[Scan]
initial_time=2016-01-28T21:05:03
final_time=2016-01-28T21:05:23
ip_count=19
run=1026
dataset=7
scan=556
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.3401E-2
qbias_imon=-3.82222E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-5.93114E-10
ql2_vset=
ql2_vmon=-5.48363E-4
ql2_imon=1.41386E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.55339E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.63835E-8
mult1=-9.69223E-9
mult2=-2.84636E-9
rf_tmon=-4.30214E-3
rf_agc=3.34357E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.40304E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66918E0
bslens_imon=2.632E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1988E1
lens5a_imon=1.98357E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12449E2
lens4a_imon=2.05145E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5373E1
cs_ef1b_imon=3.18308E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.0209E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05173E1
cs_ea1_imon=1.10687E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07247E0
lens1_imon=1.45009E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03638E1
cs_ea2_imon=1.40027E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.04361E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.12319E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.30752E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15583E1
os_ea1_imon=2.46225E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23646E0
cs_ionrep_imon=9.38279E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91883E2
cs_nozzle_imon=1.93347E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01755E1
cs_anode1_imon=1.97611E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.87548E-8
tplens_vset=1.4E-1
tplens_vmon=1.62405E0
tplens_imon=-2.77588E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25984E1
iondef3_imon=1.52159E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.57755E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.9845E-4
ql6_vset=1.0E-1
ql6_vmon=9.34839E-2
ql6_imon=8.45432E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=8.46854E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33408E1
lens5b_imon=2.18241E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74603E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41722E0
os_ea2_imon=-7.3297E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00553E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71102E1
cs_ef2a_imon=3.20182E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06537E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.2504E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10775E1
os_restr2_imon=3.37265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.31388E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02079E1
cs_anode2_imon=2.10009E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73417E1
iondef1_imon=1.10027E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68569E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.80748E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82451E-1
olens1_imon=7.06538E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11272E0
cs_ionaccel_imon=-8.24728E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47468E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56315E1
einzel_imon=7.85362E-6
window_vset=0.0E0
window_vmon=2.22749E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86716E1
mask2_imon=-7.59857E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=8.20088E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.39673E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50098E3
multb_neg_imon=7.27273E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47321E0
defgridb_imon=6.02477E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33208E1
os_fil1_imon=9.40516E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07678E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59876E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31734E1
cs_fil1_imon=7.58131E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.79174E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61318E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.21514E-2
os_fil2_imon=-2.29356E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.14533E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.62465E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.02927E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47259E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21751E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33486E-3
inlet_lpb_pmon=3.00563E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40091E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.70414E-1
res40_imon=-2.33479E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.47923E-2	-8.80015E1	-5.00679E-4	-8.80004E1	2.14577E-4	4.60148E-3	9.38416E-2	2.72791E1	-3.26313E1	-3.26455E1	2.68134E1	1.20106E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.00197E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.48695E-2	-8.80015E1	-6.19888E-4	-8.80005E1	2.86102E-4	5.00679E-3	9.35078E-2	2.72873E1	-3.2637E1	-3.26352E1	2.68045E1	1.20209E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.50241E-2	-8.80015E1	-6.4373E-4	-8.80004E1	-2.38419E-5	5.05447E-3	9.37462E-2	2.73822E1	-3.26364E1	-3.26208E1	2.68041E1	1.19819E-7	2.52473E-3	2.52473E-3	6.32978E-3	2.99613E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.47923E-2	-8.80014E1	-7.39098E-4	-8.80006E1	9.53674E-5	4.93526E-3	9.3627E-2	2.72811E1	-3.26621E1	-3.25948E1	2.68458E1	1.19891E-7	2.51393E-3	2.51393E-3	6.29157E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.44831E-2	-8.80016E1	-8.34465E-4	-8.80005E1	7.15256E-5	4.64916E-3	9.34601E-2	2.72558E1	-3.26651E1	-3.26278E1	2.67764E1	1.19749E-7	2.51417E-3	2.51417E-3	6.29665E-3	2.9892E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.48695E-2	-8.80013E1	-6.67572E-4	-8.80003E1	-2.38419E-5	4.88758E-3	9.34124E-2	2.72871E1	-3.26669E1	-3.26452E1	2.67788E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.98481E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.47923E-2	-8.80014E1	-6.19888E-4	-8.80007E1	-4.76837E-5	4.74453E-3	9.32932E-2	2.72865E1	-3.26561E1	-3.2623E1	2.67998E1	1.20383E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.01871E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80014E1	-4.29153E-4	-8.80004E1	-2.38419E-4	5.31673E-3	9.32455E-2	2.72654E1	-3.26579E1	-3.25876E1	2.68346E1	1.20069E-7	2.5188E-3	2.5188E-3	6.31563E-3	3.01478E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.40967E-2	-8.80015E1	-4.76837E-4	-8.80004E1	2.14577E-4	5.03063E-3	9.32693E-2	2.73428E1	-3.26425E1	-3.26425E1	2.67896E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80017E1	-4.05312E-4	-8.80005E1	1.19209E-4	5.00679E-3	9.33409E-2	2.73098E1	-3.26366E1	-3.26537E1	2.6786E1	1.20017E-7	2.52099E-3	2.52099E-3	6.27461E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80019E1	-4.29153E-4	-8.80005E1	1.66893E-4	4.93526E-3	9.32455E-2	2.73159E1	-3.26771E1	-3.26404E1	2.6837E1	1.19953E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.34782E-2	-8.80014E1	-5.96046E-4	-8.80002E1	-1.90735E-4	4.81606E-3	9.30071E-2	2.73207E1	-3.26452E1	-3.26482E1	2.67816E1	1.20088E-7	2.51863E-3	2.51863E-3	6.32916E-3	2.98574E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.40967E-2	-8.80016E1	-7.15256E-4	-8.80003E1	-2.38419E-5	4.72069E-3	9.32693E-2	2.71971E1	-3.26195E1	-3.26449E1	2.67974E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.8002E1	-6.67572E-4	-8.80005E1	-4.76837E-5	4.76837E-3	9.33886E-2	2.72013E1	-3.25676E1	-3.27422E1	2.68394E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.99E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80019E1	-5.24521E-4	-8.80003E1	1.66893E-4	4.86374E-3	9.34124E-2	2.728E1	-3.26542E1	-3.26517E1	2.67589E1	1.19953E-7	2.50989E-3	2.50989E-3	6.32356E-3	3.00966E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.44059E-2	-8.80017E1	-7.39098E-4	-8.80007E1	2.86102E-4	5.126E-3	9.31978E-2	2.73448E1	-3.26554E1	-3.262E1	2.67854E1	1.20226E-7	2.51334E-3	2.51334E-3	6.32386E-3	3.01871E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.36328E-2	-8.80015E1	-5.24521E-4	-8.80004E1	3.57628E-4	4.98295E-3	9.35078E-2	2.73466E1	-3.26825E1	-3.25629E1	2.68028E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01871E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.40967E-2	-8.80016E1	-5.00679E-4	-8.80004E1	2.86102E-4	4.8399E-3	9.32455E-2	2.72504E1	-3.26831E1	-3.2644E1	2.68545E1	1.20278E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01085E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.37103E-2	-8.80015E1	-4.76837E-4	-8.80004E1	2.38419E-5	5.07832E-3	9.33409E-2	2.73375E1	-3.26697E1	-3.25717E1	2.67535E1	1.20017E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.3401E-2	-8.80018E1	-5.48363E-4	-8.80004E1	-7.15256E-5	5.03063E-3	9.34839E-2	2.73417E1	-3.26639E1	-3.25984E1	2.68569E1	1.19809E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00563E-1
