[Scan]
initial_time=2016-01-28T21:07:17
final_time=2016-01-28T21:07:36
ip_count=19
run=1026
dataset=7
scan=561
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.83964E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-5.60725E-10
ql2_vset=
ql2_vmon=-5.96046E-4
ql2_imon=1.45063E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.6145E-9
ql4_vset=
ql4_vmon=-7.15256E-5
ql4_imon=1.63578E-8
mult1=-9.6294E-9
mult2=-2.74481E-9
rf_tmon=-5.01089E-3
rf_agc=3.28431E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.37896E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63309E0
bslens_imon=2.53775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=1.96397E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05035E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53604E1
cs_ef1b_imon=3.17587E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04603E2
lens23_imon=1.02125E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05186E1
cs_ea1_imon=1.09806E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04496E0
lens1_imon=1.6257E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04051E1
cs_ea2_imon=1.39907E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=3.04829E-5
olens2_vset=9.7E-1
olens2_vmon=9.70244E-1
olens2_imon=1.12705E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11376E1
os_restr1_imon=4.32193E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15143E1
os_ea1_imon=2.46541E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63407E1
os_ef1bup_imon=3.0883E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=9.45205E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=1.97683E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.8816E-8
tplens_vset=1.4E-1
tplens_vmon=1.64744E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2639E1
iondef3_imon=1.48739E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2659E1
iondef2_imon=1.58292E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98497E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=8.69334E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27193E0
ionrepsh_imon=8.46069E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.337E1
lens5b_imon=2.18711E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74711E1
cs_ef2b_imon=3.1301E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.38849E0
os_ea2_imon=-8.18459E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.00659E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71126E1
cs_ef2a_imon=3.18921E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11009E1
os_restr2_imon=3.36508E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.30613E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01347E1
cs_anode2_imon=2.1109E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73004E1
iondef1_imon=1.07679E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68316E1
iondef4_imon=1.09674E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71778E1
olens3_imon=5.81533E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.05724E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14035E0
cs_ionaccel_imon=-9.61679E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47414E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.7455E-6
window_vset=0.0E0
window_vmon=2.16742E-1
window_imon=-9.68887E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86734E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.34315E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.5717E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=6.76997E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43765E0
defgridb_imon=6.0634E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3316E1
os_fil1_imon=9.41591E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.079E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59907E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31775E1
cs_fil1_imon=7.18487E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.77973E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61273E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.06681E-2
os_fil2_imon=-2.40768E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.2114E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.6084E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28487E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21688E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.89926E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=203
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.30918E-2	-8.80019E1	-7.86781E-4	-8.80002E1	4.52995E-4	5.36442E-3	9.36985E-2	2.73346E1	-3.2688E1	-3.26136E1	2.67914E1	1.198E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00453E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.29374E-2	-8.80019E1	-8.58307E-4	-8.80002E1	4.76837E-5	4.95911E-3	9.37223E-2	2.72766E1	-3.26903E1	-3.26015E1	2.68183E1	1.20004E-7	2.52276E-3	2.52276E-3	6.33977E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.30146E-2	-8.80016E1	-7.86781E-4	-8.80002E1	1.43051E-4	4.69685E-3	9.39846E-2	2.73228E1	-3.26272E1	-3.26517E1	2.68207E1	1.20028E-7	2.51575E-3	2.51575E-3	6.2815E-3	3.00247E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.33239E-2	-8.80019E1	-5.96046E-4	-8.80003E1	2.14577E-4	5.00679E-3	9.36985E-2	2.72793E1	-3.26434E1	-3.26488E1	2.68204E1	1.19872E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.99879E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80014E1	-5.96046E-4	-8.80004E1	4.76837E-5	5.07832E-3	9.39846E-2	2.72437E1	-3.26296E1	-3.26154E1	2.6804E1	1.19965E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80014E1	-5.72205E-4	-8.80006E1	2.38419E-4	5.03063E-3	9.41277E-2	2.72432E1	-3.26549E1	-3.26627E1	2.6822E1	1.20158E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80017E1	-6.67572E-4	-8.80004E1	0.0E0	5.14984E-3	9.38177E-2	2.72769E1	-3.26554E1	-3.26056E1	2.67788E1	1.20174E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.286E-2	-8.8002E1	-7.86781E-4	-8.80004E1	-1.43051E-4	5.03063E-3	9.38892E-2	2.73802E1	-3.26579E1	-3.26591E1	2.68154E1	1.19757E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.3401E-2	-8.80017E1	-7.86781E-4	-8.80003E1	-7.15256E-5	5.17368E-3	9.36031E-2	2.72555E1	-3.26183E1	-3.258E1	2.68007E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80018E1	-9.29832E-4	-8.80001E1	3.57628E-4	5.03063E-3	9.38654E-2	2.73039E1	-3.26801E1	-3.26086E1	2.67914E1	1.20158E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0148E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80021E1	-7.39098E-4	-8.80003E1	1.43051E-4	5.07832E-3	9.35316E-2	2.72648E1	-3.26296E1	-3.26026E1	2.67955E1	1.20017E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.01609E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.31692E-2	-8.80021E1	-5.96046E-4	-8.80003E1	1.19209E-4	5.10216E-3	9.377E-2	2.72961E1	-3.26975E1	-3.26314E1	2.68124E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80018E1	-3.33786E-4	-8.80003E1	-2.38419E-5	4.93526E-3	9.37462E-2	2.73446E1	-3.27062E1	-3.25953E1	2.6795E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.39421E-2	-8.80018E1	-9.05991E-4	-8.80006E1	1.43051E-4	4.62532E-3	9.37223E-2	2.72883E1	-3.25707E1	-3.25809E1	2.67986E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.286E-2	-8.80015E1	-7.39098E-4	-8.80004E1	-4.76837E-5	4.8399E-3	9.39369E-2	2.72811E1	-3.26621E1	-3.26188E1	2.68382E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.9892E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80017E1	-7.39098E-4	-8.80004E1	2.6226E-4	4.79221E-3	9.377E-2	2.72949E1	-3.26897E1	-3.2611E1	2.68244E1	1.19861E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.00041E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80016E1	-5.96046E-4	-8.80006E1	1.90735E-4	4.74453E-3	9.39846E-2	2.72528E1	-3.25413E1	-3.26494E1	2.67734E1	1.19757E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.23964E-2	-8.80017E1	-3.33786E-4	-8.80008E1	2.38419E-4	4.57764E-3	9.36985E-2	2.73045E1	-3.26892E1	-3.26295E1	2.68047E1	1.20069E-7	2.50789E-3	2.50789E-3	6.3074E-3	3.01085E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-7.21643E-2	-8.80017E1	-6.4373E-4	-8.80006E1	2.14577E-4	5.10216E-3	9.39369E-2	2.73222E1	-3.2662E1	-3.26172E1	2.67966E1	1.1974E-7	2.51393E-3	2.51393E-3	6.31269E-3	2.97593E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80014E1	-5.96046E-4	-8.80006E1	-7.15256E-5	5.03063E-3	9.38654E-2	2.73004E1	-3.2659E1	-3.2639E1	2.68316E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.01223E-1
