[Scan]
initial_time=2016-01-28T21:10:08
final_time=2016-01-28T21:10:27
ip_count=19
run=1026
dataset=8
scan=567
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-8.18658E-1
ql1_imon=1.44952E-8
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=1.98661E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=2.23296E-9
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-3.94332E-10
mult1=-1.01877E-8
mult2=-2.84145E-9
rf_tmon=-3.31447E-3
rf_agc=3.39594E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.65483E-9
bslens_vset=-6.2E0
bslens_vmon=-6.59994E0
bslens_imon=2.53204E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19872E1
lens5a_imon=2.03349E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12432E2
lens4a_imon=2.05045E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53664E1
cs_ef1b_imon=3.19389E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04627E2
lens23_imon=1.02463E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04645E1
cs_ea1_imon=1.07521E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44663E0
lens1_imon=2.7818E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64723E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0377E1
cs_ea2_imon=1.40982E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84172E1
cs_ef1a_imon=3.04793E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.12285E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11189E1
os_restr1_imon=4.30608E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15294E1
os_ea1_imon=2.4647E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20986E0
cs_ionrep_imon=9.5364E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91913E2
cs_nozzle_imon=1.93358E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01611E1
cs_anode1_imon=1.97215E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.08591E-8
tplens_vset=1.4E-1
tplens_vmon=1.64205E0
tplens_imon=-1.27192E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2616E1
iondef3_imon=1.48769E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.57694E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02932E2
lens6_imon=2.98192E-4
ql6_vset=1.0E-1
ql6_vmon=9.40323E-2
ql6_imon=3.94158E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30474E0
ionrepsh_imon=8.61815E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33927E1
lens5b_imon=2.15617E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74838E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44309E0
os_ea2_imon=-5.45911E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06096E2
lens4b_imon=2.00237E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.20543E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.10982E0
os_ef2alow_imon=-2.51859E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.23238E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.3604E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23052E2
cs_ionfoca_imon=6.32316E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.08784E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73207E1
iondef1_imon=1.07191E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67864E1
iondef4_imon=1.09999E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.74598E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.07702E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10672E0
cs_ionaccel_imon=-9.04015E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47324E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56573E1
einzel_imon=7.75271E-6
window_vset=0.0E0
window_vmon=2.11336E-1
window_imon=-9.61679E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39383E-4
mask2_vset=0.0E0
mask2_vmon=-1.87203E1
mask2_imon=-4.5352E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92661E3
multa_neg_imon=7.52728E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.63475E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.59707E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43113E0
defgridb_imon=6.44375E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33216E1
os_fil1_imon=9.41375E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07702E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59941E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31784E1
cs_fil1_imon=7.0287E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.3893E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61506E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.17243E-2
os_fil2_imon=-2.48577E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06724E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.46783E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29522E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.218E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31251E-3
inlet_lpb_pmon=2.99906E-1
chamber_ion_pmon=1.20016E-7
chamber_cvt_pmon=2.51854E-3
foreline_cvt_pmon=2.51854E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19959E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=151
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.0958E0	-8.19254E-1	-7.98893E-1	-9.13053E0	-9.14216E0	4.74453E-3	9.36985E-2	2.73322E1	-3.26844E1	-3.2636E1	2.67914E1	1.19766E-7	2.5147E-3	2.5147E-3	6.32418E-3	3.0041E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.18825E-1	-7.99251E-1	-9.13038E0	-9.14187E0	4.673E-3	9.39369E-2	2.73177E1	-3.26663E1	-3.26374E1	2.6804E1	1.20092E-7	2.51287E-3	2.51287E-3	6.29684E-3	2.98592E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.18944E-1	-7.98965E-1	-9.13043E0	-9.14209E0	4.98295E-3	9.40084E-2	2.73103E1	-3.2644E1	-3.26648E1	2.68146E1	1.19819E-7	2.5147E-3	2.5147E-3	6.31299E-3	2.98819E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.19063E-1	-7.98917E-1	-9.13064E0	-9.14223E0	4.74453E-3	9.377E-2	2.72847E1	-3.2647E1	-3.2632E1	2.67956E1	1.20142E-7	2.52871E-3	2.52871E-3	6.2863E-3	2.99343E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.18896E-1	-7.98655E-1	-9.13064E0	-9.14211E0	4.98295E-3	9.36508E-2	2.72806E1	-3.26676E1	-3.26334E1	2.68051E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.18777E-1	-7.98893E-1	-9.13062E0	-9.1418E0	4.79221E-3	9.35078E-2	2.73134E1	-3.26543E1	-3.26054E1	2.67862E1	1.20137E-7	2.51915E-3	2.51915E-3	6.34099E-3	3.00676E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09487E0	-8.18872E-1	-7.9875E-1	-9.13053E0	-9.14187E0	4.81606E-3	9.37939E-2	2.73216E1	-3.26462E1	-3.26242E1	2.68308E1	1.20158E-7	2.51525E-3	2.51525E-3	6.35601E-3	3.0148E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09449E0	-8.1892E-1	-7.98726E-1	-9.1305E0	-9.14192E0	4.86374E-3	9.35078E-2	2.72871E1	-3.265E1	-3.26422E1	2.68184E1	1.20137E-7	2.51804E-3	2.51804E-3	6.34661E-3	3.01475E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.18634E-1	-7.98821E-1	-9.13079E0	-9.14197E0	4.93526E-3	9.34601E-2	2.72727E1	-3.26334E1	-3.26248E1	2.681E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.1892E-1	-7.98917E-1	-9.13079E0	-9.1418E0	4.64916E-3	9.35078E-2	2.73069E1	-3.26773E1	-3.26172E1	2.67878E1	1.20174E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00302E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.18682E-1	-7.98821E-1	-9.13086E0	-9.14211E0	5.00679E-3	9.35316E-2	2.72961E1	-3.26801E1	-3.26512E1	2.68076E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.03449E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.18872E-1	-7.98655E-1	-9.13079E0	-9.14168E0	5.00679E-3	9.38654E-2	2.73057E1	-3.26729E1	-3.26182E1	2.6785E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.02659E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.19111E-1	-7.98512E-1	-9.13062E0	-9.14166E0	4.95911E-3	9.39608E-2	2.73334E1	-3.26738E1	-3.25936E1	2.67974E1	1.20414E-7	2.50989E-3	2.50989E-3	6.31817E-3	3.00966E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09595E0	-8.18896E-1	-7.98464E-1	-9.1306E0	-9.14195E0	5.05447E-3	9.35316E-2	2.72449E1	-3.26891E1	-3.26284E1	2.67908E1	1.20106E-7	2.52061E-3	2.52061E-3	6.29665E-3	2.9892E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.18992E-1	-7.98821E-1	-9.1311E0	-9.14195E0	4.98295E-3	9.36747E-2	2.72941E1	-3.26621E1	-3.26438E1	2.68244E1	1.20069E-7	2.52318E-3	2.52318E-3	6.30192E-3	2.96929E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.18944E-1	-7.9875E-1	-9.13084E0	-9.14195E0	4.98295E-3	9.37223E-2	2.73139E1	-3.26673E1	-3.26508E1	2.67782E1	1.20084E-7	2.51915E-3	2.51915E-3	6.30182E-3	3.0041E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09487E0	-8.18968E-1	-7.98893E-1	-9.13074E0	-9.14197E0	5.14984E-3	9.36031E-2	2.73177E1	-3.26633E1	-3.26176E1	2.67879E1	1.20004E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01995E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.18849E-1	-7.98678E-1	-9.13091E0	-9.14171E0	4.95911E-3	9.39131E-2	2.72856E1	-3.26691E1	-3.25977E1	2.68208E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.03286E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.1861E-1	-7.98988E-1	-9.13117E0	-9.14185E0	4.64916E-3	9.35555E-2	2.72872E1	-3.26808E1	-3.26042E1	2.68138E1	1.20226E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.01347E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.18658E-1	-7.99036E-1	-9.13131E0	-9.14178E0	4.8399E-3	9.40323E-2	2.73207E1	-3.26585E1	-3.2616E1	2.67864E1	1.20016E-7	2.51854E-3	2.51854E-3	6.31251E-3	2.99906E-1
