[Scan]
initial_time=2016-01-28T21:06:50
final_time=2016-01-28T21:07:10
ip_count=19
run=1026
dataset=7
scan=560
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.8111E-6
ql1_vset=
ql1_vmon=-8.80019E1
ql1_imon=-6.12938E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.36685E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.5237E-9
ql4_vset=
ql4_vmon=4.76837E-5
ql4_imon=1.63609E-8
mult1=-1.04989E-8
mult2=-2.80644E-9
rf_tmon=-4.83687E-3
rf_agc=3.39705E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=5.55205E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63495E0
bslens_imon=2.67776E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20025E1
lens5a_imon=1.9943E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.05295E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5358E1
cs_ef1b_imon=3.17047E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04614E2
lens23_imon=1.02018E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04917E1
cs_ea1_imon=1.09989E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10144E0
lens1_imon=1.41419E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03584E1
cs_ea2_imon=1.39791E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84214E1
cs_ef1a_imon=3.04577E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.12564E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.31256E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15465E1
os_ea1_imon=2.46893E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63593E1
os_ef1bup_imon=3.09226E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24974E0
cs_ionrep_imon=9.34246E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93516E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01947E1
cs_anode1_imon=1.9689E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20463E0
olens4_imon=3.87593E-8
tplens_vset=1.4E-1
tplens_vmon=1.62728E0
tplens_imon=-2.8119E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.53453E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26639E1
iondef2_imon=1.57382E-5
lens6_vset=-6.0E2
lens6_vmon=-6.029E2
lens6_imon=2.98622E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=8.87847E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28926E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33463E1
lens5b_imon=2.19392E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.13695E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.468E0
os_ea2_imon=-7.69629E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0606E2
lens4b_imon=2.00481E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71084E1
cs_ef2a_imon=3.1993E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07078E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69193E-1
os_ef2bup_imon=-5.1567E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10817E1
os_restr2_imon=3.37914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23108E2
cs_ionfoca_imon=6.31592E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02085E1
cs_anode2_imon=2.07522E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73141E1
iondef1_imon=1.0875E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.09711E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.87423E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=7.09481E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10371E0
cs_ionaccel_imon=-7.41837E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47338E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=2.05329E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82625E2
mask1_imon=2.39207E-4
mask2_vset=0.0E0
mask2_vmon=-1.87077E1
mask2_imon=-5.03975E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92665E3
multa_neg_imon=7.46658E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93742E3
defgrida_imon=6.58172E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5013E3
multb_neg_imon=7.28607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.23724E0
defgridb_imon=6.02958E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33177E1
os_fil1_imon=9.42288E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.085E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59832E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31726E1
cs_fil1_imon=7.35906E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=8.72857E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61335E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.04102E-2
os_fil2_imon=-2.38366E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.05523E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.58946E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27062E-1
cs_fil2_imon=-2.19145E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.26236E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2164E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31299E-3
inlet_lpb_pmon=3.00942E-1
chamber_ion_pmon=1.19819E-7
chamber_cvt_pmon=2.51915E-3
foreline_cvt_pmon=2.51915E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.6681E-1
res40_imon=-2.30235E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80013E1	-6.91414E-4	-8.80005E1	2.38419E-4	4.88758E-3	9.36985E-2	2.73892E1	-3.26867E1	-3.26446E1	2.68064E1	1.19757E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.97963E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.32464E-2	-8.80016E1	-8.82149E-4	-8.80003E1	1.66893E-4	4.79221E-3	9.38416E-2	2.72922E1	-3.26682E1	-3.2593E1	2.68007E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.32464E-2	-8.80014E1	-9.29832E-4	-8.80002E1	-1.90735E-4	4.3869E-3	9.39846E-2	2.73063E1	-3.26997E1	-3.25995E1	2.67995E1	1.20174E-7	2.52318E-3	2.52318E-3	6.28006E-3	2.9978E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.34782E-2	-8.80014E1	-5.96046E-4	-8.80003E1	-7.15256E-5	4.88758E-3	9.36508E-2	2.73157E1	-3.26697E1	-3.26248E1	2.67866E1	1.20209E-7	2.51739E-3	2.51739E-3	6.28592E-3	3.03286E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.35556E-2	-8.80015E1	-4.76837E-4	-8.80002E1	-1.19209E-4	4.69685E-3	9.40084E-2	2.72427E1	-3.26505E1	-3.26272E1	2.6804E1	1.198E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23189E-2	-8.80013E1	-5.48363E-4	-8.80004E1	-9.53674E-5	4.50611E-3	9.39131E-2	2.73381E1	-3.26579E1	-3.26302E1	2.68274E1	1.19978E-7	2.52139E-3	2.52139E-3	6.34661E-3	3.01475E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.23189E-2	-8.80012E1	-7.15256E-4	-8.80002E1	0.0E0	4.95911E-3	9.37939E-2	2.72703E1	-3.26225E1	-3.26313E1	2.68106E1	1.19766E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80016E1	-8.34465E-4	-8.80003E1	3.09944E-4	5.14984E-3	9.33886E-2	2.72973E1	-3.2629E1	-3.26224E1	2.68238E1	1.20158E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.9892E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.8001E1	-7.15256E-4	-8.80003E1	2.14577E-4	4.98295E-3	9.35316E-2	2.73098E1	-3.26856E1	-3.26254E1	2.68316E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31817E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80012E1	-7.86781E-4	-8.80002E1	4.76837E-5	4.98295E-3	9.35555E-2	2.72824E1	-3.26817E1	-3.2607E1	2.67945E1	1.2026E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.02253E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80015E1	-9.29832E-4	-8.80001E1	3.33786E-4	4.57764E-3	9.35555E-2	2.73588E1	-3.2675E1	-3.26054E1	2.67873E1	1.20031E-7	2.5147E-3	2.5147E-3	6.29624E-3	3.03618E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80017E1	-8.82149E-4	-8.80005E1	-2.38419E-5	5.05447E-3	9.36031E-2	2.72937E1	-3.26789E1	-3.2647E1	2.68124E1	1.20004E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0148E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80016E1	-7.15256E-4	-8.80003E1	-1.43051E-4	4.91142E-3	9.36747E-2	2.73015E1	-3.26999E1	-3.26428E1	2.68028E1	1.19965E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80016E1	-1.00136E-3	-8.80006E1	-1.19209E-4	4.93526E-3	9.38177E-2	2.73328E1	-3.27009E1	-3.27198E1	2.67932E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80013E1	-6.67572E-4	-8.80003E1	2.38419E-5	5.05447E-3	9.37223E-2	2.73117E1	-3.26663E1	-3.26212E1	2.68192E1	1.198E-7	2.51739E-3	2.51739E-3	6.28592E-3	2.98665E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.38649E-2	-8.80014E1	-6.67572E-4	-8.80002E1	-2.86102E-4	4.62532E-3	9.36508E-2	2.72909E1	-3.26313E1	-3.26667E1	2.6819E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.00563E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80016E1	-8.34465E-4	-8.80003E1	1.66893E-4	4.79221E-3	9.40084E-2	2.73804E1	-3.27709E1	-3.25872E1	2.68053E1	1.19757E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.98222E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80019E1	-7.62939E-4	-8.80003E1	-9.53674E-5	5.03063E-3	9.377E-2	2.72567E1	-3.26874E1	-3.26236E1	2.67955E1	1.20078E-7	2.51783E-3	2.51783E-3	6.31779E-3	2.98031E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.44059E-2	-8.80019E1	-8.34465E-4	-8.80003E1	2.6226E-4	5.03063E-3	9.37462E-2	2.73754E1	-3.27065E1	-3.25888E1	2.68063E1	1.19851E-7	2.51954E-3	2.51954E-3	6.35601E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80019E1	-6.19888E-4	-8.80004E1	4.76837E-5	4.62532E-3	9.39131E-2	2.73141E1	-3.26639E1	-3.26302E1	2.6798E1	1.19819E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00942E-1
