[Scan]
initial_time=2016-01-28T21:11:27
final_time=2016-01-28T21:11:46
ip_count=19
run=1026
dataset=8
scan=570
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08839E-4
ql1_vset=
ql1_vmon=-8.1768E-1
ql1_imon=1.42126E-8
ql2_vset=
ql2_vmon=-7.98965E-1
ql2_imon=2.0238E-9
ql3_vset=
ql3_vmon=-9.13122E0
ql3_imon=1.4004E-9
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-3.42429E-10
mult1=-9.70033E-9
mult2=-2.67818E-9
rf_tmon=-4.21452E-3
rf_agc=3.34743E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.6923E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64949E0
bslens_imon=2.60419E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19782E1
lens5a_imon=1.98218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.05065E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53664E1
cs_ef1b_imon=3.17371E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02274E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05005E1
cs_ea1_imon=1.08949E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38241E0
lens1_imon=2.79538E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.98486E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0431E1
cs_ea2_imon=1.40757E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84316E1
cs_ef1a_imon=3.04397E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.12492E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1128E1
os_restr1_imon=4.31437E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1519E1
os_ea1_imon=2.46816E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63701E1
os_ef1bup_imon=3.09154E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25326E0
cs_ionrep_imon=9.53922E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91895E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=1.96134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.09219E-8
tplens_vset=1.4E-1
tplens_vmon=1.63506E0
tplens_imon=-2.5673E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26301E1
iondef3_imon=1.49343E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26767E1
iondef2_imon=1.58068E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0294E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.32693E-2
ql6_imon=3.97753E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.19764E0
ionrepsh_imon=8.60412E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33686E1
lens5b_imon=2.18693E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.13947E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43228E0
os_ea2_imon=-6.94732E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06059E2
lens4b_imon=2.00543E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71114E1
cs_ef2a_imon=3.20002E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07318E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.758E-1
os_ef2bup_imon=-5.13147E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10931E1
os_restr2_imon=3.37517E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23094E2
cs_ionfoca_imon=6.30623E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01911E1
cs_anode2_imon=2.09973E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73293E1
iondef1_imon=1.10722E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67758E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.74842E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82404E-1
olens1_imon=7.08653E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12594E0
cs_ionaccel_imon=-7.45441E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02062E2
cs_ionfocb_imon=1.47396E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56501E1
einzel_imon=7.81398E-6
window_vset=0.0E0
window_vmon=2.45574E-1
window_imon=-1.12025E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.86716E1
mask2_imon=-4.93163E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92702E3
multa_neg_imon=8.41292E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.55316E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.41873E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43551E0
defgridb_imon=6.18815E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33197E1
os_fil1_imon=9.4012E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07708E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59853E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31745E1
cs_fil1_imon=7.63537E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.23313E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61278E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.21514E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.10328E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.60725E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3017E-1
cs_fil2_imon=-1.92115E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27437E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21597E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=2.99941E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.24764E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=206
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.17633E-1	-7.98559E-1	-9.13098E0	-9.14168E0	4.45843E-3	9.37462E-2	2.73149E1	-3.26505E1	-3.26297E1	2.68094E1	1.20092E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.98842E-1
2.0E0	4.4E1	0.0E0	3.16E2	1.6E2	-2.09572E0	-8.1737E-1	-7.98488E-1	-9.13069E0	-9.14199E0	4.62532E-3	9.40323E-2	2.73124E1	-3.26658E1	-3.26358E1	2.6792E1	1.20244E-7	2.51804E-3	2.51804E-3	6.31858E-3	2.99613E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.17347E-1	-7.98583E-1	-9.13091E0	-9.1419E0	4.48227E-3	9.40323E-2	2.72981E1	-3.267E1	-3.2626E1	2.68034E1	1.20297E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.03349E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09603E0	-8.18062E-1	-7.98464E-1	-9.13093E0	-9.14183E0	4.72069E-3	9.38177E-2	2.73381E1	-3.26723E1	-3.26032E1	2.68059E1	1.19891E-7	2.52236E-3	2.52236E-3	6.31269E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09565E0	-8.17966E-1	-7.98583E-1	-9.13105E0	-9.1418E0	4.57764E-3	9.35078E-2	2.72985E1	-3.26741E1	-3.26428E1	2.68138E1	1.20174E-7	2.5199E-3	2.5199E-3	6.29098E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.1768E-1	-7.98678E-1	-9.13079E0	-9.1418E0	4.81606E-3	9.35316E-2	2.72968E1	-3.26767E1	-3.26349E1	2.68059E1	1.20122E-7	2.52647E-3	2.52647E-3	6.32936E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09696E0	-8.17537E-1	-7.98678E-1	-9.13138E0	-9.14161E0	5.17368E-3	9.37462E-2	2.72127E1	-3.26897E1	-3.2607E1	2.67914E1	1.20004E-7	2.51203E-3	2.51203E-3	6.3074E-3	2.99686E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09619E0	-8.1768E-1	-7.98726E-1	-9.13129E0	-9.14159E0	4.98295E-3	9.377E-2	2.73328E1	-3.2675E1	-3.25841E1	2.67932E1	1.20174E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09588E0	-8.17966E-1	-7.98583E-1	-9.13117E0	-9.1414E0	4.79221E-3	9.36508E-2	2.73508E1	-3.26446E1	-3.26188E1	2.6849E1	1.2033E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.02922E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.17895E-1	-7.99084E-1	-9.13126E0	-9.14178E0	4.8399E-3	9.37223E-2	2.72708E1	-3.26627E1	-3.26425E1	2.68028E1	1.2033E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02922E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.178E-1	-7.99251E-1	-9.131E0	-9.14192E0	5.24521E-3	9.33647E-2	2.73187E1	-3.26531E1	-3.26183E1	2.68196E1	1.19861E-7	2.5188E-3	2.5188E-3	6.34037E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.18014E-1	-7.99012E-1	-9.13103E0	-9.14171E0	4.98295E-3	9.33886E-2	2.73375E1	-3.26771E1	-3.26326E1	2.6804E1	1.19965E-7	2.51552E-3	2.51552E-3	6.30192E-3	2.9952E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.17776E-1	-7.98941E-1	-9.13124E0	-9.14171E0	5.126E-3	9.31978E-2	2.73009E1	-3.26711E1	-3.26014E1	2.68166E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.01347E-1
1.7E1	0.0E0	1.0E0	6.87E2	4.7E2	-2.09595E0	-8.17943E-1	-7.99274E-1	-9.13124E0	-9.14164E0	4.81606E-3	9.3627E-2	2.73399E1	-3.26645E1	-3.26194E1	2.6801E1	1.19757E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09549E0	-8.17895E-1	-7.99155E-1	-9.13103E0	-9.14202E0	4.91142E-3	9.32932E-2	2.72426E1	-3.26819E1	-3.26494E1	2.68605E1	1.20174E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.97963E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.17776E-1	-7.98845E-1	-9.13122E0	-9.14173E0	5.19753E-3	9.35316E-2	2.73098E1	-3.26349E1	-3.26001E1	2.67782E1	1.20004E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.9943E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09472E0	-8.1749E-1	-7.9875E-1	-9.13095E0	-9.1418E0	4.93526E-3	9.33647E-2	2.72769E1	-3.26795E1	-3.26086E1	2.6794E1	1.19705E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09595E0	-8.17585E-1	-7.98869E-1	-9.13107E0	-9.14209E0	4.93526E-3	9.32693E-2	2.74349E1	-3.26374E1	-3.26314E1	2.68005E1	1.19902E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.00197E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.17752E-1	-7.98941E-1	-9.13124E0	-9.14204E0	4.81606E-3	9.35316E-2	2.72721E1	-3.26767E1	-3.26248E1	2.67914E1	1.20122E-7	2.52099E-3	2.52099E-3	6.29645E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.1768E-1	-7.98965E-1	-9.13122E0	-9.14199E0	4.64916E-3	9.32693E-2	2.73293E1	-3.26767E1	-3.26301E1	2.67758E1	1.20106E-7	2.51525E-3	2.51525E-3	6.33436E-3	2.99941E-1
