[Scan]
initial_time=2016-01-28T21:07:43
final_time=2016-01-28T21:08:03
ip_count=19
run=1026
dataset=7
scan=562
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.79543E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-5.83577E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.39978E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.64288E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.63192E-8
mult1=-9.94508E-9
mult2=-2.69067E-9
rf_tmon=-5.11926E-3
rf_agc=3.29851E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.42629E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62047E0
bslens_imon=2.76847E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19809E1
lens5a_imon=1.99028E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.04996E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=3.18668E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04584E2
lens23_imon=1.02305E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04892E1
cs_ea1_imon=1.10058E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07801E0
lens1_imon=1.53558E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03858E1
cs_ea2_imon=1.4052E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84334E1
cs_ef1a_imon=3.03496E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.12324E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.3104E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15065E1
os_ea1_imon=2.46505E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63581E1
os_ef1bup_imon=3.0937E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24969E0
cs_ionrep_imon=9.45205E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93492E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=1.96314E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.87674E-8
tplens_vset=1.4E-1
tplens_vmon=1.66306E0
tplens_imon=-2.23642E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26819E1
iondef3_imon=1.49316E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26543E1
iondef2_imon=1.58076E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98331E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=8.69834E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2563E0
ionrepsh_imon=8.46069E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.18351E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.13731E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43775E0
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71204E1
cs_ef2a_imon=3.19497E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0888E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.18447E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10799E1
os_restr2_imon=3.35968E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01455E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73339E1
iondef1_imon=1.09481E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68224E1
iondef4_imon=1.08846E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.83214E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82475E-1
olens1_imon=7.07752E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11933E0
cs_ionaccel_imon=-8.60768E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47385E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56453E1
einzel_imon=7.81037E-6
window_vset=0.0E0
window_vmon=2.31158E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82621E2
mask1_imon=2.39203E-4
mask2_vset=0.0E0
mask2_vmon=-1.86987E1
mask2_imon=-5.61639E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.7433E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.77357E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.50898E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.48578E0
defgridb_imon=6.067E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33156E1
os_fil1_imon=9.41994E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08038E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59932E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31814E1
cs_fil1_imon=7.54527E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.52745E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61493E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.05392E-2
os_fil2_imon=-2.46174E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.17536E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.49497E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27969E-1
cs_fil2_imon=-2.0593E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.38849E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21818E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.89926E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-7.23964E-2	-8.80016E1	-5.72205E-4	-8.80003E1	7.15256E-5	5.05447E-3	9.36747E-2	2.72733E1	-3.26597E1	-3.26206E1	2.67917E1	1.19953E-7	2.52599E-3	2.52599E-3	6.31278E-3	2.99175E-1
2.0E0	0.0E0	0.0E0	3.16E2	1.6E2	-7.20871E-2	-8.80017E1	-6.91414E-4	-8.80001E1	9.53674E-5	4.8399E-3	9.39846E-2	2.72929E1	-3.26064E1	-3.26493E1	2.68106E1	1.19913E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.97704E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.286E-2	-8.80016E1	-7.15256E-4	-8.80002E1	2.38419E-4	4.50611E-3	9.39131E-2	2.73387E1	-3.26579E1	-3.26129E1	2.68004E1	1.19766E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.0041E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80015E1	-7.39098E-4	-8.80002E1	1.19209E-4	4.57764E-3	9.38892E-2	2.7299E1	-3.26707E1	-3.26217E1	2.67789E1	1.20078E-7	2.52301E-3	2.52301E-3	6.31779E-3	3.01733E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.24736E-2	-8.80014E1	-7.86781E-4	-8.80002E1	7.15256E-5	4.64916E-3	9.36985E-2	2.72508E1	-3.26632E1	-3.26431E1	2.67746E1	1.20191E-7	2.52473E-3	2.52473E-3	6.32978E-3	3.03618E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.80017E1	-7.62939E-4	-8.80004E1	-1.66893E-4	4.76837E-3	9.408E-2	2.72972E1	-3.26734E1	-3.25961E1	2.67916E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80018E1	-5.24521E-4	-8.80007E1	2.38419E-5	4.81606E-3	9.37223E-2	2.72805E1	-3.26615E1	-3.26512E1	2.6825E1	1.20107E-7	2.51965E-3	2.51965E-3	6.3074E-3	2.99912E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.17007E-2	-8.80014E1	-1.0252E-3	-8.80006E1	1.43051E-4	4.8399E-3	9.39846E-2	2.73081E1	-3.26741E1	-3.2599E1	2.67926E1	1.19705E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.17779E-2	-8.80016E1	-5.96046E-4	-8.80004E1	7.15256E-5	4.76837E-3	9.35316E-2	2.73382E1	-3.26903E1	-3.2577E1	2.68144E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9874E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.14689E-2	-8.80019E1	-6.4373E-4	-8.80003E1	-2.14577E-4	5.07832E-3	9.37939E-2	2.73092E1	-3.26815E1	-3.25912E1	2.68151E1	1.20191E-7	2.51804E-3	2.51804E-3	6.34661E-3	2.98026E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-7.25507E-2	-8.80017E1	-8.82149E-4	-8.80005E1	-1.66893E-4	4.86374E-3	9.37939E-2	2.72775E1	-3.26615E1	-3.26218E1	2.67758E1	1.20055E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00453E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-7.19325E-2	-8.80016E1	-8.82149E-4	-8.80005E1	4.76837E-5	5.19753E-3	9.36508E-2	2.72626E1	-3.26549E1	-3.26213E1	2.68394E1	1.20122E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-7.22418E-2	-8.80017E1	-7.15256E-4	-8.80007E1	-2.38419E-5	5.10216E-3	9.36985E-2	2.73592E1	-3.26723E1	-3.26134E1	2.67884E1	1.20055E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80015E1	-6.91414E-4	-8.80007E1	2.14577E-4	4.76837E-3	9.37462E-2	2.73458E1	-3.27593E1	-3.25428E1	2.6817E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00041E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-7.27828E-2	-8.80013E1	-1.0252E-3	-8.80003E1	1.43051E-4	4.79221E-3	9.34839E-2	2.73297E1	-3.2641E1	-3.26134E1	2.68064E1	1.20055E-7	2.52384E-3	2.52384E-3	6.32356E-3	3.00966E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-7.286E-2	-8.80013E1	-1.04904E-3	-8.80001E1	-4.76837E-5	4.81606E-3	9.37223E-2	2.73198E1	-3.2662E1	-3.26602E1	2.6781E1	1.20226E-7	2.51225E-3	2.51225E-3	6.31837E-3	2.9978E-1
2.0E1	0.0E0	0.0E0	8.08E2	5.58E2	-7.31692E-2	-8.80016E1	-9.29832E-4	-8.80003E1	2.6226E-4	4.98295E-3	9.37223E-2	2.73094E1	-3.27858E1	-3.26095E1	2.6849E1	1.19851E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80016E1	-1.00136E-3	-8.80004E1	1.66893E-4	4.86374E-3	9.37462E-2	2.72871E1	-3.26486E1	-3.26388E1	2.67337E1	1.19766E-7	2.51804E-3	2.51804E-3	6.35223E-3	2.98819E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80016E1	-9.05991E-4	-8.80001E1	-2.86102E-4	4.69685E-3	9.3627E-2	2.72606E1	-3.26783E1	-3.26212E1	2.67935E1	1.20092E-7	2.51709E-3	2.51709E-3	6.3445E-3	3.006E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80016E1	-1.0252E-3	-8.80005E1	-1.19209E-4	4.72069E-3	9.36747E-2	2.73339E1	-3.26543E1	-3.26819E1	2.68224E1	1.20122E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00824E-1
