[Scan]
initial_time=2016-01-28T21:16:20
final_time=2016-01-28T21:16:39
ip_count=19
run=1026
dataset=8
scan=581
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09464E0
qbias_imon=-1.08811E-4
ql1_vset=
ql1_vmon=-8.17132E-1
ql1_imon=1.40158E-8
ql2_vset=
ql2_vmon=-7.99036E-1
ql2_imon=2.01305E-9
ql3_vset=
ql3_vmon=-9.13107E0
ql3_imon=6.12795E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-3.08001E-10
mult1=-9.58386E-9
mult2=-2.69067E-9
rf_tmon=-5.72609E-3
rf_agc=3.09904E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.66765E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6403E0
bslens_imon=2.4981E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20097E1
lens5a_imon=1.99605E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12454E2
lens4a_imon=2.04974E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.17948E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.0224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05144E1
cs_ea1_imon=1.06705E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41282E0
lens1_imon=2.8622E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.97729E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03919E1
cs_ea2_imon=1.38717E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84424E1
cs_ef1a_imon=3.03604E-5
olens2_vset=9.7E-1
olens2_vmon=9.70435E-1
olens2_imon=1.12304E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11262E1
os_restr1_imon=4.3068E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14963E1
os_ea1_imon=2.48344E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63803E1
os_ef1bup_imon=3.0919E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22686E0
cs_ionrep_imon=9.50973E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91872E2
cs_nozzle_imon=1.93517E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01845E1
cs_anode1_imon=1.95809E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20515E0
olens4_imon=3.08433E-8
tplens_vset=1.4E-1
tplens_vmon=1.67568E0
tplens_imon=-1.47938E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26152E1
iondef3_imon=1.48811E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26717E1
iondef2_imon=1.5822E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98656E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=3.98579E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30137E0
ionrepsh_imon=8.59047E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33495E1
lens5b_imon=2.15899E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74609E1
cs_ef2b_imon=3.14416E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43114E0
os_ea2_imon=-4.07495E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00587E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71306E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08699E0
os_ef2alow_imon=-2.47895E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.22878E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10703E1
os_restr2_imon=3.36832E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23015E2
cs_ionfoca_imon=6.31154E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01737E1
cs_anode2_imon=2.09252E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73093E1
iondef1_imon=1.10959E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67908E1
iondef4_imon=1.08737E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.71505E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.05883E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10852E0
cs_ionaccel_imon=-8.31936E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02079E2
cs_ionfocb_imon=1.47291E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56285E1
einzel_imon=7.87525E-6
window_vset=0.0E0
window_vmon=2.35963E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39412E-4
mask2_vset=0.0E0
mask2_vmon=-1.86716E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92602E3
multa_neg_imon=7.5955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93714E3
defgrida_imon=6.66903E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.25664E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51284E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33163E1
os_fil1_imon=9.42522E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07816E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59856E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31797E1
cs_fil1_imon=7.02269E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.22111E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61241E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.10551E-2
os_fil2_imon=-2.39567E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.12731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.64836E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.27839E-1
cs_fil2_imon=-2.01725E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.50262E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21651E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31858E-3
inlet_lpb_pmon=3.01742E-1
chamber_ion_pmon=1.19925E-7
chamber_cvt_pmon=2.5147E-3
foreline_cvt_pmon=2.5147E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.37378E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=168
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09565E0	-8.16703E-1	-7.98273E-1	-9.13138E0	-9.14209E0	5.14984E-3	9.38654E-2	2.7239E1	-3.26625E1	-3.26092E1	2.68394E1	1.19861E-7	2.51552E-3	2.51552E-3	6.33486E-3	2.9874E-1
2.0E0	3.0E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16846E-1	-7.98464E-1	-9.13136E0	-9.14207E0	4.98295E-3	9.38892E-2	2.73906E1	-3.2631E1	-3.26422E1	2.67782E1	1.20092E-7	2.52765E-3	2.52765E-3	6.3074E-3	2.97344E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09433E0	-8.17013E-1	-7.97915E-1	-9.13112E0	-9.14204E0	4.62532E-3	9.37939E-2	2.7319E1	-3.26706E1	-3.26515E1	2.67711E1	1.19883E-7	2.51725E-3	2.51725E-3	6.29603E-3	2.98092E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.16965E-1	-7.98368E-1	-9.13126E0	-9.14164E0	4.79221E-3	9.37939E-2	2.73051E1	-3.26664E1	-3.25979E1	2.68126E1	1.19991E-7	2.51393E-3	2.51393E-3	6.3074E-3	2.97843E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09379E0	-8.16798E-1	-7.98225E-1	-9.13115E0	-9.14199E0	4.74453E-3	9.39369E-2	2.7285E1	-3.26502E1	-3.26154E1	2.68012E1	1.20174E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.1687E-1	-7.9844E-1	-9.131E0	-9.14164E0	4.64916E-3	9.38892E-2	2.72703E1	-3.2652E1	-3.26248E1	2.6792E1	1.20209E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09503E0	-8.16894E-1	-7.98631E-1	-9.13107E0	-9.14183E0	4.31538E-3	9.39369E-2	2.72763E1	-3.26609E1	-3.26158E1	2.68022E1	1.20278E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.02659E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.17108E-1	-7.98988E-1	-9.13124E0	-9.14192E0	4.88758E-3	9.39846E-2	2.72907E1	-3.26254E1	-3.26332E1	2.6813E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0958E0	-8.17156E-1	-7.98607E-1	-9.13126E0	-9.14166E0	4.95911E-3	9.37939E-2	2.72462E1	-3.26464E1	-3.26512E1	2.68148E1	1.20031E-7	2.51693E-3	2.51693E-3	6.36349E-3	3.01209E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.17275E-1	-7.98798E-1	-9.13136E0	-9.14199E0	4.74453E-3	9.377E-2	2.72739E1	-3.26756E1	-3.26248E1	2.68022E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01347E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.17323E-1	-7.98845E-1	-9.13122E0	-9.14185E0	4.98295E-3	9.34839E-2	2.7346E1	-3.26543E1	-3.26218E1	2.68016E1	1.19705E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.17251E-1	-7.98845E-1	-9.13105E0	-9.1419E0	5.10216E-3	9.36985E-2	2.73405E1	-3.26783E1	-3.26002E1	2.6771E1	1.20122E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00041E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.17323E-1	-7.98559E-1	-9.13107E0	-9.14176E0	4.86374E-3	9.39846E-2	2.73234E1	-3.26756E1	-3.25818E1	2.6834E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00824E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.1737E-1	-7.98583E-1	-9.13122E0	-9.1418E0	4.95911E-3	9.37223E-2	2.72582E1	-3.26591E1	-3.26314E1	2.68022E1	1.19965E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00824E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.17204E-1	-7.98631E-1	-9.13129E0	-9.14176E0	4.8399E-3	9.39131E-2	2.7262E1	-3.26862E1	-3.26284E1	2.68005E1	1.19953E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09472E0	-8.1718E-1	-7.98631E-1	-9.13105E0	-9.14185E0	5.05447E-3	9.39846E-2	2.73008E1	-3.26756E1	-3.26052E1	2.68021E1	1.20174E-7	2.5199E-3	2.5199E-3	6.3514E-3	3.00563E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.17227E-1	-7.98607E-1	-9.13119E0	-9.1418E0	4.93526E-3	9.41038E-2	2.73424E1	-3.26795E1	-3.26392E1	2.6783E1	1.20137E-7	2.5225E-3	2.5225E-3	6.34099E-3	3.03081E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0948E0	-8.17347E-1	-7.98607E-1	-9.13126E0	-9.14185E0	4.72069E-3	9.39131E-2	2.72835E1	-3.26636E1	-3.26032E1	2.67864E1	1.20158E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.02769E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.17323E-1	-7.98631E-1	-9.13119E0	-9.14168E0	4.8399E-3	9.38892E-2	2.73063E1	-3.26468E1	-3.26321E1	2.68169E1	1.20177E-7	2.51679E-3	2.51679E-3	6.3074E-3	3.03476E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09464E0	-8.17132E-1	-7.99036E-1	-9.13107E0	-9.14178E0	4.86374E-3	9.38654E-2	2.73093E1	-3.26717E1	-3.26152E1	2.67908E1	1.19925E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.01742E-1
