[Scan]
initial_time=2016-01-28T21:04:10
final_time=2016-01-28T21:04:30
ip_count=19
run=1026
dataset=7
scan=554
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37103E-2
qbias_imon=-3.8274E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.08003E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.45055E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.52825E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.63843E-8
mult1=-9.24672E-9
mult2=-2.79047E-9
rf_tmon=-4.16995E-3
rf_agc=3.33456E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=5.4003E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63908E0
bslens_imon=2.58219E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19889E1
lens5a_imon=2.00102E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12452E2
lens4a_imon=2.04941E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53616E1
cs_ef1b_imon=3.19065E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04623E2
lens23_imon=1.02514E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04846E1
cs_ea1_imon=1.07264E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08315E0
lens1_imon=1.58408E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.38552E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84478E1
cs_ef1a_imon=3.04937E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.12215E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.30283E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15176E1
os_ea1_imon=2.48097E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.10199E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25623E0
cs_ionrep_imon=9.64685E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93417E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01923E1
cs_anode1_imon=1.95881E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.86741E-8
tplens_vset=1.4E-1
tplens_vmon=1.65677E0
tplens_imon=-2.13941E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26194E1
iondef3_imon=1.50905E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26927E1
iondef2_imon=1.57311E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02902E2
lens6_imon=2.98413E-4
ql6_vset=1.0E-1
ql6_vmon=9.33886E-2
ql6_imon=8.48174E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.21847E0
ionrepsh_imon=8.6629E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33681E1
lens5b_imon=2.18614E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74363E1
cs_ef2b_imon=3.14776E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.3978E0
os_ea2_imon=-6.45749E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00626E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71378E1
cs_ef2a_imon=3.18632E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.33479E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.13868E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10841E1
os_restr2_imon=3.37049E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.32406E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01923E1
cs_anode2_imon=2.10153E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72811E1
iondef1_imon=1.08786E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68227E1
iondef4_imon=1.10684E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.80399E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.05442E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12954E0
cs_ionaccel_imon=-1.00132E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56393E1
einzel_imon=7.79596E-6
window_vset=0.0E0
window_vmon=2.25752E-1
window_imon=-8.10312E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86783E1
mask2_imon=-5.43619E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.76035E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.46138E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.06662E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57978E0
defgridb_imon=6.16407E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33214E1
os_fil1_imon=9.40967E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08098E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59772E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31761E1
cs_fil1_imon=7.58131E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.95993E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61063E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.18031E-2
os_fil2_imon=-2.35963E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.78056E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28616E-1
cs_fil2_imon=-2.1494E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.69483E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2173E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30192E-3
inlet_lpb_pmon=3.02922E-1
chamber_ion_pmon=1.19965E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.53596E-1
res40_imon=-2.2519E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80015E1	-7.15256E-4	-8.80006E1	-1.19209E-4	4.88758E-3	9.35316E-2	2.73063E1	-3.2672E1	-3.26054E1	2.68424E1	1.19902E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01738E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.30918E-2	-8.80015E1	-8.34465E-4	-8.80005E1	1.19209E-4	5.00679E-3	9.35078E-2	2.72377E1	-3.26472E1	-3.26416E1	2.67866E1	1.19861E-7	2.51662E-3	2.51662E-3	6.33486E-3	2.98481E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.29374E-2	-8.80013E1	-7.39098E-4	-8.80002E1	3.57628E-4	5.29289E-3	9.31978E-2	2.72969E1	-3.26354E1	-3.26348E1	2.68383E1	1.19713E-7	2.51248E-3	2.51248E-3	6.33538E-3	2.99879E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.31692E-2	-8.80013E1	-6.4373E-4	-8.80003E1	-1.19209E-4	5.17368E-3	9.33886E-2	2.73207E1	-3.26604E1	-3.26286E1	2.68232E1	1.20078E-7	2.51575E-3	2.51575E-3	6.30221E-3	3.00989E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.26282E-2	-8.80014E1	-5.24521E-4	-8.80002E1	-3.09944E-4	4.93526E-3	9.3627E-2	2.72727E1	-3.26661E1	-3.26319E1	2.67705E1	1.20045E-7	2.52407E-3	2.52407E-3	6.3074E-3	2.99981E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.3401E-2	-8.80012E1	-7.62939E-4	-8.80002E1	-4.76837E-5	4.93526E-3	9.34601E-2	2.72732E1	-3.26702E1	-3.26182E1	2.68175E1	1.19953E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.27053E-2	-8.80016E1	-7.39098E-4	-8.80002E1	7.15256E-5	4.88758E-3	9.33409E-2	2.73135E1	-3.26442E1	-3.26007E1	2.68163E1	1.20226E-7	2.52301E-3	2.52301E-3	6.3282E-3	3.00494E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80015E1	-9.29832E-4	-8.80005E1	3.8147E-4	4.95911E-3	9.33647E-2	2.73871E1	-3.26484E1	-3.26225E1	2.68346E1	1.2006E-7	2.52106E-3	2.52106E-3	6.32483E-3	3.00363E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.33239E-2	-8.80015E1	-6.67572E-4	-8.80003E1	2.38419E-4	4.91142E-3	9.34124E-2	2.73279E1	-3.2632E1	-3.2602E1	2.67662E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.80011E1	-1.00136E-3	-8.80003E1	2.6226E-4	5.03063E-3	9.36747E-2	2.73128E1	-3.26826E1	-3.26537E1	2.68018E1	1.20226E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00824E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.32464E-2	-8.80012E1	-9.05991E-4	-8.8E1	1.19209E-4	4.86374E-3	9.3627E-2	2.73796E1	-3.26741E1	-3.262E1	2.67896E1	1.20004E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01995E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80012E1	-1.00136E-3	-8.80002E1	1.19209E-4	5.07832E-3	9.36031E-2	2.72125E1	-3.26703E1	-3.2613E1	2.6828E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.03185E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80011E1	-1.14441E-3	-8.80002E1	4.76837E-4	4.98295E-3	9.38416E-2	2.72979E1	-3.26567E1	-3.26194E1	2.6813E1	1.20278E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80012E1	-1.12057E-3	-8.80003E1	4.29153E-4	4.95911E-3	9.34124E-2	2.73772E1	-3.26849E1	-3.26446E1	2.6783E1	1.20106E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80011E1	-1.16825E-3	-8.80004E1	5.96046E-4	5.00679E-3	9.35316E-2	2.72402E1	-3.26803E1	-3.26077E1	2.68082E1	1.19913E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-7.41738E-2	-8.80012E1	-9.77516E-4	-8.80004E1	6.19888E-4	4.8399E-3	9.36508E-2	2.72696E1	-3.26505E1	-3.26689E1	2.68286E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01871E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.33239E-2	-8.80013E1	-1.0252E-3	-8.80001E1	4.05312E-4	5.05447E-3	9.36031E-2	2.72449E1	-3.26738E1	-3.26301E1	2.67806E1	1.19757E-7	2.52757E-3	2.52757E-3	6.32386E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80016E1	-9.29832E-4	-8.80003E1	4.52995E-4	5.03063E-3	9.36031E-2	2.7383E1	-3.26579E1	-3.2603E1	2.67995E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02396E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80018E1	-8.82149E-4	-8.80002E1	2.86102E-4	4.8399E-3	9.33886E-2	2.72862E1	-3.26449E1	-3.26396E1	2.68046E1	1.20042E-7	2.51814E-3	2.51814E-3	6.32328E-3	3.02875E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37103E-2	-8.80019E1	-4.76837E-4	-8.80006E1	3.33786E-4	5.22137E-3	9.33886E-2	2.72811E1	-3.26927E1	-3.26194E1	2.68227E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.02922E-1
