[Scan]
initial_time=2016-01-28T21:12:20
final_time=2016-01-28T21:12:40
ip_count=19
run=1026
dataset=8
scan=572
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09449E0
qbias_imon=-1.08775E-4
ql1_vset=
ql1_vmon=-8.17752E-1
ql1_imon=1.42E-8
ql2_vset=
ql2_vmon=-7.99155E-1
ql2_imon=1.98815E-9
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=1.19057E-9
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-2.85816E-10
mult1=-1.02727E-8
mult2=-2.80124E-9
rf_tmon=-4.50936E-3
rf_agc=3.3812E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.71458E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62787E0
bslens_imon=2.84765E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19978E1
lens5a_imon=1.97696E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1246E2
lens4a_imon=2.05097E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53551E1
cs_ef1b_imon=3.17018E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02404E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04776E1
cs_ea1_imon=1.08927E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43214E0
lens1_imon=2.66006E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64707E1
os_ef1alow_imon=2.98461E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03885E1
cs_ea2_imon=1.37703E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84342E1
cs_ef1a_imon=3.04229E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.11959E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11401E1
os_restr1_imon=4.31875E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15258E1
os_ea1_imon=2.48628E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63618E1
os_ef1bup_imon=3.09234E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2226E0
cs_ionrep_imon=9.30707E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91867E2
cs_nozzle_imon=1.93537E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01792E1
cs_anode1_imon=1.96705E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.08723E-8
tplens_vset=1.4E-1
tplens_vmon=1.67919E0
tplens_imon=-1.89165E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2634E1
iondef3_imon=1.51188E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26536E1
iondef2_imon=1.56603E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.95364E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27569E0
ionrepsh_imon=8.52132E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.17198E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74542E1
cs_ef2b_imon=3.13369E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43674E0
os_ea2_imon=-5.85579E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06132E2
lens4b_imon=2.00616E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71223E1
cs_ef2a_imon=3.18965E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07136E0
os_ef2alow_imon=-2.52593E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.50315E-1
os_ef2bup_imon=-5.21925E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10926E1
os_restr2_imon=3.37627E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.31627E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01323E1
cs_anode2_imon=2.11127E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72916E1
iondef1_imon=1.06131E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6813E1
iondef4_imon=1.08885E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=5.77539E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.06196E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11914E0
cs_ionaccel_imon=-8.47382E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56307E1
einzel_imon=7.71217E-6
window_vset=0.0E0
window_vmon=2.46067E-1
window_imon=-1.05242E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8263E2
mask1_imon=2.3932E-4
mask2_vset=0.0E0
mask2_vmon=-1.86547E1
mask2_imon=-5.13757E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92551E3
multa_neg_imon=8.47177E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.54987E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50127E3
multb_neg_imon=7.17634E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37012E0
defgridb_imon=6.06851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.40016E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08128E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59903E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31763E1
cs_fil1_imon=7.94192E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.26831E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6141E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.16765E-2
os_fil2_imon=-2.47805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.06295E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.66286E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30026E-1
cs_fil2_imon=-2.36221E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.47216E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21751E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.01347E-1
chamber_ion_pmon=1.19809E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.67315E-1
res40_imon=-2.31046E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09464E0	-8.17728E-1	-7.98821E-1	-9.13105E0	-9.14195E0	4.72069E-3	9.38654E-2	2.72102E1	-3.26738E1	-3.25923E1	2.68184E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00966E-1
2.0E0	3.1E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.17227E-1	-7.98774E-1	-9.13107E0	-9.14216E0	5.03063E-3	9.38177E-2	2.74132E1	-3.26362E1	-3.26224E1	2.67882E1	1.19925E-7	2.52139E-3	2.52139E-3	6.34099E-3	2.99613E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.17394E-1	-7.98774E-1	-9.13095E0	-9.14156E0	5.00679E-3	9.3627E-2	2.73086E1	-3.26703E1	-3.26467E1	2.68285E1	1.1966E-7	2.51804E-3	2.51804E-3	6.32978E-3	2.99083E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09518E0	-8.17943E-1	-7.98249E-1	-9.13086E0	-9.14159E0	4.95911E-3	9.32455E-2	2.71482E1	-3.26555E1	-3.26183E1	2.68112E1	1.20092E-7	2.51919E-3	2.51919E-3	6.32858E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.178E-1	-7.98535E-1	-9.13107E0	-9.14176E0	4.93526E-3	9.36031E-2	2.72865E1	-3.26771E1	-3.26272E1	2.68221E1	1.20226E-7	2.52757E-3	2.52757E-3	6.31837E-3	3.02922E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09464E0	-8.17347E-1	-7.98416E-1	-9.13112E0	-9.14197E0	4.8399E-3	9.35078E-2	2.73472E1	-3.26585E1	-3.26386E1	2.67992E1	1.20004E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.9892E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.17513E-1	-7.98869E-1	-9.1311E0	-9.14202E0	5.05447E-3	9.37223E-2	2.7262E1	-3.26608E1	-3.26502E1	2.6804E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31288E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.17537E-1	-7.98464E-1	-9.131E0	-9.14154E0	4.91142E-3	9.36985E-2	2.73874E1	-3.26609E1	-3.25924E1	2.68256E1	1.19705E-7	2.51334E-3	2.51334E-3	6.34588E-3	2.9952E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.1749E-1	-7.98535E-1	-9.13098E0	-9.14173E0	5.00679E-3	9.36031E-2	2.71464E1	-3.26408E1	-3.26296E1	2.68176E1	1.20122E-7	2.52318E-3	2.52318E-3	6.3074E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0948E0	-8.17657E-1	-7.98702E-1	-9.13115E0	-9.14195E0	4.95911E-3	9.38177E-2	2.74202E1	-3.26842E1	-3.25923E1	2.68162E1	1.20042E-7	2.51814E-3	2.51814E-3	6.32858E-3	3.00348E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0958E0	-8.17657E-1	-7.98488E-1	-9.13091E0	-9.14197E0	4.98295E-3	9.38177E-2	2.72883E1	-3.26771E1	-3.26458E1	2.67728E1	1.19925E-7	2.51693E-3	2.51693E-3	6.28511E-3	3.02277E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09541E0	-8.17585E-1	-7.98655E-1	-9.13095E0	-9.14173E0	4.95911E-3	9.36985E-2	2.73517E1	-3.26296E1	-3.26425E1	2.68076E1	1.20017E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00563E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09565E0	-8.178E-1	-7.98631E-1	-9.13086E0	-9.14166E0	4.88758E-3	9.34601E-2	2.72805E1	-3.26669E1	-3.2605E1	2.68012E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.17823E-1	-7.98583E-1	-9.13086E0	-9.14159E0	4.57764E-3	9.36508E-2	2.73454E1	-3.26277E1	-3.26053E1	2.67902E1	1.2026E-7	2.51525E-3	2.51525E-3	6.35059E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09588E0	-8.17728E-1	-7.98655E-1	-9.13117E0	-9.14166E0	4.8399E-3	9.37939E-2	2.73242E1	-3.26604E1	-3.26317E1	2.68057E1	1.20161E-7	2.52466E-3	2.52466E-3	6.3074E-3	3.02342E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09503E0	-8.17728E-1	-7.98965E-1	-9.13115E0	-9.14156E0	4.74453E-3	9.36985E-2	2.73243E1	-3.26687E1	-3.26182E1	2.6819E1	1.20005E-7	2.51296E-3	2.51296E-3	6.33065E-3	3.00916E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09495E0	-8.17633E-1	-7.98583E-1	-9.13095E0	-9.14183E0	5.126E-3	9.37223E-2	2.73144E1	-3.26637E1	-3.26214E1	2.68018E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.01347E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.17847E-1	-7.98988E-1	-9.1311E0	-9.14207E0	4.88758E-3	9.36508E-2	2.73231E1	-3.26654E1	-3.25976E1	2.68076E1	1.1979E-7	2.50762E-3	2.50762E-3	6.30212E-3	3.006E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.17609E-1	-7.99036E-1	-9.13088E0	-9.14204E0	4.91142E-3	9.35078E-2	2.72998E1	-3.26626E1	-3.26048E1	2.68208E1	1.20344E-7	2.52025E-3	2.52025E-3	6.32858E-3	3.00852E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09449E0	-8.17752E-1	-7.99155E-1	-9.13107E0	-9.14185E0	5.00679E-3	9.3627E-2	2.72916E1	-3.26536E1	-3.2634E1	2.6813E1	1.19809E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01347E-1
