[Scan]
initial_time=2016-01-28T21:11:00
final_time=2016-01-28T21:11:20
ip_count=19
run=1026
dataset=8
scan=569
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08842E-4
ql1_vset=
ql1_vmon=-8.18086E-1
ql1_imon=1.42751E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=2.00856E-9
ql3_vset=
ql3_vmon=-9.13103E0
ql3_imon=1.61617E-9
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=-3.30496E-10
mult1=-1.00655E-8
mult2=-2.82241E-9
rf_tmon=-3.03439E-3
rf_agc=3.41447E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.62532E-3
ql5_imon=1.70462E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63259E0
bslens_imon=2.58927E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.196E1
lens5a_imon=1.99324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1245E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53574E1
cs_ef1b_imon=3.1813E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04606E2
lens23_imon=1.02181E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05E1
cs_ea1_imon=1.07618E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43509E0
lens1_imon=2.7804E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64817E1
os_ef1alow_imon=2.98113E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03979E1
cs_ea2_imon=1.39579E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=3.04334E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.12288E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11413E1
os_restr1_imon=4.30937E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15341E1
os_ea1_imon=2.46221E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63554E1
os_ef1bup_imon=3.10207E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24443E0
cs_ionrep_imon=9.28937E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93544E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01798E1
cs_anode1_imon=1.96358E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20506E0
olens4_imon=3.09523E-8
tplens_vset=1.4E-1
tplens_vmon=1.62138E0
tplens_imon=-2.95348E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.51931E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26723E1
iondef2_imon=1.58904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98356E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=4.04694E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25977E0
ionrepsh_imon=8.70537E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33711E1
lens5b_imon=2.17304E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74548E1
cs_ef2b_imon=3.13091E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45561E0
os_ea2_imon=-5.99737E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06068E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71061E1
cs_ef2a_imon=3.19104E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07657E0
os_ef2alow_imon=-2.5294E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88543E-1
os_ef2bup_imon=-5.28876E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.37175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.31415E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0163E1
cs_anode2_imon=2.09981E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72781E1
iondef1_imon=1.09706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68065E1
iondef4_imon=1.09268E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=5.74424E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.09816E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13188E0
cs_ionaccel_imon=-8.16104E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47351E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56382E1
einzel_imon=7.73997E-6
window_vset=0.0E0
window_vmon=2.40275E-1
window_imon=-9.41213E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82652E2
mask1_imon=2.39188E-4
mask2_vset=0.0E0
mask2_vmon=-1.86906E1
mask2_imon=-5.58936E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.82052E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93724E3
defgrida_imon=6.88257E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50144E3
multb_neg_imon=7.28607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44099E0
defgridb_imon=6.10036E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33164E1
os_fil1_imon=9.39663E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08024E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59941E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31781E1
cs_fil1_imon=7.52489E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.70851E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61476E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.00303E-2
os_fil2_imon=-2.44909E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.173E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.52492E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.28279E-1
cs_fil2_imon=-2.23478E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39107E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21776E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32356E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.19595E-7
chamber_cvt_pmon=2.51954E-3
foreline_cvt_pmon=2.51954E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95117E-1
res40_imon=-2.40429E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09657E0	-8.18205E-1	-7.99131E-1	-9.13115E0	-9.14197E0	4.8399E-3	9.36031E-2	2.72961E1	-3.26708E1	-3.26098E1	2.67791E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.99686E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09627E0	-8.18276E-1	-7.98893E-1	-9.13107E0	-9.1419E0	4.81606E-3	9.40084E-2	2.7333E1	-3.26565E1	-3.26254E1	2.68082E1	1.2029E-7	2.52725E-3	2.52725E-3	6.31744E-3	2.99101E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.18062E-1	-7.98798E-1	-9.13095E0	-9.14207E0	4.98295E-3	9.34839E-2	2.7337E1	-3.26626E1	-3.26166E1	2.68157E1	1.19862E-7	2.51588E-3	2.51588E-3	6.33767E-3	2.98592E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.18181E-1	-7.98678E-1	-9.13095E0	-9.14187E0	5.22137E-3	9.37939E-2	2.72426E1	-3.26697E1	-3.26567E1	2.67968E1	1.1974E-7	2.51814E-3	2.51814E-3	6.31269E-3	2.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.18324E-1	-7.98535E-1	-9.13119E0	-9.14204E0	4.98295E-3	9.40084E-2	2.7288E1	-3.26689E1	-3.26266E1	2.68166E1	1.20069E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0958E0	-8.18157E-1	-7.99084E-1	-9.13091E0	-9.14221E0	5.17368E-3	9.377E-2	2.73529E1	-3.26738E1	-3.26331E1	2.67866E1	1.20226E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.1811E-1	-7.99012E-1	-9.13112E0	-9.14214E0	5.22137E-3	9.377E-2	2.72745E1	-3.26248E1	-3.26187E1	2.67956E1	1.19953E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.18086E-1	-7.98893E-1	-9.13088E0	-9.14226E0	5.14984E-3	9.36747E-2	2.73039E1	-3.26531E1	-3.26325E1	2.67842E1	1.19766E-7	2.51025E-3	2.51025E-3	6.31299E-3	2.99879E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09533E0	-8.18205E-1	-7.98774E-1	-9.13117E0	-9.14197E0	5.03063E-3	9.35793E-2	2.72745E1	-3.26434E1	-3.26122E1	2.68088E1	1.20069E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09549E0	-8.18133E-1	-7.98702E-1	-9.13103E0	-9.14185E0	4.88758E-3	9.38416E-2	2.72745E1	-3.26494E1	-3.26452E1	2.67824E1	1.19953E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.00966E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.18348E-1	-7.98798E-1	-9.13091E0	-9.14164E0	5.05447E-3	9.37223E-2	2.7321E1	-3.26602E1	-3.26331E1	2.68058E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32386E-3	3.00824E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09557E0	-8.18086E-1	-7.98631E-1	-9.13095E0	-9.14187E0	4.76837E-3	9.37223E-2	2.73213E1	-3.26945E1	-3.26356E1	2.68059E1	1.19965E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.18157E-1	-7.98655E-1	-9.13119E0	-9.14192E0	4.52995E-3	9.408E-2	2.72937E1	-3.26801E1	-3.26494E1	2.67926E1	1.19851E-7	2.52061E-3	2.52061E-3	6.29128E-3	3.01223E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.17966E-1	-7.98368E-1	-9.13122E0	-9.14195E0	4.81606E-3	9.41038E-2	2.73045E1	-3.26494E1	-3.26362E1	2.68148E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.18086E-1	-7.98583E-1	-9.13091E0	-9.1418E0	4.8399E-3	9.37462E-2	2.72833E1	-3.26455E1	-3.26166E1	2.68322E1	1.20069E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.01347E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09711E0	-8.17966E-1	-7.98488E-1	-9.13088E0	-9.14187E0	4.76837E-3	9.37939E-2	2.73124E1	-3.2664E1	-3.25856E1	2.68022E1	1.19953E-7	2.52492E-3	2.52492E-3	6.32356E-3	3.00453E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.18205E-1	-7.98392E-1	-9.13076E0	-9.14218E0	4.86374E-3	9.36747E-2	2.73069E1	-3.26691E1	-3.25971E1	2.68196E1	1.20191E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.00942E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09603E0	-8.18014E-1	-7.98917E-1	-9.13084E0	-9.14187E0	4.88758E-3	9.37462E-2	2.7298E1	-3.26425E1	-3.26254E1	2.6796E1	1.2026E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.17966E-1	-7.98726E-1	-9.13103E0	-9.14183E0	4.79221E-3	9.36508E-2	2.72958E1	-3.26619E1	-3.26237E1	2.6792E1	1.19749E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.18086E-1	-7.98655E-1	-9.13103E0	-9.14209E0	4.62532E-3	9.38177E-2	2.72781E1	-3.26723E1	-3.26302E1	2.68065E1	1.19595E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.02253E-1
