[Scan]
initial_time=2016-01-28T21:09:15
final_time=2016-01-28T21:09:34
ip_count=19
run=1026
dataset=8
scan=565
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09526E0
qbias_imon=-1.08813E-4
ql1_vset=
ql1_vmon=-8.19492E-1
ql1_imon=1.49695E-8
ql2_vset=
ql2_vmon=-7.98774E-1
ql2_imon=1.96178E-9
ql3_vset=
ql3_vmon=-9.13048E0
ql3_imon=3.81268E-9
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=-5.63288E-10
mult1=-9.26292E-9
mult2=-2.73306E-9
rf_tmon=-4.39739E-3
rf_agc=3.32206E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=1.65827E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65592E0
bslens_imon=2.5017E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1952E1
lens5a_imon=2.00146E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.05291E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53544E1
cs_ef1b_imon=3.17804E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05306E1
cs_ea1_imon=1.07967E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38698E0
lens1_imon=2.94872E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97297E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03558E1
cs_ea2_imon=1.39222E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84352E1
cs_ef1a_imon=3.04685E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.12511E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11226E1
os_restr1_imon=4.29995E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15149E1
os_ea1_imon=2.48813E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63761E1
os_ef1bup_imon=3.10019E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26351E0
cs_ionrep_imon=9.36193E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91861E2
cs_nozzle_imon=1.93434E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01785E1
cs_anode1_imon=1.97107E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.08534E-8
tplens_vset=1.4E-1
tplens_vmon=1.64263E0
tplens_imon=-3.17371E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50686E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26697E1
iondef2_imon=1.57355E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98551E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=3.91989E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=8.73467E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33501E1
lens5b_imon=2.19721E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74832E1
cs_ef2b_imon=3.13443E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.469E0
os_ea2_imon=-5.98557E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06131E2
lens4b_imon=2.00799E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7139E1
cs_ef2a_imon=3.19966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08159E0
os_ef2alow_imon=-2.51138E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.75199E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10697E1
os_restr2_imon=3.36652E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.29604E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01749E1
cs_anode2_imon=2.09721E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72585E1
iondef1_imon=1.12762E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67968E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=5.64218E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.07962E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12053E0
cs_ionaccel_imon=-8.60768E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.4745E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56525E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=2.25752E-1
window_imon=-7.67065E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39131E-4
mask2_vset=0.0E0
mask2_vmon=-1.86518E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.52701E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=6.47797E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=6.74473E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.60909E0
defgridb_imon=5.9913E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33198E1
os_fil1_imon=9.41273E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08206E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60127E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31774E1
cs_fil1_imon=7.55128E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.62956E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61693E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.1313E-2
os_fil2_imon=-2.37765E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.18137E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.48595E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27839E-1
cs_fil2_imon=-2.27554E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28037E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21795E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.83318E-1
res40_imon=-2.30235E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.19683E-1	-7.98917E-1	-9.1306E0	-9.14173E0	4.74453E-3	9.38177E-2	2.73634E1	-3.26164E1	-3.26747E1	2.68088E1	1.20017E-7	2.5199E-3	2.5199E-3	6.34588E-3	2.9952E-1
2.0E0	2.6E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.19492E-1	-7.99084E-1	-9.13036E0	-9.14207E0	4.74453E-3	9.35316E-2	2.72626E1	-3.26638E1	-3.26195E1	2.67806E1	1.19861E-7	2.51771E-3	2.51771E-3	6.33486E-3	2.9874E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09449E0	-8.19564E-1	-7.98845E-1	-9.13031E0	-9.14221E0	4.86374E-3	9.37939E-2	2.73213E1	-3.26637E1	-3.26127E1	2.67943E1	1.19953E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.04582E-1
4.0E0	1.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.19707E-1	-7.98941E-1	-9.13067E0	-9.14192E0	4.88758E-3	9.37223E-2	2.73201E1	-3.26506E1	-3.2632E1	2.67956E1	1.20209E-7	2.51471E-3	2.51471E-3	6.31278E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.19588E-1	-7.98798E-1	-9.13086E0	-9.14218E0	4.69685E-3	9.3627E-2	2.72865E1	-3.26585E1	-3.26224E1	2.68052E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.19707E-1	-7.98917E-1	-9.13057E0	-9.14202E0	4.74453E-3	9.35555E-2	2.73147E1	-3.26747E1	-3.26368E1	2.67812E1	1.20069E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09364E0	-8.19683E-1	-7.99036E-1	-9.13033E0	-9.14204E0	4.52995E-3	9.34362E-2	2.7269E1	-3.26578E1	-3.26395E1	2.6831E1	1.19913E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01609E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.19468E-1	-7.99179E-1	-9.1305E0	-9.14207E0	4.86374E-3	9.34601E-2	2.72847E1	-3.26254E1	-3.26242E1	2.68016E1	1.20137E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.00676E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09418E0	-8.19802E-1	-7.99203E-1	-9.13005E0	-9.14168E0	4.64916E-3	9.40561E-2	2.72733E1	-3.26651E1	-3.25846E1	2.68082E1	1.19809E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.1954E-1	-7.98893E-1	-9.13043E0	-9.14183E0	5.14984E-3	9.39131E-2	2.73285E1	-3.265E1	-3.26248E1	2.67938E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.98222E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.19421E-1	-7.9906E-1	-9.13005E0	-9.14178E0	5.07832E-3	9.35078E-2	2.72576E1	-3.26915E1	-3.26104E1	2.68238E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.98222E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.19445E-1	-7.99227E-1	-9.13033E0	-9.14195E0	4.79221E-3	9.33647E-2	2.72961E1	-3.26735E1	-3.2614E1	2.68244E1	1.20069E-7	2.51116E-3	2.51116E-3	6.29645E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0948E0	-8.19707E-1	-7.99036E-1	-9.13038E0	-9.14197E0	4.72069E-3	9.3627E-2	2.72945E1	-3.26673E1	-3.2613E1	2.68124E1	1.20106E-7	2.52599E-3	2.52599E-3	6.31278E-3	3.00453E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.19778E-1	-7.98798E-1	-9.13038E0	-9.14192E0	4.91142E-3	9.36031E-2	2.72408E1	-3.26725E1	-3.26138E1	2.67896E1	1.20122E-7	2.52209E-3	2.52209E-3	6.28552E-3	2.9952E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.19659E-1	-7.98965E-1	-9.13067E0	-9.14192E0	4.91142E-3	9.35793E-2	2.73075E1	-3.26402E1	-3.26455E1	2.68304E1	1.20137E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.01475E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.19612E-1	-7.98488E-1	-9.13091E0	-9.14171E0	5.03063E-3	9.35555E-2	2.72727E1	-3.26567E1	-3.26068E1	2.68208E1	1.19953E-7	2.51632E-3	2.51632E-3	6.29128E-3	3.01995E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.19421E-1	-7.98368E-1	-9.13057E0	-9.14197E0	4.93526E-3	9.36508E-2	2.73165E1	-3.26567E1	-3.26536E1	2.67891E1	1.20226E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.03712E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.19445E-1	-7.98297E-1	-9.13069E0	-9.14192E0	5.05447E-3	9.408E-2	2.72628E1	-3.26666E1	-3.26625E1	2.68117E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.03976E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09441E0	-8.19445E-1	-7.98631E-1	-9.13086E0	-9.1419E0	4.86374E-3	9.35793E-2	2.736E1	-3.26874E1	-3.26319E1	2.6795E1	1.1974E-7	2.51709E-3	2.51709E-3	6.33919E-3	3.00852E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09526E0	-8.19492E-1	-7.98774E-1	-9.13048E0	-9.14209E0	5.05447E-3	9.38654E-2	2.72585E1	-3.26697E1	-3.26248E1	2.67968E1	1.20055E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.98665E-1
