[Scan]
initial_time=2016-01-28T21:13:40
final_time=2016-01-28T21:14:00
ip_count=19
run=1026
dataset=8
scan=575
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08826E-4
ql1_vset=
ql1_vmon=-8.17561E-1
ql1_imon=1.4129E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=2.03533E-9
ql3_vset=
ql3_vmon=-9.13115E0
ql3_imon=9.39536E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-2.88057E-10
mult1=-9.84219E-9
mult2=-2.61351E-9
rf_tmon=-4.48588E-3
rf_agc=3.32501E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.70919E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6143E0
bslens_imon=2.53972E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19724E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12436E2
lens4a_imon=2.05153E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.18416E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04578E2
lens23_imon=1.02096E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04935E1
cs_ea1_imon=1.10414E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42447E0
lens1_imon=2.52202E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6459E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.42304E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84454E1
cs_ef1a_imon=3.04793E-5
olens2_vset=9.7E-1
olens2_vmon=9.70626E-1
olens2_imon=1.1196E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11364E1
os_restr1_imon=4.31617E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14869E1
os_ea1_imon=2.45938E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.08469E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26095E0
cs_ionrep_imon=9.4982E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93661E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=1.95449E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.08383E-8
tplens_vset=1.4E-1
tplens_vmon=1.64851E0
tplens_imon=-4.44003E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26366E1
iondef3_imon=1.49878E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26467E1
iondef2_imon=1.57983E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98562E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.97542E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31699E0
ionrepsh_imon=8.75492E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33722E1
lens5b_imon=2.18932E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.13371E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43438E0
os_ea2_imon=-6.84683E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.19894E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08099E0
os_ef2alow_imon=-2.56184E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9382E-1
os_ef2bup_imon=-5.25761E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=3.36724E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.30105E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.09757E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73246E1
iondef1_imon=1.09671E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67872E1
iondef4_imon=1.11008E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.74054E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.08175E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13254E0
cs_ionaccel_imon=-8.75184E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02074E2
cs_ionfocb_imon=1.47338E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=2.22148E-1
window_imon=-9.65283E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39246E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92671E3
multa_neg_imon=7.29314E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.99229E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50119E3
multb_neg_imon=7.31084E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.5532E0
defgridb_imon=6.53571E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.4051E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0787E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59961E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31784E1
cs_fil1_imon=7.74949E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.6596E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61304E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.19298E-2
os_fil2_imon=-2.31758E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.24143E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.50847E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29004E-1
cs_fil2_imon=-2.10735E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.6648E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2184E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.46077E-1
res40_imon=-2.38885E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=159
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	7.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.17108E-1	-7.98893E-1	-9.13112E0	-9.14166E0	4.86374E-3	9.37223E-2	2.73634E1	-3.26464E1	-3.26482E1	2.67769E1	1.20106E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.0148E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.17084E-1	-7.98821E-1	-9.13107E0	-9.14166E0	5.126E-3	9.3317E-2	2.72444E1	-3.26927E1	-3.2614E1	2.68002E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09441E0	-8.17156E-1	-7.98965E-1	-9.13122E0	-9.1419E0	4.86374E-3	9.38892E-2	2.72939E1	-3.26838E1	-3.26461E1	2.6825E1	1.19713E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.0041E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09495E0	-8.17251E-1	-7.98869E-1	-9.13107E0	-9.14199E0	5.07832E-3	9.34601E-2	2.72895E1	-3.26344E1	-3.26128E1	2.67722E1	1.20444E-7	2.51814E-3	2.51814E-3	6.3445E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09495E0	-8.17347E-1	-7.98798E-1	-9.13131E0	-9.14199E0	4.98295E-3	9.377E-2	2.72638E1	-3.26278E1	-3.26337E1	2.6783E1	1.20017E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.17156E-1	-7.98845E-1	-9.13119E0	-9.14192E0	4.95911E-3	9.38892E-2	2.73183E1	-3.26573E1	-3.26038E1	2.68406E1	1.20158E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.03027E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0958E0	-8.17227E-1	-7.98917E-1	-9.13117E0	-9.14202E0	5.19753E-3	9.36031E-2	2.73005E1	-3.26391E1	-3.26266E1	2.67949E1	1.19705E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.03449E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.17204E-1	-7.98845E-1	-9.13131E0	-9.14195E0	4.86374E-3	9.33647E-2	2.73544E1	-3.26709E1	-3.26166E1	2.67988E1	1.20028E-7	2.51265E-3	2.51265E-3	6.3126E-3	3.00989E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.17037E-1	-7.9875E-1	-9.131E0	-9.14195E0	4.79221E-3	9.37462E-2	2.7324E1	-3.26337E1	-3.26172E1	2.67986E1	1.19721E-7	2.52407E-3	2.52407E-3	6.3131E-3	2.9944E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0968E0	-8.17084E-1	-7.9875E-1	-9.13141E0	-9.14207E0	4.673E-3	9.35555E-2	2.72174E1	-3.26771E1	-3.26651E1	2.68016E1	1.20055E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.99686E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.16941E-1	-7.98655E-1	-9.13124E0	-9.1418E0	4.41074E-3	9.34601E-2	2.7358E1	-3.26422E1	-3.26585E1	2.68094E1	1.19757E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9978E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09642E0	-8.17037E-1	-7.98678E-1	-9.13146E0	-9.14223E0	5.00679E-3	9.36508E-2	2.72042E1	-3.26615E1	-3.26386E1	2.67978E1	1.20096E-7	2.51826E-3	2.51826E-3	6.30192E-3	3.01871E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09603E0	-8.17084E-1	-7.98678E-1	-9.13134E0	-9.14187E0	4.93526E-3	9.377E-2	2.73227E1	-3.26528E1	-3.26516E1	2.6792E1					
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09565E0	-8.1718E-1	-7.98726E-1	-9.13117E0	-9.14187E0	4.93526E-3	9.35793E-2	2.73437E1	-3.26756E1	-3.26236E1	2.68257E1	1.20276E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09673E0	-8.1737E-1	-7.98202E-1	-9.13098E0	-9.14183E0	4.8399E-3	9.34839E-2	2.72814E1	-3.26695E1	-3.26023E1	2.68214E1	1.20403E-7	2.51915E-3	2.51915E-3	6.3074E-3	2.98554E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09688E0	-8.17132E-1	-7.98941E-1	-9.13115E0	-9.14173E0	4.95911E-3	9.33409E-2	2.73788E1	-3.26567E1	-3.26001E1	2.68034E1	1.20016E-7	2.51342E-3	2.51342E-3	6.32483E-3	2.9937E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09627E0	-8.17394E-1	-7.98535E-1	-9.13112E0	-9.14168E0	4.91142E-3	9.33886E-2	2.72654E1	-3.26717E1	-3.26416E1	2.68099E1	1.20004E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09619E0	-8.17227E-1	-7.98535E-1	-9.13088E0	-9.14192E0	5.00679E-3	9.36508E-2	2.72318E1	-3.26915E1	-3.2629E1	2.68046E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.17537E-1	-7.98488E-1	-9.13088E0	-9.14216E0	4.57764E-3	9.377E-2	2.73423E1	-3.26649E1	-3.26012E1	2.68112E1	1.2033E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.01871E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.17561E-1	-7.98583E-1	-9.13115E0	-9.14202E0	5.03063E-3	9.35316E-2	2.73246E1	-3.26467E1	-3.26366E1	2.67872E1	1.20106E-7	2.51096E-3	2.51096E-3	6.33977E-3	2.9943E-1
