[Scan]
initial_time=2016-01-28T21:05:57
final_time=2016-01-28T21:06:16
ip_count=19
run=1026
dataset=7
scan=558
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.80786E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.85616E-10
ql2_vset=
ql2_vmon=-9.29832E-4
ql2_imon=1.43098E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.67273E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.63478E-8
mult1=-9.57341E-9
mult2=-2.77074E-9
rf_tmon=-5.12153E-3
rf_agc=3.35549E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.3649E-10
bslens_vset=-6.2E0
bslens_vmon=-6.60545E0
bslens_imon=2.58426E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19922E1
lens5a_imon=2.00622E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12445E2
lens4a_imon=2.04993E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53559E1
cs_ef1b_imon=3.1927E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02283E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0482E1
cs_ea1_imon=1.07214E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09495E0
lens1_imon=1.65959E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64544E1
os_ef1alow_imon=2.97636E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03717E1
cs_ea2_imon=1.39074E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84383E1
cs_ef1a_imon=3.03377E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.12089E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11329E1
os_restr1_imon=4.30784E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15392E1
os_ea1_imon=2.48153E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63354E1
os_ef1bup_imon=3.09248E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.29428E0
cs_ionrep_imon=9.44629E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93514E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01826E1
cs_anode1_imon=1.96728E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.87866E-8
tplens_vset=1.4E-1
tplens_vmon=1.6755E0
tplens_imon=-2.61133E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26462E1
iondef3_imon=1.51079E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26285E1
iondef2_imon=1.588E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02902E2
lens6_imon=2.98304E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=8.5727E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27048E0
ionrepsh_imon=8.64166E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33798E1
lens5b_imon=2.16649E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4154E0
os_ea2_imon=-3.45489E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06094E2
lens4b_imon=2.00496E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71425E1
cs_ef2a_imon=3.19595E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10429E0
os_ef2alow_imon=-2.50346E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99586E-1
os_ef2bup_imon=-5.40321E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10875E1
os_restr2_imon=3.35618E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23027E2
cs_ionfoca_imon=6.31842E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0155E1
cs_anode2_imon=2.09832E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7318E1
iondef1_imon=1.08609E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.08503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.82613E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.06551E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14852E0
cs_ionaccel_imon=-9.69247E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47382E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56146E1
einzel_imon=7.84353E-6
window_vset=0.0E0
window_vmon=2.13979E-1
window_imon=-8.88158E-7
mask1_vset=-4.8E2
mask1_vmon=-4.8264E2
mask1_imon=2.39142E-4
mask2_vset=0.0E0
mask2_vmon=-1.86971E1
mask2_imon=-5.8975E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.3893E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.51329E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.4477E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.64277E0
defgridb_imon=6.13045E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33174E1
os_fil1_imon=9.41236E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07497E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59695E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31747E1
cs_fil1_imon=7.58551E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.71005E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61313E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.20353E-2
os_fil2_imon=-2.49658E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.1255E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.66666E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29302E-1
cs_fil2_imon=-2.38306E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50382E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21824E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29128E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.06624E-1
res40_imon=-2.35749E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=265
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.40192E-2	-8.80016E1	-1.09673E-3	-8.80003E1	7.15256E-5	4.98295E-3	9.37939E-2	2.73317E1	-3.26578E1	-3.26591E1	2.67991E1	1.20226E-7	2.51891E-3	2.51891E-3	6.31234E-3	2.9926E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.42513E-2	-8.80016E1	-1.00136E-3	-8.80005E1	4.52995E-4	4.8399E-3	9.41753E-2	2.73027E1	-3.26658E1	-3.26187E1	2.68176E1	1.19895E-7	2.5257E-3	2.5257E-3	6.31321E-3	2.98435E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.41738E-2	-8.80017E1	-8.10623E-4	-8.80004E1	2.86102E-4	5.03063E-3	9.36747E-2	2.73183E1	-3.26362E1	-3.26224E1	2.6796E1	1.19991E-7	2.51838E-3	2.51838E-3	6.3131E-3	2.97286E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-7.39421E-2	-8.80018E1	-1.04904E-3	-8.80004E1	2.14577E-4	4.93526E-3	9.34839E-2	2.72991E1	-3.26549E1	-3.26338E1	2.68082E1	1.2026E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80018E1	-8.10623E-4	-8.80005E1	1.66893E-4	4.72069E-3	9.39846E-2	2.7278E1	-3.2682E1	-3.2606E1	2.6807E1	1.19809E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.33239E-2	-8.80019E1	-6.4373E-4	-8.80003E1	1.66893E-4	4.79221E-3	9.38177E-2	2.73478E1	-3.26561E1	-3.2641E1	2.68082E1	1.19965E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.35556E-2	-8.80018E1	-8.10623E-4	-8.80005E1	9.53674E-5	5.03063E-3	9.40323E-2	2.72868E1	-3.26461E1	-3.26378E1	2.68238E1	1.20311E-7	2.5131E-3	2.5131E-3	6.33977E-3	3.02253E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40967E-2	-8.80017E1	-7.15256E-4	-8.80003E1	2.6226E-4	5.38826E-3	9.4223E-2	2.7257E1	-3.26591E1	-3.26284E1	2.68285E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.32464E-2	-8.80015E1	-6.91414E-4	-8.80004E1	1.90735E-4	4.88758E-3	9.39846E-2	2.72793E1	-3.26308E1	-3.26098E1	2.68338E1	1.20106E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80015E1	-7.86781E-4	-8.80002E1	3.33786E-4	4.76837E-3	9.35793E-2	2.73039E1	-3.26591E1	-3.26026E1	2.6759E1	1.20084E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.02277E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80019E1	-5.48363E-4	-8.80003E1	3.09944E-4	5.22137E-3	9.34839E-2	2.73141E1	-3.26705E1	-3.2605E1	2.67686E1	1.20004E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.02511E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.80019E1	-5.96046E-4	-8.80005E1	2.86102E-4	5.19753E-3	9.34124E-2	2.73261E1	-3.26404E1	-3.2626E1	2.68225E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80019E1	-5.96046E-4	-8.80003E1	2.86102E-4	5.31673E-3	9.35316E-2	2.72691E1	-3.26496E1	-3.26012E1	2.68053E1	1.19978E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00144E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80014E1	-5.48363E-4	-8.80003E1	3.09944E-4	4.86374E-3	9.35793E-2	2.72372E1	-3.26506E1	-3.27324E1	2.68208E1	1.19851E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.00453E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.40967E-2	-8.80012E1	-7.39098E-4	-8.80005E1	2.6226E-4	5.31673E-3	9.36031E-2	2.72486E1	-3.26675E1	-3.26434E1	2.67818E1	1.20004E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80014E1	-9.53674E-4	-8.80006E1	1.43051E-4	5.10216E-3	9.377E-2	2.73063E1	-3.26395E1	-3.26303E1	2.67908E1	1.19965E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9952E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.286E-2	-8.80014E1	-9.77516E-4	-8.80005E1	0.0E0	4.76837E-3	9.35316E-2	2.72309E1	-3.25953E1	-3.26706E1	2.678E1	1.20244E-7	2.5225E-3	2.5225E-3	6.31858E-3	2.99879E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.31692E-2	-8.80014E1	-6.19888E-4	-8.80005E1	-7.15256E-5	4.673E-3	9.35078E-2	2.73033E1	-3.26933E1	-3.26154E1	2.68314E1	1.20209E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.01223E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80015E1	-7.39098E-4	-8.80001E1	-2.86102E-4	4.86374E-3	9.36747E-2	2.72648E1	-3.26663E1	-3.26338E1	2.68076E1	1.19646E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80014E1	-9.29832E-4	-8.80005E1	-1.19209E-4	4.76837E-3	9.34362E-2	2.7318E1	-3.26285E1	-3.26462E1	2.68124E1	1.20004E-7	2.52384E-3	2.52384E-3	6.29128E-3	3.02511E-1
