[Scan]
initial_time=2016-01-28T21:15:53
final_time=2016-01-28T21:16:13
ip_count=19
run=1026
dataset=8
scan=580
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08855E-4
ql1_vset=
ql1_vmon=-8.16774E-1
ql1_imon=1.40668E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=2.01384E-9
ql3_vset=
ql3_vmon=-9.13129E0
ql3_imon=5.96118E-10
ql4_vset=
ql4_vmon=-9.14195E0
ql4_imon=-2.93231E-10
mult1=-1.01752E-8
mult2=-2.79377E-9
rf_tmon=-5.47328E-3
rf_agc=3.2568E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.69834E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6409E0
bslens_imon=2.40076E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19725E1
lens5a_imon=2.00506E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12462E2
lens4a_imon=2.05172E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53524E1
cs_ef1b_imon=3.17189E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04582E2
lens23_imon=1.0229E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.047E1
cs_ea1_imon=1.08219E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43324E0
lens1_imon=2.94151E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64571E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04105E1
cs_ea2_imon=1.38934E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84394E1
cs_ef1a_imon=3.05026E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.12319E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11329E1
os_restr1_imon=4.31525E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15071E1
os_ea1_imon=2.47875E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63791E1
os_ef1bup_imon=3.09779E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20523E0
cs_ionrep_imon=9.3403E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.93503E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01778E1
cs_anode1_imon=1.95855E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.09053E-8
tplens_vset=1.4E-1
tplens_vmon=1.65165E0
tplens_imon=-3.02951E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.50325E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26385E1
iondef2_imon=1.59806E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98396E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=3.98049E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25871E0
ionrepsh_imon=8.48593E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33574E1
lens5b_imon=2.18855E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74277E1
cs_ef2b_imon=3.12773E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43715E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00486E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71127E1
cs_ef2a_imon=3.17676E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0689E0
os_ef2alow_imon=-2.44332E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.01998E-1
os_ef2bup_imon=-5.19786E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10874E1
os_restr2_imon=3.36688E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23046E2
cs_ionfoca_imon=6.30974E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01753E1
cs_anode2_imon=2.09515E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73244E1
iondef1_imon=1.10599E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68127E1
iondef4_imon=1.09738E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=5.74614E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.07234E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11767E0
cs_ionaccel_imon=-6.76827E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02094E2
cs_ionfocb_imon=1.47234E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56243E1
einzel_imon=7.71404E-6
window_vset=0.0E0
window_vmon=2.16973E-1
window_imon=-1.02114E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82607E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.86968E1
mask2_imon=-5.87005E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.44049E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93709E3
defgrida_imon=6.7231E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50121E3
multb_neg_imon=7.29629E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.27609E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33189E1
os_fil1_imon=9.40543E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07853E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59687E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.318E1
cs_fil1_imon=7.56722E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.83771E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61401E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.22158E-2
os_fil2_imon=-2.41923E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.08434E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.69734E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.29652E-1
cs_fil2_imon=-2.26329E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.30463E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21772E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3126E-3
inlet_lpb_pmon=3.00741E-1
chamber_ion_pmon=1.1988E-7
chamber_cvt_pmon=2.51058E-3
foreline_cvt_pmon=2.51058E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.43592E-1
res40_imon=-2.50321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=215
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.1749E-1	-7.99036E-1	-9.13107E0	-9.14199E0	4.98295E-3	9.38177E-2	2.71783E1	-3.2635E1	-3.2644E1	2.68105E1	1.19809E-7	2.52209E-3	2.52209E-3	6.32936E-3	3.00041E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.0948E0	-8.17347E-1	-7.98917E-1	-9.13107E0	-9.14207E0	4.76837E-3	9.36985E-2	2.73748E1	-3.2644E1	-3.2632E1	2.68136E1	1.20122E-7	2.52099E-3	2.52099E-3	6.30192E-3	2.9926E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09627E0	-8.16917E-1	-7.9875E-1	-9.13107E0	-9.14192E0	4.57764E-3	9.37462E-2	2.73122E1	-3.2639E1	-3.26272E1	2.67842E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9892E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.1706E-1	-7.98869E-1	-9.13115E0	-9.14202E0	4.43459E-3	9.38177E-2	2.72678E1	-3.26398E1	-3.2641E1	2.68082E1	1.20226E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01609E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16846E-1	-7.98464E-1	-9.13122E0	-9.1418E0	4.62532E-3	9.34601E-2	2.72979E1	-3.26464E1	-3.26176E1	2.68004E1	1.19749E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.16846E-1	-7.9875E-1	-9.13141E0	-9.14192E0	4.55379E-3	9.34601E-2	2.72564E1	-3.26711E1	-3.26428E1	2.68154E1	1.20069E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16894E-1	-7.98607E-1	-9.13148E0	-9.14195E0	4.3869E-3	9.377E-2	2.73375E1	-3.2635E1	-3.26242E1	2.68028E1	1.20278E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.9926E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.16727E-1	-7.98726E-1	-9.1315E0	-9.14192E0	4.41074E-3	9.36508E-2	2.73814E1	-3.26434E1	-3.26092E1	2.67938E1	1.19766E-7	2.51025E-3	2.51025E-3	6.30182E-3	2.99613E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0948E0	-8.17108E-1	-7.98702E-1	-9.13143E0	-9.14195E0	4.45843E-3	9.36508E-2	2.72095E1	-3.26537E1	-3.26101E1	2.67926E1	1.19861E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09402E0	-8.16989E-1	-7.98297E-1	-9.13134E0	-9.14176E0	4.3869E-3	9.34839E-2	2.72847E1	-3.26669E1	-3.26002E1	2.68412E1	1.20311E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.00966E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09449E0	-8.16703E-1	-7.98583E-1	-9.13103E0	-9.14156E0	4.45843E-3	9.36985E-2	2.73003E1	-3.26639E1	-3.26669E1	2.68012E1	1.19913E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16894E-1	-7.98559E-1	-9.13084E0	-9.14195E0	4.74453E-3	9.34601E-2	2.72336E1	-3.26777E1	-3.26567E1	2.67932E1	1.20226E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09495E0	-8.16965E-1	-7.98488E-1	-9.131E0	-9.14204E0	4.74453E-3	9.37223E-2	2.72591E1	-3.26531E1	-3.26366E1	2.68046E1	1.19902E-7	2.51954E-3	2.51954E-3	6.33977E-3	2.99686E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09495E0	-8.17084E-1	-7.98488E-1	-9.13117E0	-9.14195E0	4.69685E-3	9.35793E-2	2.73177E1	-3.26404E1	-3.26374E1	2.6789E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.17275E-1	-7.98345E-1	-9.13095E0	-9.14168E0	4.60148E-3	9.35555E-2	2.7301E1	-3.26673E1	-3.26254E1	2.67966E1	1.19953E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.96128E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09418E0	-8.17108E-1	-7.98726E-1	-9.13138E0	-9.1419E0	4.62532E-3	9.36031E-2	2.73159E1	-3.26651E1	-3.2632E1	2.68022E1	1.19861E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.96929E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09456E0	-8.17323E-1	-7.9844E-1	-9.13165E0	-9.14223E0	4.79221E-3	9.34124E-2	2.73045E1	-3.26325E1	-3.26183E1	2.68256E1	1.19749E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.97901E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.17251E-1	-7.98726E-1	-9.13143E0	-9.14192E0	5.29289E-3	9.40084E-2	2.72913E1	-3.26675E1	-3.26296E1	2.67956E1	1.20435E-7	2.52099E-3	2.52099E-3	6.3514E-3	2.9926E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.17037E-1	-7.98702E-1	-9.13134E0	-9.14207E0	4.86374E-3	9.37462E-2	2.73683E1	-3.26619E1	-3.26363E1	2.68071E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16774E-1	-7.98678E-1	-9.13129E0	-9.14195E0	5.00679E-3	9.36985E-2	2.73244E1	-3.26385E1	-3.2626E1	2.68127E1	1.1988E-7	2.51058E-3	2.51058E-3	6.3126E-3	3.00741E-1
