[Scan]
initial_time=2016-01-28T21:16:47
final_time=2016-01-28T21:17:06
ip_count=19
run=1026
dataset=8
scan=582
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09433E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.39976E-8
ql2_vset=
ql2_vmon=-7.98559E-1
ql2_imon=2.0098E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=5.68724E-10
ql4_vset=
ql4_vmon=-9.14168E0
ql4_imon=-2.61867E-10
mult1=-9.90129E-9
mult2=-2.81341E-9
rf_tmon=-4.79263E-3
rf_agc=3.37633E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.72919E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67094E0
bslens_imon=2.53775E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19911E1
lens5a_imon=1.99569E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12456E2
lens4a_imon=2.05046E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53598E1
cs_ef1b_imon=3.18488E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04593E2
lens23_imon=1.02395E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=1.09012E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40981E0
lens1_imon=2.62427E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03396E1
cs_ea2_imon=1.3933E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8431E1
cs_ef1a_imon=3.04253E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.12412E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11514E1
os_restr1_imon=4.305E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15288E1
os_ea1_imon=2.48704E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63455E1
os_ef1bup_imon=3.09767E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21365E0
cs_ionrep_imon=9.57102E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91899E2
cs_nozzle_imon=1.93319E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01965E1
cs_anode1_imon=1.94656E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.09065E-8
tplens_vset=1.4E-1
tplens_vmon=1.62641E0
tplens_imon=-1.87592E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26024E1
iondef3_imon=1.49784E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26844E1
iondef2_imon=1.58581E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02918E2
lens6_imon=2.98414E-4
ql6_vset=1.0E-1
ql6_vmon=9.39369E-2
ql6_imon=3.96748E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.30016E0
ionrepsh_imon=8.64454E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33513E1
lens5b_imon=2.16476E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74645E1
cs_ef2b_imon=3.14055E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44616E0
os_ea2_imon=-5.98557E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00601E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71228E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06477E0
os_ef2alow_imon=-2.53661E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.20355E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10835E1
os_restr2_imon=3.36544E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23107E2
cs_ionfoca_imon=6.3119E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01815E1
cs_anode2_imon=2.09108E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73021E1
iondef1_imon=1.10563E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.07909E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=5.78709E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.06539E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11332E0
cs_ionaccel_imon=-7.52649E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.4723E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56375E1
einzel_imon=7.97976E-6
window_vset=0.0E0
window_vmon=2.91825E-1
window_imon=-1.02655E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82634E2
mask1_imon=2.39264E-4
mask2_vset=0.0E0
mask2_vmon=-1.86795E1
mask2_imon=-5.7245E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92657E3
multa_neg_imon=7.40444E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.33737E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.28548E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47976E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33202E1
os_fil1_imon=9.41723E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0799E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.59971E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.31783E1
cs_fil1_imon=8.42824E0
cs_fil1_emis_iset=0.0E0
cs_fil1_emis_imon=9.82177E-3
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61245E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=3.02812E-2
os_fil2_imon=-2.4257E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.07925E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=4.56715E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30558E-1
cs_fil2_imon=-2.14339E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21724E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34099E-3
inlet_lpb_pmon=3.00942E-1
chamber_ion_pmon=1.19872E-7
chamber_cvt_pmon=2.52139E-3
foreline_cvt_pmon=2.52139E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=0
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.47589E-1
res40_imon=-2.50418E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.1737E-1	-7.98559E-1	-9.13126E0	-9.14199E0	4.76837E-3	9.377E-2	2.72957E1	-3.26868E1	-3.26413E1	2.68238E1	1.19713E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.99613E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09657E0	-8.17227E-1	-7.98345E-1	-9.13141E0	-9.14195E0	4.72069E-3	9.40084E-2	2.72518E1	-3.26335E1	-3.26648E1	2.68192E1	1.20004E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.17204E-1	-7.98273E-1	-9.13131E0	-9.14202E0	4.69685E-3	9.37462E-2	2.72806E1	-3.26903E1	-3.26272E1	2.6777E1	1.20142E-7	2.51393E-3	2.51393E-3	6.30212E-3	3.00852E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.17084E-1	-7.98631E-1	-9.13136E0	-9.14192E0	4.8399E-3	9.38654E-2	2.74229E1	-3.26506E1	-3.26416E1	2.68064E1	1.2005E-7	2.51346E-3	2.51346E-3	6.32125E-3	3.01278E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09627E0	-8.17299E-1	-7.98559E-1	-9.13093E0	-9.14192E0	4.74453E-3	9.39846E-2	2.72715E1	-3.26464E1	-3.26086E1	2.68052E1	1.19902E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09627E0	-8.17013E-1	-7.98416E-1	-9.13122E0	-9.14204E0	4.86374E-3	9.39131E-2	2.72805E1	-3.26741E1	-3.26356E1	2.67824E1	1.19913E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09619E0	-8.1718E-1	-7.98321E-1	-9.13117E0	-9.14187E0	4.62532E-3	9.40084E-2	2.7367E1	-3.26717E1	-3.26206E1	2.68172E1					
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.16894E-1	-7.98655E-1	-9.13124E0	-9.14211E0	4.33922E-3	9.37462E-2	2.73694E1	-3.26826E1	-3.25552E1	2.68202E1	1.20069E-7	2.52428E-3	2.52428E-3	6.31288E-3	3.01871E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09634E0	-8.17013E-1	-7.9875E-1	-9.13119E0	-9.14192E0	4.3869E-3	9.36747E-2	2.72775E1	-3.26325E1	-3.26503E1	2.68174E1	1.19861E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.16965E-1	-7.98607E-1	-9.13134E0	-9.14197E0	4.72069E-3	9.36747E-2	2.73588E1	-3.26505E1	-3.26249E1	2.67888E1	1.1998E-7	2.51958E-3	2.51958E-3	6.33658E-3	3.00105E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16798E-1	-7.98273E-1	-9.1315E0	-9.1419E0	4.72069E-3	9.38654E-2	2.72727E1	-3.26467E1	-3.25984E1	2.68061E1	1.19795E-7	2.5157E-3	2.5157E-3	6.32197E-3	3.01261E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.17037E-1	-7.98774E-1	-9.13129E0	-9.14185E0	4.93526E-3	9.377E-2	2.73619E1	-3.26457E1	-3.26185E1	2.68151E1	1.19946E-7	2.51529E-3	2.51529E-3	6.30111E-3	3.03572E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09619E0	-8.16655E-1	-7.98512E-1	-9.13117E0	-9.14154E0	4.81606E-3	9.377E-2	2.7206E1	-3.26452E1	-3.25984E1	2.67842E1	1.19941E-7	2.51603E-3	2.51603E-3	6.32858E-3	3.00852E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16679E-1	-7.98488E-1	-9.13148E0	-9.14171E0	5.05447E-3	9.37462E-2	2.74184E1	-3.26496E1	-3.26296E1	2.67926E1	1.19872E-7	2.51804E-3	2.51804E-3	6.31858E-3	3.00144E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16607E-1	-7.98345E-1	-9.13119E0	-9.14183E0	4.76837E-3	9.35555E-2	2.7258E1	-3.26585E1	-3.26407E1	2.68138E1	1.19991E-7	2.51182E-3	2.51182E-3	6.33388E-3	3.01356E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0941E0	-8.16464E-1	-7.98559E-1	-9.13074E0	-9.14183E0	4.76837E-3	9.33409E-2	2.73357E1	-3.26573E1	-3.26512E1	2.67926E1	1.20031E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.00676E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09426E0	-8.1656E-1	-7.9844E-1	-9.13103E0	-9.14168E0	5.03063E-3	9.35793E-2	2.73236E1	-3.26498E1	-3.26254E1	2.67746E1	1.19757E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09426E0	-8.16536E-1	-7.98345E-1	-9.13126E0	-9.14192E0	5.07832E-3	9.377E-2	2.72188E1	-3.26718E1	-3.26156E1	2.68233E1	1.20142E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.02875E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16798E-1	-7.9844E-1	-9.13141E0	-9.14176E0	4.76837E-3	9.39131E-2	2.74012E1	-3.26572E1	-3.26346E1	2.68058E1	1.1979E-7	2.51709E-3	2.51709E-3	6.3074E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09433E0	-8.16655E-1	-7.98559E-1	-9.13138E0	-9.14168E0	4.86374E-3	9.39369E-2	2.73021E1	-3.26844E1	-3.26024E1	2.68094E1	1.19872E-7	2.52139E-3	2.52139E-3	6.34099E-3	3.00942E-1
