[Scan]
initial_time=2016-01-28T21:09:41
final_time=2016-01-28T21:10:01
ip_count=19
run=1026
dataset=8
scan=566
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.19254E-1
ql1_imon=1.46394E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=2.01143E-9
ql3_vset=
ql3_vmon=-9.13076E0
ql3_imon=2.71312E-9
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-4.19104E-10
mult1=-1.01859E-8
mult2=-2.81243E-9
rf_tmon=-4.76477E-3
rf_agc=3.35379E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.62092E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63436E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19848E1
lens5a_imon=1.98227E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12437E2
lens4a_imon=2.05171E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53664E1
cs_ef1b_imon=3.17119E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04601E2
lens23_imon=1.02171E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04864E1
cs_ea1_imon=1.09317E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41621E0
lens1_imon=2.6636E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64638E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.43436E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8428E1
cs_ef1a_imon=3.03027E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.124E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.32518E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15134E1
os_ea1_imon=2.45336E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63497E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24856E0
cs_ionrep_imon=9.55483E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01575E1
cs_anode1_imon=1.97323E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.08793E-8
tplens_vset=1.4E-1
tplens_vmon=1.66208E0
tplens_imon=-2.67032E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26416E1
iondef3_imon=1.49489E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26711E1
iondef2_imon=1.58479E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02901E2
lens6_imon=2.98459E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=3.98859E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25387E0
ionrepsh_imon=8.57087E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33245E1
lens5b_imon=2.18437E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46269E0
os_ea2_imon=-4.90015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06111E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7121E1
cs_ef2a_imon=3.19101E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07678E0
os_ef2alow_imon=-2.57626E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.14228E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11063E1
os_restr2_imon=3.36148E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23038E2
cs_ionfoca_imon=6.3099E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.09937E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73009E1
iondef1_imon=1.0921E-5
iondef4_vset=2.691E1
iondef4_vmon=2.681E1
iondef4_imon=1.08665E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.75292E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.06259E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-9.07619E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02076E2
cs_ionfocb_imon=1.47352E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.95453E-6
window_vset=0.0E0
window_vmon=2.20947E-1
window_imon=-1.10584E-6
mask1_vset=-4.8E2
mask1_vmon=-4.826E2
mask1_imon=2.39347E-4
mask2_vset=0.0E0
mask2_vmon=-1.86903E1
mask2_imon=-5.14787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.55506E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93695E3
defgrida_imon=6.53571E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50118E3
multb_neg_imon=7.28253E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.57387E0
defgridb_imon=6.27026E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33182E1
os_fil1_imon=9.39603E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07774E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.60003E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.318E1
cs_fil1_imon=7.28698E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.23313E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61449E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.07901E-2
os_fil2_imon=-2.45574E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.16935E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.51986E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29781E-1
cs_fil2_imon=-2.58788E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.5747E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21768E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.60203E-1
res40_imon=-2.2555E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.18968E-1	-7.98368E-1	-9.13072E0	-9.14187E0	4.86374E-3	9.38892E-2	2.72839E1	-3.26649E1	-3.26484E1	2.67978E1	1.2026E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01223E-1
2.0E0	4.6E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.19087E-1	-7.98798E-1	-9.13053E0	-9.14207E0	4.64916E-3	9.3627E-2	2.73417E1	-3.26838E1	-3.26331E1	2.6792E1	1.19697E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.19039E-1	-7.98678E-1	-9.13072E0	-9.14192E0	4.74453E-3	9.37939E-2	2.72715E1	-3.26419E1	-3.26543E1	2.67908E1	1.20055E-7	2.50882E-3	2.50882E-3	6.31278E-3	3.00197E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.18801E-1	-7.98774E-1	-9.13055E0	-9.14197E0	4.64916E-3	9.377E-2	2.72839E1	-3.26638E1	-3.26502E1	2.67944E1	1.20092E-7	2.52131E-3	2.52131E-3	6.30212E-3	3.006E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09619E0	-8.1892E-1	-7.98821E-1	-9.13074E0	-9.14207E0	4.81606E-3	9.41038E-2	2.73123E1	-3.26777E1	-3.26573E1	2.67995E1	1.2033E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0965E0	-8.18706E-1	-7.98941E-1	-9.13062E0	-9.14211E0	4.91142E-3	9.39369E-2	2.73033E1	-3.26817E1	-3.26101E1	2.68419E1	1.20226E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.01347E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.18944E-1	-7.98917E-1	-9.13041E0	-9.14216E0	4.93526E-3	9.38654E-2	2.72402E1	-3.26443E1	-3.26549E1	2.68334E1	1.20174E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.18849E-1	-7.9875E-1	-9.13067E0	-9.14221E0	4.76837E-3	9.37939E-2	2.73213E1	-3.26603E1	-3.2638E1	2.67955E1	1.20174E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.19016E-1	-7.98941E-1	-9.13069E0	-9.14209E0	5.05447E-3	9.39131E-2	2.72823E1	-3.26567E1	-3.26062E1	2.68022E1	1.20174E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00041E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.1892E-1	-7.98869E-1	-9.1306E0	-9.14168E0	5.07832E-3	9.36985E-2	2.73111E1	-3.26801E1	-3.26092E1	2.68125E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02396E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.19135E-1	-7.98988E-1	-9.13086E0	-9.14183E0	5.10216E-3	9.377E-2	2.72611E1	-3.26631E1	-3.2588E1	2.68115E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.19111E-1	-7.98893E-1	-9.13045E0	-9.14207E0	5.14984E-3	9.36508E-2	2.72941E1	-3.26499E1	-3.26193E1	2.68058E1	1.19974E-7	2.51606E-3	2.51606E-3	6.31462E-3	3.00174E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0958E0	-8.19039E-1	-7.98535E-1	-9.13076E0	-9.14218E0	5.126E-3	9.37223E-2	2.73505E1	-3.26585E1	-3.26467E1	2.6807E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.18825E-1	-7.98583E-1	-9.131E0	-9.14214E0	5.17368E-3	9.39608E-2	2.72793E1	-3.26506E1	-3.26699E1	2.68041E1	1.19851E-7	2.51203E-3	2.51203E-3	6.32356E-3	2.99941E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09657E0	-8.18706E-1	-7.98321E-1	-9.131E0	-9.14209E0	5.03063E-3	9.37223E-2	2.73287E1	-3.26673E1	-3.26089E1	2.67929E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.19302E-1	-7.98726E-1	-9.13074E0	-9.1418E0	4.79221E-3	9.37939E-2	2.72144E1	-3.26711E1	-3.26326E1	2.68052E1	1.198E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0071E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.18968E-1	-7.98988E-1	-9.1306E0	-9.14197E0	5.05447E-3	9.36985E-2	2.73141E1	-3.26543E1	-3.2635E1	2.68208E1	1.19809E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09533E0	-8.19016E-1	-7.98726E-1	-9.13043E0	-9.14195E0	4.79221E-3	9.35555E-2	2.72296E1	-3.26585E1	-3.26042E1	2.67932E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.1923E-1	-7.98607E-1	-9.13069E0	-9.14209E0	5.03063E-3	9.39131E-2	2.73134E1	-3.26655E1	-3.2613E1	2.67856E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.19254E-1	-7.98678E-1	-9.13076E0	-9.14202E0	4.8399E-3	9.37462E-2	2.73009E1	-3.26711E1	-3.26416E1	2.681E1	1.19953E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.01738E-1
