80005E1	3.8147E-4	4.95911E-3	9.3317E-2	2.739E1	-3.26496E1	-3.25912E1	2.68047E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.30918E-2	-8.80012E1	-7.86781E-4	-8.80005E1	1.90735E-4	4.91142E-3	9.36985E-2	2.72514E1	-3.26596E1	-3.26225E1	2.67445E1	1.20209E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80012E1	-4.05312E-4	-8.80003E1	9.53674E-5	4.69685E-3	9.38892E-2	2.72558E1	-3.26957E1	-3.26212E1	2.68082E1	1.20158E-7	2.51847E-3	2.51847E-3	6.31817E-3	3.00966E-1
